Specification: Clean Series, Vacuum Type, Bore Size: 8 mm, Symmetric Type: Standard, Stroke: 20mm, Adjuster: Metal Stopper Both Ends, Function: w/o Axial Piping, Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -

Specification: Clean Series, Vacuum Type, Bore Size: 8 mm, Symmetric Type: Standard, Stroke: 20mm, Adjuster: Metal Stopper Both Ends, Function: w/o Axial Piping, Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 1m, Number: -

Specification: Clean Series, Vacuum Type, Bore Size: 8 mm, Symmetric Type: Standard, Stroke: 20mm, Adjuster: Metal Stopper Both Ends, Function: w/o Axial Piping, Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: -, Number: -

Specification: Clean Series, Vacuum Type, Bore Size: 8 mm, Symmetric Type: Standard, Stroke: 20mm, Adjuster: Metal Stopper Both Ends, Function: w/o Axial Piping, Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9NW--Solid State, 2-color Indication, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: -, Number: -

Specification: Standard Type (Not Clean Room), Bore Size: 8 mm, Symmetric Type: Standard, Stroke: 15mm, Adjuster: C (Metal Stopper Both Ends), Function: w/o Axial Piping, Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9NV--Solid State, Gen. Purpose, 3 Wire NPN, Vertical

Specification: Standard Type (Not Clean Room), Bore Size: 8 mm, Symmetric Type: Standard, Stroke: 15mm, Adjuster: Metal Stopper Both Ends, Function: w/o Axial Piping, Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9NV--Solid State, Gen. Purpose, 3 Wire NPN, Vertical, Lead Wire or Prewired Connector: -, Number: -

Bore Size: 12mm, Symmetric Type: Standard, Stroke: 20mm, Adjuster: C (Both Side Adjusters/Metal Stoppers), Function: Standard, Auto Switch: M9NV--Solid State, Gen. Purpose, 3 Wire NPN, Vertical, 0.5M

Bore Size: 8mm, Symmetric Type: Standard, Stroke: 20mm, Adjuster: C (Both Side Adjusters/Metal Stoppers), Function: Standard, Auto Switch: M9NV--Solid State, Gen. Purpose, 3 Wire NPN, Vertical, 0.5M

Bore Size: 12mm, Symmetric Type: Standard, Stroke: 20mm, Adjuster: Both Side Adjusters/Metal Stoppers, Function: Standard, Auto Switch: M9NV--Solid State, Gen. Purpose, 3 Wire NPN, Vertical, 0.5M, Lead Wire or Prewired Connector: -, Number: -

2

(No freezing of the fluid) Note 2) ANR indicates the flow rate converted to the value at 20C, under the atmospheric pressure and the state of relative humidity 65%.

Refrigerated Thermo-chiller

) 2.0 (at 20C) 4.0 (at 20C) 8.0 (at 20C) 2.0 (at 20C) 8.0 (at 20C) 4.0 (at 10C) 8.0 (at 10C) 2.8 (at 10C) 3.2 (at 10C) 2.3 (at 20C) 2.6 (at 20C) 2.8 (at 20C) 3.0 (at 20C) 2.3 (at 20C) 3.3 (at 20C) 3.6 (at 10C) 5.9 (at 10C) Cooling capacity Note 3) (kW) Heating capacity Note 3) (kW) Temp. stability Note 4) (C) 0.1 Pump capacity Note 5) (50/60 Hz) (MPa) 0.45/0.65 (at 20 l/min) 0.45/0.65 (at

Table of Contents

The minimum bending radius indicates the value, at which the tubing gets bended at the temperature of 20C.

Table of Contents

Note) Not applicable with the cases of standard dew point 20C (Nil), 15C (symbol H).

T

The minimum bending radius indicates the value, at which the tubing gets bended at the temperature of 20C.

HRX-OM-I051

E.g.: TEMP SP value: +20C, OFFSET value: +2C Circulating fluid discharge temp.: +20C, TEMP PV: +20C When OFF is selected If no mode is selected, temperature control is conducted to allow the discharge temperature of the circulating fluid to be TEMP SP value.

1.1

V After 15 min, cool 32C down to 20C.

Series IDG

Port size Thread type Symbol Bore Size Nil N F Rc NPT G 1 5 10 20 30 3 50 60 75 100 01 1/8 02 1/4 04 1/2 03 3/8 Standard Specifications/Single Style (Standard Dew Point 20C [4F]) Standard dew point 20C (4F) Model IDG1 IDG5 IDG10 IDG20 IDG30 IDG50 IDG60 IDG75 IDG100 IDG3 IDG1 Fluid Compressed air Range of operating conditions Standard performance conditions Standard performance Inlet air

IDG

Note) Not applicable with the cases of standard dew point 20C (Nil), 15C (symbol H).

Thermo-chiller/Rack Mount Type

of 20%, V 1120 [W] x 1.2 = 1344 [W] After 15 minutes, cool 32C down to 20C. * This is the calculated value by changing the fluid temperature only.

Table of Contents - Tubing

Note 3) The value at a temperature of 20C.