High Vacuum Angle Valve

to 60C Symbol Model Remarks Nil Without auto switch (without magnet) M9N(M)(L)(Z) D-M9N(M)(L)(Z) Solid state auto switch M9P(M)(L)(Z) D-M9P(M)(L)(Z) M9B(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) H0 5 to 150C H4 With 100C heater H5 With 120C heater Hightemperature type *

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Temperature specifications 5. Auto switch type Symbol Nil M9N (L) M9P (L) M9B (L) A90 (L) A93 (L) M9// Symbol Nil H0 Temperature range 5 to 60C 5 to 150C Without auto switch (without built-in magnet) Remarks Auto switch D-M9N (L) D-M9P (L) D-M9B (L) D-A90 (L) D-A93 (L) Solid state switch 6.

Electric Actuator/Slider Type

CN7 150 CN1 Motor capacity Hole position Mounting dimensions Mounting hole A B C D V5 (100 W) qw 5 5 5 5 V7 (200 W) qw 5 5 5 V8 (400 W) we 5 5 5 5 CN8 CN2 The mounting hole position varies depending on the motor capacity. w 40 4 -# type LECYU2-V Connector name Description CN1 I/O signal connector CN2 Encoder connector CN3 Note) Digital operator connector CN6A MECHATROLINK-3communication

NCQ8

/8 3-3/8 3-5/8 4-1/8 4-5/8 5-1/8 5-5/8 #6-32UNC2-1/8 2-1/4 2-3/8 2-1/2 2-5/8 2-3/4 2-7/8 3-1/8 3-3/8 3-5/8 3-7/8 4-3/8 4-7/8 5-3/8 5-7/8 1-7/8 2 2-1/8 2-1/4 2-3/8 2-1/2 2-5/8 2-7/8 3-1/8 3-3/8 3-5/8 4-1/8 4-5/8 5-1/8 5-5/8 1-7/8 2 2-1/8 2-1/4 2-3/8 2-1/2 2-5/8 2-7/8 3-1/8 3-3/8 3-5/8 4-1/8 4-5/8 5-1/8 5-5/8 2-1/8 2-1/4 2-3/8 2-1/2 2-5/8 2-3/4 2-7/8 3-1/8 3-3/8 3-5/8 3-7/8 4-3/8 4-7/8 5-3/

5

2, 3, 4, 5) D-A9 5 15 30 Note 1) 15 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 50 + 35 (n 2) (n = 2, 3, 4, 5) D-M9V 5 20 35 20 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 35 + 35 (n 2) (n = 2, 3, 4, 5) D-A9V 5 15 25 15 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 25 + 35 (n 2) (n = 2, 3, 4, 5) D-M9WV D-M9AV 10 20 35 20 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 35 + 35 (n 2) (n = 2, 3, 4, 5) D-C7 D-C80 5 15 50 15 + 45

Auto Switch Guide

RS Q G RS H A Auto Switch Internal Circuit D-M9N, D-M9NV Weight (g) RZQ D-M9N(V) D-M9P(V) D-M9B(V) DC (+) Brown Auto switch model MI W S 8 8 7 0.5 Lead wire length (m) Main circuit of switch Main circuit of switch Main circuit of switch 41 41 38 3 CEP1 OUT Black 68 68 63 5 CE1 Dimensions DC () Blue D-M9V D-M9 CE2 M2.5 x 4l slotted set screw 500 (3000) (5000) D-M9P, D-M9PV Indicator light

Auto Switch Guide

CLS CLQ Auto Switch Internal Circuit D-M9N, D-M9NV Weight (g) MLGP D-M9N(V) D-M9P(V) D-M9B(V) DC (+) Brown Auto switch model RLQ 8 8 7 0.5 Lead wire length (m) Main circuit of switch Main circuit of switch Main circuit of switch 41 41 38 3 MLU OUT Black 68 68 63 5 ML1C Dimensions DC () Blue D-M9V D-M9 DM2.5 x 4l slotted set screw 500 (3000) (5000) D-M9P, D-M9PV M2.5 x 4l Slotted set screw

Auto Switch Guide

Auto Switch Internal Circuit D-M9N, D-M9NV Weight (g) D-M9N(V) D-M9P(V) D-M9B(V) DC (+) Brown Auto switch model 8 8 7 0.5 Lead wire length (m) Main circuit of switch Main circuit of switch Main circuit of switch 41 41 38 3 OUT Black 68 68 63 5 Dimensions DC () Blue D-M9V D-M9 M2.5 x 4l slotted set screw 500 (3000) (5000) D-M9P, D-M9PV Indicator light M2.5 x 4l Slotted set screw Indicator

Auto Switch Guide

Auto Switch Internal Circuit D-M9N, D-M9NV Weight (g) D-M9N(V) D-M9P(V) D-M9B(V) DC (+) Brown Auto switch model 8 8 7 0.5 Lead wire length (m) Main circuit of switch Main circuit of switch Main circuit of switch 41 41 38 3 OUT Black 68 68 63 5 Dimensions DC () Blue D-M9V D-M9 M2.5 x 4l slotted set screw 500 (3000) (5000) D-M9P, D-M9PV M2.5 x 4l Slotted set screw Indicator light Indicator

