HRX-OM-R039

(The capacity of the container should be approx. 10L.) Circulating fluid return port Tank lid Circulating fluid outlet Drain port Clip Drain plug Normal Liquid discharge Container Fig 7.4-1 Drain the circulating fluid and facility water from the product HRSE Series 7.3 Consumables 7-5 HRX-OM-R039 Chapter 7 Control, Inspection and Cleaning 2. Remove the tank lid. 3.

HEC-OM-U015

(Circulating fluid OUT is directly connected with IN) 1500 6 Output Cutoff Alarm a contact 1500 Cooling capacity (Set Temp. 20C and Facility water Temp. 20C, 10L/min) The product is operated at high voltage.

Electric Actuator Miniature Rod Type Miniature Slide table Type

Acceleration / deceleration pattern 1: Trapezoid motion S-motion ratio 0 Stroke (+) 1000.00 Stroke (-) -1000.00 Maximum speed Max. speed of each product Step data input limit: Max. speed of each product Maximum acceleration / deceleration 3000 to 3000 Default In positioning 0.5 Origin offset 0.00 Note 2) LEP 6 (Basic) 100 70 to 100 Maximum pushing force LEP 10 (Basic) 100 50 to 100 LEP 10L

MHT2

Note 50 63 32 40 Bore size (mm) Action Double acting Reed switch D-A7/A8 D-A73C/A80C D-A7H/A80H D-A79W Solid state switch D-F7/J79 D-F7V D-J79C D-F7W/J79W D-F7WV D-F7BAL/F78AVL D-F79F Fluid Air 0.1 to 0.6 MPa Operating pressure Switch mounting screw (M3 x 0.5 x 10l) Switch spacer Switch mounting nut. 5 to 60C Ambient and fluid temperature 32, 40 50, 63 BQ-2 Lubrication Not required 3 to

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40

Note Auto switch part no. 8.34 8.34 6.86 When extended Spring force (N) 20.50 20.50 15.98 When retracted 205 to 60C Operating temperature range Switch mounting screw M2.5 x 10l D-E73A/ 76A/80A BMY1 -025 Data Switch mounting nut Weight (kg) D-M5N/ M5P/M5B D-M5NW/ M5PW/ M5BW D-M5NTL/ M5PTL 25 32 40 Side support weight (per set) Stroke adjustment unit weight (per unit) Basic weight Additional

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Note Auto switch part no. 8.34 8.34 6.86 When extended Spring force (N) 20.50 20.50 15.98 When retracted 205 to 60C Operating temperature range Switch mounting screw M2.5 x 10l D-E73A/ 76A/80A BMY1 -025 Data Switch mounting nut Weight (kg) D-M5N/ M5P/M5B D-M5NW/ M5PW/ M5BW D-M5NTL/ M5PTL 25 32 40 Side support weight (per set) Stroke adjustment unit weight (per unit) Basic weight Additional

MLGP

In order to hold the locked state, be sure to follow the steps below after confirming safety. 1) Remove the dust cover (1). 2) Supply air pressure of 0.2 MPa or more to the unlocking port (2) shown below and unlock. 3) Screw the attached hexagon socket head cap bolt (3) (20, 25: M3 x 0.5 x 5l, 32: M3 x 0.5 x 10l), into the lock ring to hold the unlocked condition. 2.

Secondary Batteries

Applicable bore size Description Size Quantity Part M3 x 0.5 x 6L 1 20, 25 Auto switch mounting screw M3 x 0.5 x 8L 1 BBA2 M3 x 0.5 x 10L 1 32 to 50 1 20, 25 Auto switch mounting nut (square) M3 x 0.5 M3 x 0.5 1 32 to 50 Auto switch mounting nut (convex) Note 3) A spacer (black resin) for BQ-2 is not included.

CE

Bore size (mm) Applicable switch Note 175 200 250 300 400 500 150 125 100 75 25 50 12 Switch mounting screw (M3 x 0.5 x 8l) Square nut D-A7, A8 D-A7H, A80H D-A73C, A80C D-A79W D-F7V D-F7, J7 D-J79C D-F7WV D-F79W, J79W 12 20 BQ-1 20 32 32 40 50 63 40 Switch mounting screw (M3 x 0.5 x 10l) Switch spacer Switch mounting nut 50 BQ-2 63 Contact SMC regarding non-standard strokes.

CLK1

Step 3) Screw in the accessory unlocking bolt (hexagon socket headcap screw 32: M3 x 8l, 40: M4 x 8l, 50: M4 x 8l, 63: M5 x 10l). 1. Piping port position, switch rail position, and by-pass piping position can be selected by the part number. However, if there is an error in ordering and changes to the positions are required, please note the following. a.

