VBA-OM-S007

VBA-OM-S007 4 13 ()() OUT () 30 1 1 VBA2 4 VBA4 4 VBA2 1 O VBA4 1 1 1 VBA4 4 VBA2 4 1 1 1 1.0MPa ( 3 ) VBAT-V1 () () VBAT20S1-T-X104VBAT38S1-T-X104 / / VBAT-M47C / VBAT-M47 / 2 /VBAT20S-Y-4 VBAT-T OUT VBAT-M47C VBAT20S1-T-X104 VBAT38S1-T-X104 VBAT20S1-T-X104 VBAT38S1-T-X104 13kg 19kg 20L 38L OUT 1/2 3/4 O IN TSG R0003-2007 VBA2/VBA4 1.0MPa SUS304 0~75

Modular F.R.L. Unit

When mounting a check valve, make sure the arrow (IN side) points in the correct direction of air flow. 2 AC10 to 60 Conditions: Inlet pressure 0.7MPa Outlet pressure 0.2MPa Flow rate 20L/min (ANR) Pressure Characteristics (Representative values) AC10 AC40-06 0.3 0.25 Set point Outlet pressure MPa Outlet pressure MPa 0.25 Set point 0.2 0.2 0.15 0.15 0 0 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0

Dual Rod Cylinder/High Speed Specification Type Series CXS-XB19

XB19 30 109 90 (Z) (30) 2-M5 x 0.8 Thread depth 8 CXS15-35-XB19 35 114 95 35 CXS15-40-XB19 40 119 100 8 CXS15-45-XB19 45 124 105 CXS15-50-XB19 50 129 110 CXS15-60-XB19 60 139 120 CXS15-70-XB19 70 149 130 45 CXS15-75-XB19 75 154 135 CXS15-80-XB19 80 159 140 CXS15-90-XB19 90 169 55 150 CXS15-100-XB19 100 179 160 CXS20--XB19 ZZ S 14 10 SS 25 2-3.4 through 2-6.5 counter bore depth 3.3 2-4 x 20l

Miniature Regulator Series ARJ310

Downstream pressure MPa Downstream pressure MPa Downstream pressure MPa 0.5 0.5 0.5 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 0.0 0.0 0.0 0 100 200 300 400 500 600 0 100 200 300 400 500 600 0 100 200 300 400 500 600 Flow rate l/min (ANR) Flow rate l/min (ANR) Flow rate l/min (ANR) Pressure Characteristics Conditions: Upstream pressure 0.7MPa Downstream pressure 0.2MPa Flow rate Q = 20l

Round Type Low Pressure Hydraulic Cylinder Series CH
M

Cotter pin size C type, 9 for shaft C type, 9 for shaft 3 x 18l 3 x 18l Size Tolerance -0.013 -0.035 -0.013 -0.035 -0.016 -0.043 -0.016 -0.043 AD-EI-20 AD-EI-25 AD-EI-32 AD-EI-40 20 25 32 40 45.5 45.5 52 60 35.5 35.5 42 50 3.2 3.2 4 4 10 10 12 12 +0.058 0 +0.2 +0.1 Y-02 14 5 20 18 M8 x 1.25 36 16 9 3.2 x 16l 20 CDP-1 9 +0.058 0 +0.2 +0.1 Y-03 14 5 20 18 M10 x 1.25 38 18 9 25 CDP-1 9 4 x 20l

Thermo-cooler (A cooling device using circulating water) Series HRG

matter in the circulating water Retrofit units are also sold separately HRG002 HRG005 HRG001 Model Air-cooled, water-cooled Cooling method Cooling capacity *1 (50/60Hz) 0.9/1.1kw 1.9/2.3kw 4.5/4.8kw Operating temperature range 5 to 35C 0.5C, 1.0C Temperature stability *2 Pump capacity (50/60Hz) 33/42l/min (pump head 10m) 29/37l/min (pump head 10m) Tap water Circulating water Approximately 20l

