Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height) 30 40 10 20 30 40 0.6 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 0.5 0.4 Graph e Graph r Bore size 20, 32/ = 0 Bore size 20, 32/ = 0.1 0.3 0.2 0.1 80 80 5000 0 1000 2000 3000 4000 32 Lateral load F [N] 70 70 60 60 Load mass m [kg] Load mass m [kg] 50 50 32 40 40 30 30 20 20 20 20 10 10 10 20 30 40 10 20 30 40 0 0 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1
35% to 85% 5 to 20 60% to 95% Lead 16: LEY32A 112 Force [lbf] 21 to 50 60% to 85% 21 to 50 80% to 95% 90 1 to 4 20% to 65% 1 to 4 40% to 95% 67.4 LEY25lA LEY25l 5 to 20 35% to 65% 5 to 20 60% to 95% 45 21 to 35 50% to 65% 21 to 35 80% to 95% 22.5 1 to 4 20% to 85% 030 40 50 60 70 80 90 LEY32l 5 to 20 35% to 85% Set value of pushing force [%] 21 to 30 60% to 85% Max. 85% Note) For the vertical
Double piston construction achieves compact design with strong holding force. q r Mounting is possible from 4 directions. e w Model Bore size Holding force (N) q w MHF2-8D MHZ2-10D 8 10 19 11 MHF2-12D MHZ2-20D 12 20 48 42 w e r MHF2-16D MHZ2-25D 16 25 90 65 MHF2-20D MHZ2-32D 20 32 141 158 Features 2 Series MHF2 Model Selection Model Selection Selection procedure Confirm gripping force Confirm
is at least 10 to 20 times the workpiece weight.
thread MHC 26 74 10.6 MHT E MHY 20 20 24 33 MHW E MRHQ 2-4.3 through (Mounting hole) 0 -0.1 1.2 27 29 1.2 29 Misc.
MRHQ 0.4MPa 30 0.3MPa Misc. 0.3MPa 10 20 0.2MPa D0.2MPa 10 2060 40 20 40 30 20 10 0 0 80 Gripping point L mm Gripping point L mm MHF2-16D MHF2-20D 140 210 Pressure 0.7MPa Pressure 0.7MPa 120 180 0.6MPa 0.6MPa 100 Gripping force N Gripping force N 150 0.5MPa 0.5MPa 80 120 0.4MPa 0.4MPa 60 90 0.3MPa 0.3MPa 40 0.2MPa 60 0.2MPa 20 30 100 0 80 60 40 20 0 80 60 40 20 100 Gripping point L mm Gripping
= 20 x mg 10 x workpiece weight 20 x workpiece weight (Note) Even in cases where the coefficient of friction is greater than = 0.2, for safety reasons, SMC recommends selecting a gripping force which is at least 10 to 20 times the workpiece weight.
is at least 10 to 20 times the workpiece weight.
Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD
g) Bore size Stroke 8 12 20 25 32 8 mm 3 110 6 8 MIW8-8D 12 mm 20 mm 5 240 10 12 MIW12-12D 25 mm 650 10 30 20 MIW20-20D MIW 32 mm 1550 20 30 25 MIW25-25D For MIW, same stroke as bore size 2650 35 100 32 MIW32-32D Single finger type/MIS (mm) 62 10 MIS8-10D Bore size Stroke 2 3 80 20 MIS8-20D 8 12 20 25 32 10, 20 mm 10, 20, 30 mm 130 10 MIS12-10D 10, 20, 30 mm 3 5 160 20 MIS12-20D 30, 50 mm
Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD
(Example): CDU20-25D Bore size 6, 10, 16, 20, 25 32 32 32 Type M5 x 0.8 Rc 1/8 NPT 1/8 G 1/8 Symbol D Double acting CU Nil TN TF CQS Standard stroke (mm) 6, 10, 16 20, 25, 32 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 40, 50 CQ2 RQ Applicable Auto Switches/Refer to pages 1263 to 1371 for further information on auto switches.
10D MHL2-10D1 MHL2-10D2 MHL2-16D MHL2-16D1 10 40 60 L1 16 40 L2 146 98 158 178 116 226 138 238 278 166 1010 1175 1645 1840 1850 80 40 80 100 50 MHL2-16D2 MHL2-20D MHL2-20D1 MHL2-20D2 MHL2-25D 60 20 40 60 25 198 216 150 198 242 298 336 220 318 402 2720 2935 3070 3985 4820 100 120 70 120 160 188 246 286 MHL2-25D1 MHL2-25D2 MHL2-32D MHL2-32D1 MHL2-32D2 MHL2-40D MHL2-40D1 MHL2-40D2 40 30 32 20
10, 16, 20, 25: 40 mm, Bore size 32, 40: 80 mm.
Model Bore size mm Holding moment (effective value) (1) Opening/closing angle (both sides) Weight (2) Action Model g 39 91 180 311 10 16 20 25 0.10 0.39 0.70 1.36 MHC2-10D MHC2-16D MHC2-20D MHC2-25D 30 to 10 Double acting 0.070 0.31 0.54 1.08 10 16 20 25 39 92 183 316 MHC2-10S MHC2-16S MHC2-20S MHC2-25S MHC2-16S 30 to 10 Single acting MHC2-10D Note1) At pressure 0.5MPa.
o.s, ercept dyo6.. op.Btins PEssubs: 28" vacuum 0 PStc {20 Kgt/cnf)' NVS/tl|-4 Prssure Fanoe: 28" vacul 3@ rlc {20 Kgrcnti) Lakage: Irort lo pon (nt.maD not to .xce.d 0.005 coblc fl pr hinut at 1@ PstG (6.7 toam) Mel4islr: all houshc !6n. atumhum d|6 cas|ngg $oor arld stc@ a40F 61atnt6r. p.5rlvated ad hdtJoai.d lo 5a52 FE*wdl c 96* orlnot Blra N, sp&.r end dl.nl hou3in!
MI-A2003-20 MI-A2503-25 MI-A3203-32 MI-A0802-8 MI-A1202-12 MI-A2002-20 MI-A2502-25 MI-A3202-32 MI-A0801-8 MI-A1201-12 MI-A2001-20 MI-A2501-25 MI-A3201-32 MI-A1201-12 MI-A1202-12 MI-A1203-12 MIW12-PS MIW-A1204 MI-A2001-20 MI-A2002-20 MI-A2003-20 MIW20-PS MIW-A2004 MH-G01 MH-G01 (contents quantity 30 g) MI-A2501-25 MI-A2502-25 MI-A2503-25 MIW25-PS MIW-A2504 MI-A3201-32 MI-A3202-32 MI-A3203-
Three-type dust cover variations for diversified applications Note 1) Note 2) Model Opening/Closing stroke (mm) Mass (g) Operating system Model Cylinder bore (mm) Gripping force (Effective value) N MHQJ2-10D 10 11 4 90 MHZ MHQJ2-16D 6 16 34 180 Double acting MHQJ2-20D 10 20 42 340 MHF MHQJ2-25D 14 25 63 640 MHQJ2-10S 4 10 7.8 90 MHL MHQJ2-16S 6 16 26 181 Normally open MHQJ2-20S 10 20 33 342