Table of Contents

Note 50 63 32 40 Bore size (mm) Action Double acting Reed switch D-A7/A8 D-A73C/A80C D-A7H/A80H D-A79W Solid state switch D-F7/J79 D-F7V D-J79C D-F7W/J79W D-F7WV D-F7BAL/F78AVL D-F79F Fluid Air 0.1 to 0.6 MPa Operating pressure Switch mounting screw (M3 x 0.5 x 10l) Switch spacer Switch mounting nut. 5 to 60C Ambient and fluid temperature 32, 40 50, 63 BQ-2 Lubrication Not required 3 to

MHT2

Note 50 63 32 40 Bore size (mm) Action Double acting Reed switch D-A7/A8 D-A73C/A80C D-A7H/A80H D-A79W Solid state switch D-F7/J79 D-F7V D-J79C D-F7W/J79W D-F7WV D-F7BAL/F78AVL D-F79F Fluid Air 0.1 to 0.6 MPa Operating pressure Switch mounting screw (M3 x 0.5 x 10l) Switch spacer Switch mounting nut. 5 to 60C Ambient and fluid temperature 32, 40 50, 63 BQ-2 Lubrication Not required 3 to

Air Fittings & Tubing

KQ2H04-M5, M6 KQS, KQ2S04-M5, M6 KQL, KQ2L04-M5, M6 KQT, KQ2T04-M5, M6 KQY, KQ2Y04-M5, M6 4 KQ2C-04l 2.9 10.1 5.2 4 KQ2C-04A-l 8.5 5 2.2 0.1 2.2 4 KQ2C-04B-l 9.7 5 0.1 Kl 0.1 6 KQ2C-06l 2.9 12.1 7.2 KQH, KQ2H06-M5, M6 KQS, KQ2S06-M5, M6 KQL, KQ2L06-M5, M6 KQT, KQ2T06-M5, M6 KQY, KQ2Y06-M5, M6 Ml 2.2 6 KQ2C-06A-l 10.5 7 0.1 Hl 2.2 6 KQ2C-06B-l 12.0 7 0.1 8 KQ2C-08l 14.1 9.2 2.9 0.1 Dl 10 KQ2C-10l

Series IDG

noise reduced with built-in silencer Except IDG1, IDG3, IDG3H, IDG5, IDG5H, IDG30, IDG30H, IDG30L, IDG50, IDG50H, IDG50L Outlet air atmospheric pressure dew point 60C (76F) (IDG60S, IDG75S, IDG100S) Purge air discharge fitting for dehumidification Unit style Integrated pre-filter and regulator ( ) IDG1 Flexible piping is possible Low flow rate type tube configuration Outlet air flow rate:10l

MLGP

In order to hold the locked condition, be sure to follow the procedures below after confirming safety. 1) Remove the dust cover . 2) Supply air pressure of 0.2MPa or more to the unlocking port shown below and unlock. 3) Screw in the hexagon socket head cap bolt (20, 25: M3 x 0.5 x 5l, 32: M3 x 0.5 x 10l), included, into the lock ring and hold the unlocked condition. 2.

MLGP

In order to hold the locked condition, be sure to follow the procedures below after confirming safety. 1) Remove the dust cover . 2) Supply air pressure of 0.2MPa or more to the unlocking port shown below and unlock. 3) Screw in the hexagon socket head cap bolt (20, 25: M3 x 0.5 x 5l, 32: M3 x 0.5 x 10l), included, into the lock ring and hold the unlocked condition. 2.

CE

Bore size (mm) Manufacturable stroke range Applicable auto switch Note D25 50 100 75 125 150 175 200 250 300 400 500 12 25 to 150 D-A7/A80 D-A7H/A80H D-A73C/A80C D-A79W D-F7V D-F7/J79 D-J79C D-F7WV D-F7W/J79W D-F7BAL/F7BAVL D-F79F/F7NTL Switch mounting screw (M3 x 0.5 x 8l ) Square nut 12 20 -X BQ-1 20 25 to 300 32 2025 to 400 40 25 to 600 32 40 50 63 Switch mounting screw (M3 x 0.5 x 10l

Flow Range: 10 (1~10l/min), Thread: F (G thread), Port Size: 01 (Port Size 1/8), Wiring Specification: 3m Lead Wire w/Connector, Output Specification: 1 (Pulse Output + Analog Output (1~5V))

Flow Range: 10 (1~10l/min), Thread: F (G thread), Port Size: 01 (Port Size 1/8), Wiring Specification: N (w/o Lead Wire), Output Specification: 1 (Pulse Output + Analog Output (1~5V))

Flow Range: 10 (1~10l/min), Thread: F (G thread), Port Size: 01 (Port Size 1/8), Wiring Specification: N (w/o Lead Wire), Output Specification: 2 (Pulse Output + Analog Output (4~20mA))