Multi-channel Digital Sensor Monitor ( compatible)

(page 77 to 78) Y U16 0x0190 5 R/W (400) dtH2 (OUT2 delay time at ON) Setting of OUT1 delay time at ON. 0x0 ~ 0x1770 (0 ~ 6000) 0.01 s increment Y U16 0x0 6 R/W (0) Setting of OUT1 delay time at OFF. 0x0 ~ 0x1770 (0 ~ 6000) 0.01 s increment dtL2 (OUT2 delay time at OFF) Y U16 0x0 7 R/W (0) Setting of digital filter. 0x0 ~ 0x0BB8 (0 ~ 3000) 0.01 s increment 0x070B (1803) 0 R/W FiL (Digital

PF3A7xxH.eng

(Press the and buttons simultaneously for 1 second or longer) [ P] Select input switch operation [3000] 3000 L/min (PF3A706H) Accumulated flow error Sub display In measurement mode, the display of the sub display can be temporarily changed by pressing the or buttons. [6000] 6000 L/min (PF3A712H) [F 1] Installation Direct mounting Install the product with 4 screws suitable for the product

PF3A7xxH-L.eng

Only air, N2, are applicable. [6000] 6000 L/min (PF3A712H) [F 1] [ 150] 150 L/min (PF3A703H) The accumulated flow has exceeded the accumulated flow range. (For accumulated increment) [H_1 ] Setting of Hysteresis [ 300] 300 L/min (PF3A706H) Do not use the product in a place where static electricity is a problem. Otherwise it can cause failure or malfunction of the system.

Digital Flow Monitor

(Custom range) Relationship between analogue input and digital display Set value A B 200 0 L/min 200 L/min 500 0 L/min 500 L/min 1000 0 L/min 1000 L/min 2000 0 L/min 2000 L/min 3000(Default) 0 L/min 3000 L/min 6000 0 L/min 6000 L/min 12000 0 L/min 12000 L/min 16000 0 L/min 16000 L/min 20 0 L/min 20 L/min USEr Input value (setting) Input value (setting) -31No.PF-OMU0007-D Press

HRX-OM-X027

The recommend life time of the mechanical seal before needing replacement is 6000 to 8000 hours (usually 1 year) Check point to see leakage Fig. 8-3 Check for water leakage from pump HRS-R Series 8.2 Inspection and Cleaning 8-5 HRX-OM-X027 Chapter 8 Control, Inspection and Cleaning 8.2.5 Inspection for winter season Prevention of freezing of circulating fluid The product can prevent freezing

HRX-OM-W038

6000 Ambient Ambient temperature temperature 5000 5000 or or Cooling capacity[W] facility water temperature Cooling capacity[W] facility water temperature 4000 4000 3000 25 25 3000 32 32 40 40 2000 2000 1000 1000 0 0 0 10 20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature[] Circulating fluid temperature[] 50Hz 60Hz *The cooling capacity will be reduced by 300W when option: T and

HRX-OM-O021

6000 or or facility water facility water 5000 5000 temperature temperature 4000 4000 25 25 3000 3000 32 32 2000 2000 40 40 1000 1000 0 0 0 10 20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig. 9-4 Cooling capacity(HRS050--20-(BJM)) 9.5 Heating capacity 9.5.1 HRS050-A-20-(BJM) 2000 2000 Ambient Ambient temperature temperature 1500

HRX-OM-R005

6000 temperature temperature 5000 5000 25 25 4000 4000 32 3000 3000 32 2000 2000 40 40 1000 1000 0 0 0 10 20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature Circulating fluid temperature 60Hz 50Hz Fig. 9-4 Cooling capacity(HRS060--20-(BJM)) 1. 5 1. 5 1. 5 1. 5 1. 5 1. 5 kW kW kW kW kW kW 1 1 1 1 1 1 0. 5 0. 5 0. 5 0. 5 0. 5 0. 5 0 0 0 0 0 0 9.5 Heating capacity 0 2 0 2 0 2

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

min 2 200 PFMB 2 200 Thermal type (MEMS) 5 500 Dry air N2 1 L/min PFG300 10 1000 Bypass flow type 20 2000 PFMC(-L) Thermal type (MEMS) 5 500 Dry air N2 1 L/min PFG300 10 1000 Bypass flow type 20 2000 PF2A 1 10 0.1 L/min 0.5 L/min 5 50 Thermal type Air N2 1 L/min 10 100 (Thermistor) 2 L/min 20 200 5 L/min 50 500 PF3A H(-L) 30 3000 Body ported type 2 L/min Thermal type (Platinum sensor) 6000

