CRQ2

, 20, 30, 40 10, 15 10, 15 20, 30, 40 Chart 5.

CHKD/CHKG

1.5 7 19 53 128 83.5 81 1/4 22 10 15 24 12 84 108 32 35 M24 x 1.5 8 24 62 146 100.5 97 1/4 25.5 10 18 30 15 97 127 42 45 M30 x 1.5 9 30 78 175 121.5 117 3/8 30 15 20.5 35 17.5 113 148 57 60 M39 x 1.5 14 41 98 221 147 142 3/8 36 15 23 40 20 136 176 72 75 M48 x 1.5 21 50 118 254 271 Auto Switch Mounting CHKD Series Refer to pages 431 to 490 for detailed specifications.

CXS

44.5 A 19.5 29.5 35.5 43 44 53 D 7.5 5 2 5 7 7.5 MY 6 10 15 20 25 32 CY MG CX Note 1) 6: D-A90, D-A96, D-A93, D-F9BAL 10: D-A90, D-A96, D-A93 Only outward electrical entry (D dimension) is available.

CXS

When using CXSJM6-10 and l = 15 mm: Imaginary stroke l = 10 + 2.75 + 15 = 27.75 Therefore, the graph used for your model selection should be the one for CXSJM6-30 (6) ). 2.75 mm 10 4 mm 15 5 mm 20 6 mm 25 2.

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

2, 4, 6, 8 10 + 55 (n 2) /2 n = 2, 4, 6, 8 20 + 55 (n 2) /2 n = 2, 4, 6, 8 1 15 25 2 (Different surfaces, Same surface) 20 15 25 D-A59W n 20 + 55 (n 2) /2 n = 2, 4, 6, 8 15 + 55 (n 2) /2 n = 2, 4, 6, 8 25 + 55 (n 2) /2 n = 2, 4, 6, 8 2 (Different surfaces, Same surface) 1 15 10 15 D-Y59m D-Y7P D-Y7mW D-Z7m D-Z80 n 15 + 40 (n 2) /2 n = 2, 4, 6, 8 10 + 40 (n 2) /2 n = 2, 4, 6, 8 15

Table of Contents

x 18l 18 5 5 M3 x 18l 18 5 5 M3 x 18l 18 5 With Auto Switch For Axial Mounting For Lateral Mounting B 27 29 31 33 38 27 29 31 33 38 43 27 29 31 33 38 43 C D Model Mounting bolt CDUJB6-4 -6 -8 -10 -15 CDUJB8-4 -6 -8 -10 -15 -20 CDUJB10-4 -6 -8 -10 -15 -20 Model Mounting bolt CDUJB6-4 -6 -8 -10 -15 CDUJB8-4 -6 -8 -10 -15 -20 CDUJB10-4 -6 -8 -10 -15 -20 A M3 x 27l M3 x 29l M3 x 31l M3 x 33l

24

2 pcs. 15 D-P4DW 1 pc. 5 *2, 3 2 pcs.

High Vacuum Angle Valve

(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) * Standard lead wire length is 0.5 m.

CE

D-F9N, F9P, F9B 11.9 16 78.2 85 D-F9NV, F9PV, F9BV 10.9 15 79.2 86 D-F9NW, F9PW, F9BW 11.9 16 78.2 85 D-F9NWV, F9PWV, F9BWV Switch operating position (OFF) 10.9 15 79.2 86 D-F9BA 11.9 16 Note) This varies according to the operating environment, and cannot be guaranteed.

Basic type / Direct mount type Series CY3B/CY3R

of numbers 15 through 19.

Air Slide Table Series MXS

Refer to the Specific Product Precautions. 28.5 32 Z ZZ G (NN 1) x H 8.5 18.5 8.5 18.5 H B A 4.2 8.5 9 9 20 1 4H9 depth 3.5 +0.030 0 5 B A NN x M5 x 0.8 thread depth 10 4H9 depth 3.5 +0.030 0 HA GA Section AA Section BB (mm) HA 40 40 40 25 36 72 76 Model F 35 35 35 50 35 55 65 N 4 4 4 4 6 6 6 G 15 15 15 17 15 25 35 H 40 40 40 25 36 36 38 NN 2 2 2 3 3 4 5 GA 15 15 15 42 51 61 111 I 10 10

MXS

15 15 17 15 25 35 ZZ 80 80 80 92 112 158 212 N 4 4 4 4 6 6 6 M 71 71 71 83 103 149 203 GA 15 15 15 42 51 61 111 KA Z 70 70 70 82 102 148 202 NA 2 2 2 2 2 4 4 Refer to "Dimensions" of MXS 12 on p.3.11-17 for one with shock absorber as symmetric.