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

40.6] 30.5 19.5 5.3 1.8 8.2 4 B A Manual override 7 21.8 (Mounting holes for manifold) G : About 300 H : About 600 23.2 equivalent (Mounting holes) Bracket (Lead wire length) 18.5 (Non-locking) Manual override 28 [34.5] 15.6 18.5 20 13.5 9 46.5 35.5 40.4(GZ:41.1) [42.1] 91.7(GZ:93.1) [95.1] R R P 11 0.5 10 5-M3 0.5 (Piping port) 7 7 [ ] for AC 3 4 5 3 4 5 L type plug connector (L) : SYJ3 20L

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

ARBQ5000-00-P (PA) ARBQ5000-00-P (PB) 0.7 0.7 0.6 0.6 Downstream pressure MPa Downstream pressure MPa 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 2500 2000 1500 1000 500 3000 0 0 2500 2000 1500 1000 500 3000 Flow rate l/min (ANR) Flow rate l/min (ANR) Note: 1MPa = 145psi 1l/min = 0.035SCFM Pressure Characteristics Conditions Upstream pressure: 0.7MPa Downstream pressure: 0.2MPa Flow rate: 20l

MPC 105T Dry Pump System, universal voltage - 20L/min, 1.5 Torr

Set Flow: 20 (10~20l/min), Thread: N (NPT), Port Size: 04 (1/2), Terminal Box: 2 [Terminal Box (Contact 2b), Neon Lamp: 0 (w/o Neon Lamp)

Set Flow: 20 (10~20l/min), Thread: Rc(PT), Port Size: 06 (3/4), Terminal Box: 7 [Terminal Box (For 24VDC, -COM, Contact 1b)], Neon Lamp: 5 [LED Light (Red for 24VDC)]

Set Flow: 20 (10~20l/min), Thread: N (NPT), Port Size: 04 (1/2), Terminal Box: 1 [Terminal Box (Contact 1ab)], Neon Lamp: 0 (w/o Neon Lamp)

Set Flow: 20 (10~20l/min), Thread: N (NPT), Port Size: 04 (1/2), Terminal Box: 1 [Terminal Box (Contact 1ab)], Neon Lamp: 1 [Neon Lamp (for 110VAC Red)]

Set Flow: 20 (10~20l/min), Thread: N (NPT), Port Size: 04 (1/2), Terminal Box: 5 [Terminal Box (For 24VDC, +COM, Contact 1b)], Neon Lamp: 5 [LED Light (Red for 24VDC)]

Set Flow: 20 (10~20l/min), Thread: N (NPT), Port Size: 04 (1/2), Terminal Box: 7 [Terminal Box (For 24VDC, -COM, Contact 1b)], Neon Lamp: 5 [LED Light (Red for 24VDC)]

Set Flow: 20 (10~20l/min), Thread: N (NPT), Port Size: 06 (3/4), Terminal Box: 0 [w/o Terminal Box (Contact 1ab)], Neon Lamp: 0 (w/o Neon Lamp)

Set Flow: 20 (10~20l/min), Thread: N (NPT), Port Size: 06 (3/4), Terminal Box: 0 [w/o Terminal Box (Contact 1ab)], Neon Lamp: 1 [Neon Lamp (for 110VAC Red)]

Set Flow: 20 (10~20l/min), Thread: N (NPT), Port Size: 06 (3/4), Terminal Box: 1 [Terminal Box (Contact 1ab)], Neon Lamp: 1 [Neon Lamp (for 110VAC Red)]

Set Flow: 20 (10~20l/min), Thread: N (NPT), Port Size: 06 (3/4), Terminal Box: 7 [Terminal Box (For 24VDC, -COM, Contact 1b)], Neon Lamp: 5 [LED Light (Red for 24VDC)]

Set Flow: 20 (10~20l/min), Thread: Rc(PT), Port Size: 03 (3/8), Terminal Box: 0 [w/o Terminal Box (Contact 1ab)], Neon Lamp: 1 [Neon Lamp (for 110VAC Red)]