Auto Switch Guide

Auto Switch Internal Circuit D-M9N, D-M9NV Weight (g) D-M9N(V) D-M9P(V) D-M9B(V) DC (+) Brown Auto switch model 8 8 7 0.5 Lead wire length (m) Main circuit of switch Main circuit of switch Main circuit of switch 41 41 38 3 OUT Black 68 68 63 5 Dimensions DC () Blue D-M9V D-M9 M2.5 x 4l slotted set screw 500 (3000) (5000) D-M9P, D-M9PV Indicator light M2.5 x 4l Slotted set screw Indicator

Auto Switch Guide

Auto Switch Internal Circuit D-M9N, D-M9NV Weight (g) D-M9N(V) D-M9P(V) D-M9B(V) DC (+) Brown Auto switch model 8 8 7 0.5 Lead wire length (m) Main circuit of switch Main circuit of switch Main circuit of switch 41 41 38 3 OUT Black 68 68 63 5 Dimensions DC () Blue D-M9V D-M9 M2.5 x 4l slotted set screw 500 (3000) (5000) D-M9P, D-M9PV Indicator light M2.5 x 4l Slotted set screw Indicator

Compact Cylinder

Minimum Auto Switch Mounting Stroke (mm) Auto switch model Bore size (mm) D-A9 A9V D-M9 D-M9V D-F9W D-F9WV D-F9BAL Number of auto switches 2 pcs. 10 5 15 10 20 10 15 20 1 pc. 5 5 15 5 20 10 15 2 pcs. 10 5 10 10 20 10 10 25,32,40,50 1 pc. 5 5 10 5 20 10 10 2 pcs. 10 5 10 10 15 10 10 63 1 pc. 5 5 10 5 15 5 5 Besides the models listed in How to Order, the following auto switches are applicable

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

CN7 150 CN1 Motor capacity Hole position Mounting dimensions Mounting hole A B C D V5 (100 W) qw 5 5 5 5 V7 (200 W) qw 5 5 5 V8 (400 W) we 5 5 5 5 CN8 CN2 * The mounting hole position varies depending on the motor capacity. w 40 4 -# type LECYU2-Vl Connector name Description CN1 I/O signal connector CN2 Encoder connector CN3 Note) Digital operator connector CN6A MECHATROLINK-3communication

15

500 0 0 0 0 1 2 3 4 5 0 5 10 15 0 5 10 15 20 25 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] 600 600 600 Z 400 400 400 200 200 200 0 0 0 0 5 10 15 0 5 10 15 20 25 0 1 2 3 4 5 Work load [kg] Work load [kg] Work load [kg] 807 A LEFB Series Motorless Type Calculation of Guide Load Factor Mounting Orientation 1.

Integrated Controller

supply connector (M12) 7.5 Auto switch groove (1 row per side)5 M4 x 0.7 thread depth 8 (F.G. terminal) 46.8 60 34.2 27.8 21.1 Motor option: With lock (16) (219.9) B + Stroke D x 150 (= E) 15 15 5 H9 (+0.030 0 ) depth 5 150 n x 5.5 60 5 6 5 H9 (+0.030 0 ) depth 5 5 H9 (+0.030 0 ) depth 5 10 G 25 1 When mounting the actuator using the body mounting reference plane, set the height of the

Air Cylinder

D-A9 5 15 30 Note 1) 15 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 50 + 35 (n 2) (n = 2, 3, 4, 5) CM2 CM3 D-M9V 5 20 35 20 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 35 + 35 (n 2) (n = 2, 3, 4, 5) CG1 CG1 D-A9V 5 15 25 15 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 25 + 35 (n 2) (n = 2, 3, 4, 5) CG3 D-M9WV D-M9AV 10 20 35 20 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 35 + 35 (n 2) (n = 2, 3, 4, 5) JMB D-C7 D-C80 5 15

Rotary Actuator/Vane Type

cord 3-wire (NPN) V V V v v IC circuit 5 V, 12 V 3-wire (PNP) M9PV M9P V V V v v 2-wire 12 V M9BV M9B V V V v v Solid state auto switch XC1 Add connecting ports W, J Yes For 10, 15 3-wire (NPN) 5 V, 12 V S99V S99 V V v v IC circuit 3-wire (PNP) S9PV S9P V V v v XC2 Change threaded hole to through-hole W, J Relay, PLC Grommet 24 V 2-wire 12 V T99V T99 V V v v 5 V, 12 V 5 V, 12

e-Rodless Actuator

Yes 5 V A93V A93 Grommet 12 V 100 V Relay PLC 24 V 2-wire IC circuit A90V A90 5 V,12 V 100 V or less M9NV M9N 3-wire (NPN) IC circuit 5 V 12 V M9PV M9P 3-wire (PNP) M9BV M9B 12 V 2-wire Relay PLC Yes Grommet 24 V F9NWV F9NW 3-wire (NPN) Diagnostic indication 2-color display IC circuit 5 V 12 V F9PWV F9PW 3-wire (PNP) F9BWV F9BW 2-wire 12 V . . .

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

5 !

Auto Switch Guide Reed Switches/Solid State Switches For Rotary Actuators (Air Grippers) 1

Indicator light Lead wire Oil resistant vinyl heavy-duty cord, 2.7 x 3.2 ellipse 0.15 mm2, 2 cores (D-M9B), 3 cores (D-M9N, D-M9P) Note 1) Regarding the common specifications of the solid state switches, refer to page 11-11-5. Note 2) Regarding the lead wire length, refer to page 11-11-5.