Motor: 5-Phase Stepping Motor, Ball Screw Lead: 6mm, Stroke: 150mm, Home Position Switch: None, Brake: None, Auto Switch: M9BL--Solid State, Gen. Purpose, 2 Wire, Horizontal, 3M, Number: 3 pcs., Proximity Switch: -, Number of Proximity Switches: -

Motor: 5-Phase Stepping Motor, Ball Screw Lead: 12mm, Stroke: 75mm, Home Position Switch: Yes (Cable Length 0.3m), Brake: w/Motor Brake, Auto Switch: M9BL--Solid State, Gen. Purpose, 2 Wire, Horizontal, 3M, Number: 3 pcs., Proximity Switch: -, Number of Proximity Switches: -

Vacuum Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Switching Type: 2-Position Normally Closed, Piping Opening: Flange, Flange Type: NW, Flange Size Nominal: 40, Seal Type: Bellows Seal, Valve Type: Angle type, Indicator: With indicator, Pilot Port Direction: Flange surface, left, Temperature Range(°C): 5 to 60, Switch Part Number: D-M9BL

Vacuum Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Switching Type: 2-Position Normally Closed, Piping Opening: Flange, Flange Type: NW, Flange Size Nominal: 50, Seal Type: Bellows Seal, Valve Type: Angle type, Indicator: With indicator, Pilot Port Direction: Flange surface, left, Temperature Range(°C): 5 to 60, Switch Part Number: D-M9BL

Stroke(mm): 10, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.12～0.7, Cushion: Rubber cushion, Port thread type: M5 × 0.8, Auto Switches: M9BL

Stroke(mm): 20, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.06～0.7, Cushion: Rubber cushion, Port thread type: M5 × 0.8, Auto Switches: M9BL

, Stroke(mm): 5, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.06～0.7, Cushion: Rubber cushion, Port thread type: M5 × 0.8, Auto Switches: M9BL

Stroke(mm): 10, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.06～0.7, Cushion: Rubber cushion, Port thread type: M5 × 0.8, Auto Switches: M9BL

, Stroke(mm): 5, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.05～0.7, Cushion: Rubber cushion, Port thread type: M5 × 0.8, Auto Switches: M9BL

Stroke(mm): 20, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.05～0.7, Cushion: Rubber cushion, Port thread type: M5 × 0.8, Auto Switches: M9BL

Flange, Tube: 125~160 Aluminum (with or w/o magnet);180~200 Steel (w/o magnet),Aluminum (w/magnet);250 Steel, Bore Size: 160mm, Thread: Rc, Stroke: 250mm, Option: Cushion at Both Ends, Cylinder Switch Type: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Pre-wired Connector: 3m Lead Wire, Number: 1 pc., Lock Unit Built-in Magnet: Built-in, Lock Unit Switch Type: M9BL

(Or None in the Case of No Switch), Lock Unit Built-in Magnet: Built-in, Lock Unit Switch Type: M9BL--Solid State , Gen. Purpose, 2 Wire, Horizontal, 3M

(Or None in the Case of No Switch), Lock Unit Built-in Magnet: Built-in, Lock Unit Switch Type: M9BL--Solid State , Gen. Purpose, 2 Wire, Horizontal, 3M

(Or None in the Case of No Switch), Lock Unit Built-in Magnet: Built-in, Lock Unit Switch Type: M9BL--Solid State , Gen. Purpose, 2 Wire, Horizontal, 3M

(Or None in the Case of No Switch), Lock Unit Built-in Magnet: Built-in, Lock Unit Switch Type: M9BL--Solid State , Gen. Purpose, 2 Wire, Horizontal, 3M

(Or None in the Case of No Switch), Lock Unit Built-in Magnet: Built-in, Lock Unit Switch Type: M9BL--Solid State , Gen. Purpose, 2 Wire, Horizontal, 3M

(Or None in the Case of No Switch), Lock Unit Built-in Magnet: Built-in, Lock Unit Switch Type: M9BL--Solid State , Gen. Purpose, 2 Wire, Horizontal, 3M

(Or None in the Case of No Switch), Lock Unit Built-in Magnet: Built-in, Lock Unit Switch Type: M9BL--Solid State , Gen. Purpose, 2 Wire, Horizontal, 3M

4-channel Flow Monitor ( compatible)

Item Display Content Setting of connection product [4L] 4 L range [16L] 16 L range [40L] 40 L range [PFW] is selected [100L] 100 L range [250L] 250 L range [10L] 10 L range [rAnG] [50L] 50 L range Selection of flow range [100L] 100 L range [PFA] is selected [200L] 200 L range [500L] 500 L range [4L] 4 L range [PFd] is selected [16L] 16 L range [40L] 40 L range Press the SET button to set.

Digital Flow Switch (Remote type monitor unit)

PF2A30 series PF2A31 series 1 to 10 L/min type (PF2A510) 5 to 50 L/min type (PF2A550) [11L]: [21L]: [51L]: 10 to 100 L/min type (PF2A511) 20 to 200 L/min type (PF2A521) 50 to 500 L/min type (PF2A551) [10L]: [50L]: PF2W30 series PF2W33 series [11L]: 10 to 100 L/min type (PF2W511) 0.5 to 4 L/min type (PF2W504) [04L]: [20L]: [40L]: 2 to 16 L/min type (PF2W520) 5 to 40 L/min type (PF2W540) PF2D30