58

with rod boot on both sides) ZZ + 2 x strokes (mm) Bore size (mm) 125 140 160 Stroke range (mm) B A AL B C D E F FD FT FX FY FZ J W V KA M G K Up to 1000 15 50 47 143 145 115 32 71 43 19 14 190 100 230 M14 x 1.5 17 27 13 15 15 Up to 1000 15 50 47 157 160 128 32 71 43 19 20 212 112 255 M14 x 1.5 17 27 13 15 15 Up to 1200 15 56 53 177 180 144 38 78.5 42 19 20 236 118 275 M16 x 1.5 20 34 15

MXS Series Air Slide Table

MXS12BS, BT, B 17 A 8 31.5 31.5 15 15 45 Shock absorber at retraction end Shock absorber at extension end (mm) Stroke 10 Stroke 75, 100 Stroke adjustment range Retracting 2 5 15 15 5 15 15 A dimension (Retracted side mounting) Extending Model A A MXS12-10 MXS12-20 MXS12-30 MXS12-40 MXS12-50 MXS12-75 MXS12-100 7 17 27 25 15 28 28 Max. 20 Shock absorber at retraction end Other dimensions not

MY1

MY1M/M2 MY1M/M3 MY1M/M1 16 20 25 32 40 50 63 3.0 1.0 MX 2.1 7 6.0 18 200 5.2 1.7 3 10.4 10 26 40 50 20 MTS 9.0 2.4 4.5 15 15 38 MY1M 15 5.0 6.6 23 30 57 100 30 24 MY 8.0 10 33 59 84 10 38 15 14 48 115 120 20 60 CY 19 21 The above values are the maximum allowable values for moment and load.

Magnetically Coupled Rodless Cylinder

C D 15, 20 (mm) Applicable switch model Bore size (mm) D-A9 D-F9, D-A9W A B C D A B C D 15 56.5 17.5 76.5 21.5 72.5 60.5 87.5 67.5 20 39.5 19.5 23.5 83.5 35.5 71.5 Note 1) Auto switches cannot be installed in Area C in the case of 15.

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

Bore size (mm) 32 40 50 63 80 100 125 l2 d3 CN S5 K1 G1 G2 EN EU CH H6 11 10 6.6 38 51 8.5 21 18 31 14 10.5 32 10 15 11 12 6.6 41 54 8.5 24 22 35 16 12 36 10 18 15 16 9 50 65 10.5 33 30 45 21 15 45 12 20 67 50 23 15 16 9 52 10.5 37 35 21 15 50 12 18 20 11 66 86 11.5 47 40 60 25 18 63 14 27 18 20 11 76 96 12.5 55 50 70 25 18 71 15 30 20 30 13.5 94 124 17 70 60 90 37 25 90 20 40 Black color

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

(n 2) (n = 2, 3, 4, 5) D-M9mV 5 5 10 + 10 (n 2) (n = 4, 6) Note 4) D-A9mV 5 10 10 + 15 (n 2) (n = 4, 6) Note 4) D-M9m D-A9m 10 10 15 + 15 (n 2) (n = 4, 6) Note 4) D-M9mWV D-M9mAV 10 15 15 + 15 (n 2) (n = 4, 6) Note 4) D-M9mW 15 15 20 + 15 (n 2) (n = 4, 6) Note 4) D-M9mA 15 20 20 + 15 (n 2) (n = 4, 6) Note 4) D-A7m/A80 D-A7mH/A80H D-A73C/A80C 5 10 15 + 10

Air Slide Table Series MXP

L3 L3 End face Guide block Table 3 L3 (mm) 19 15 15 15 15 15 Model MXP10-10B MXP10-20B MXP12-15B MXP12-25B MXP16-20B MXP16-30B 212

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Table (3) Guide block L3 L3 End face L3 (mm) 19 15 15 15 15 15 Model MXP10-10B MXP10-20B MXP12-15B MXP12-25B MXP16-20B MXP16-30B Tightening torque (Nm) Model MXP10 MXP12 MXP16 1.67 8-8-5 5 Series MXP Model Selection Model Selection Step Formula/Data Selection Example Operating Conditions 1 Enumerate the operating conditions considering the mounting position and workpiece configuration.