3

L/min 10 Air N2 Argon CO2 0.5 25 Thermal type (MEMS) 0.1 L/min 1 50 2 100 PFMB 2 200 Thermal type (MEMS) 5 500 Dry air N2 1 L/min Bypass flow type 10 1000 20 2000 PFMC 5 500 Thermal type (MEMS) New New Dry air N2 1 L/min 10 1000 Bypass flow type 20 2000 PF2A 1 10 0.1 L/min 0.5 L/min 5 50 1 L/min 10 100 2 L/min 20 200 Thermal type (Thermistor) Air N2 5 L/min 50 500 5 L/min 150 3000 300 6000

1

New Products Guide 1 Directional Control Valves Actuators Vacuum Equipment CAT.E00-6A INDEX New Products Guide 1 Directional Control Valves 5 Port Solenoid Valve Fieldbus System (For Input/Output) 2/3 Port Mechanical Valve Series SY3000/5000/7000 Series EX600 Series VM100/200 P .6 P .264 P .322 Actuators Foot Pedal Type 5 Port Mechanical Valve XT34-60/67 Air Cylinder Air Cylinder Series CJ2

Angle Seat Valve

For Air 1.6 1.4 Upstream pressure of valve P1 Downstream pressure P2 [MPa] 1.5 MPa 1.6 MPa 1.2 1.3 MPa 1.4 MPa Subsonic 1.0 Critical pressure 1.2 MPa 1.1 MPa 0.8 1.0 MPa 0.9 MPa 0.8 MPa Sonic 0.6 0.7 MPa 0.6 MPa 0.5 MPa 0.4 0.4 MPa 0.3 MPa 0.2 0.2 MPa 0.1 MPa 0 VXB215A D(H) 10 12000 14000 8000 2000 4000 6000 VXB215B E(H) 16000 14000 10 12000 8000 2000 4000 6000 VXB215C F(H) 10 2000 6000 8000

ITV

7000 0.0 0.0 0 1000 2000 5000 6000 3000 4000 0.8 1.0 1.2 0.4 0.6 SRF Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Supply pressure (MPa) VCHR ITV ITV IC ITVX PVQ VEF VEP VER VEA VY1 VBA VBAT AP100 823 Series ITV1000/2000/3000 Construction ITV1000 Main Component Parts No.

Lubricator Series AL10 to 60

Lubrication cannot take place under a pressurized condition. 0.02 0 0 2000 4000 6000 8000 Caution Flow rate (/min (ANR)) 1. Check the dripping amount once a day.

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

Features 2 Series PFMB Flow Switch Flow Rate Variations Applicable flow range [L/min] Series Minimum Detection Applicable method setting unit fluid 1 2 3 3 2 1 0.5 0 0.5 PFMV 0 0.5 0 1 0 3 Thermal Air N2 type (MEMS) 0.5 0.5 1 1 3 3 Applicable flow range [L/min] Applicable Detection Minimum Series fluid method setting unit 1 2 0.2 0.5 5 10 20 25 50 100 150 200 300 500 600 1000 2000 3000 6000

Modular/F.R.L. Units Series AC

8000 2000 10 4000 6000 8000 2000 10 4000 6000 8000 2000 10 0 0 0 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Pressure Characteristics (Representative values) Conditions: Inlet pressure 0.7 MPa, Outlet pressure 0.2 MPa, Flow rate 20 l/min (ANR) AC25 AC10 AC20 0.3 Set point 0.25 Set point 0.25 Outlet pressure (MPa) Outlet pressure (MPa) Outlet pressure (MPa) Set

AC Servo Motor Driver

30 AP 1 1 1 1 Minimum command unit 1pulse AL 1 1 1 1 QD75 AM 1 1 1 1 Electronic gear AP 4000 20 6000 30 Minimum command unit 0.1 m AL 100.0[ m] 100.0[ m] 100.0[ m] 100.0[ m] AM 10 10 10 10 Note.

Modular F.R.L. Unit

6000 8000 2000 10 0 0 Flow rate L/min (ANR) Flow rate L/min (ANR) AC40 Rc 1/2 Specific Product Precautions 0.6 0.5 Outlet pressure MPa Mounting and Adjustment Air Supply 0.4 Caution 1.

Modular Type Lubricator Series AL

Drip failure can cause damage to the components that need lubrication. 0.04 0.02 0 0 2000 4000 6000 8000 Flow rate L/min (ANR) 51 Lubricator AL10 to 60 Construction AL10 AL20 w w e q q t IN OUT IN OUT y y r u u AL30, 40 AL50, 60 w w q t q e e t IN OUT OUT IN y r i r u y u Parts list Description Material Note No.

Delivery Pressure: P [50 to 6000 psig (0.34 to 41.4 MPa)], Relieving: 0 (Non-relieving), Material: C (300 SS Series), Ports: 4P (4 Ports), Connections: 4 (NPT 1/4 Inch), Gauge Port, Inlet: 60 [6000 psig (41 MPa)], Gauge Port, Outlet: 60 [6000 psig (41 MPa)], Pressure Gauge Unit: psig/bar (or None in Case of no Gauge), Main Valve Seat Material: Vespel®, Standard, O-ring Material: Viton®,