5 Port Solenoid Valve Series VQZ1000/2000/3000

Dimensions C 40 52 63 A B 29 33 41 SQ D Note) C Model B VQZ1000 VQZ2000 VQZ3000 35 43 52 67 81 93 A VFS Note) Grommet VFR Individual EXH spacer VVQZ1000-R-5-M5 (-Q) (for VQZ1000) VVQZ2000-R-5-01 (-Q) (for VQZ2000) VVQZ3000-R-5-02 (-Q) (for VQZ3000) VQ7 + Rc1/8:VQZ2000 M5:VQZ1000 Rc1/4:VQZ3000 D Exhaust port can be installed individually by mounting an individual exhaust spacer on to the manifold

C95

, D-Y59, D-Y7BAL D-Z80, D-Y69 D-Y7P(V), D-Y7W(V) D-F5NTL D-A3, D-G39 D-A44, D-K39 D-A59W D-F5, D-F5W D-J5, D-J59W D-F59F, D-F5BAL D-A5 D-A6 Bore size (mm) CM2 B A B A B A B A B A B A 125 160 200 250 6.5 18.5 17 45.5 19.5 17 10 22 20.5 49 23 20.5 18 30 28.5 41.5 57 31 28.5 31.5 13 25 23.5 36.5 52 26 23.5 26.5 10.5 22.5 21 34 49.5 23.5 21 24 6.5 18.5 17 30 45.5 19.5 17 20 CG1 Courtesy of

Valve Single Unit

P, R port SX3000 (Metric size) With One-touch fitting for 8 (Inch size) With One-touch fittings for 5/16" P, R port SX5000 (Metric size) With One-touch fitting for 10 (Inch size) With One-touch fittings for 3/8" For D side r End block assembly L SX3000-53-1A SX5000-53-1A For U side (Metric size) SX5000-51-1A (Inch size) SX3000-51-15A SX5000-52-1A (Metric size) SX3000-51-1A (Inch size) SX3000

ZP

Applicable pad 04U/06U/08U Applicable pad 10U/16U Applicable pad 25U/32U Applicable pad 40U/50U 4.9 30 R 30 R R 25 30 R R R R 10.5 9.5 2 8 9 25 R 2 0.5 6 7 7 8 R R R R R R 45 45 45 2.7 1 R R 2.5 4.5 5 6.6 R 2.5 3.8 4.9 3.5 5 6 7.9 R 4.5 8 9 11.7 11.7 Note) R part has to be smooth with no corners.

Combination Cylinder

(mm) B C D d H Dd9 Tube dia. (mm) L L Dd9 d l l d m t Used snap ring t m Used snap ring Part No.

Compact Cylinder

32 30 D Z CQ2 B R 32 to 100 30 M9BA B CDQ2 32 Z R D With auto switch With auto switch (Built-in magnet) Number of auto switches Mounting B A L F G D Nil S n 2 pcs. 1 pc. n pcs.

V100

VQZ 3(R) 3(R) VZ (G) (E) (T) (D, Y) VS N.C.

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

C75W Auto Switch Made to Order Related Products 2 x EE 80, 100 80, 100 SL PL 2 x EE port PL BG 2 x 4 x RT PL Width across flats SW Width across flats SW Cushion valve WB WA WA WB KK D KK B D B R E 2 x 4 x RT VD L9 E R VD L12 L2 BG G WH A H G L12 L2 BG H + Stroke A WH + Stroke ZY + 2 x Stroke L8 + Stroke With rod boot at one end e d l h + L8 + H + 2 x Stroke h f Bore size [mm] Stroke range

ZP

Applicable pad 04U/06U/08U Applicable pad 10U/16U Applicable pad 25U/32U Applicable pad 40U/50U 4.9 30 R 30 R R 25 30 R R R R 10.5 9.5 2 8 9 25 R 2 0.5 6 7 7 8 R R R R R R 45 45 45 2.7 1 R R 2.5 4.5 5 6.6 R 2.5 3.8 4.9 3.5 5 6 7.9 R 4.5 8 9 11.7 11.7 Note) R part has to be smooth with no corners.

Table of Contents

D. Applicable tube O. D.

REA/REB

/J79 D-J79C D-F7V D-F7NTL D-F7W/J79W D-F7WV D-F7BAL D-A7/A80 D-A7H/A80H D-A73C/A80C D-F7LF D-F79F Bore size (mm) B A 10 6 3 4.5 (mm) 15 6 4 4.5 Dimension A Dimension B 20 6 3 4.5 Auto switch model D-A72 D-A72 25 6 3 4.5 D-F7W/J79W D-F7WV D-F7LF Note 1) D-F7W/J79W D-F7WV D-F7LF Note 1) D-F79F D-F7BAL D-A7H/A80H D-A73C/A80C D-F7/J79 D-J79C D-F7V D-A7H/A80H D-A73C/A80C D-F7/J79 D-J79C D-F7V

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

D-F79F D-F7NTL D-BAL D-A79W D-F7WV D-F7V D-F7BAVL D-J79 D-F7W D-J79W D-A7 D-A80 D-A7H D-A80H D-F7 12 to 25 32 to 50 D-A9V D-M9V D-F9WV D-A9 D-M9 D-F9W D-F9BAL 32 to 50 Proper Auto Switch Mounting Position Auto Switch Mounting Height (mm) D-A7H D-A80H D-A73C D-A80C D-F7 D-F79F D-J79 D-F7V D-J79C D-F7W D-J79W D-F7WV D-F7BAVL D-F7BAL D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7BAL D-F79F D-F7NTL

45

P, R port SX3000 (Metric size) With One-touch fitting for 8 (Inch size) With One-touch fittings for 5/16" P, R port SX5000 (Metric size) With One-touch fitting for 10 (Inch size) With One-touch fittings for 3/8" For D side r End block assembly L SX3000-53-1A SX5000-53-1A For U side (Metric size) SX5000-51-1A (Inch size) SX3000-51-15A SX5000-52-1A (Metric size) SX3000-51-1A (Inch size) SX3000

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

R. Fittings & Tubing Air Cylinders Rotary Actuators D side U side Stations Electrical Wiring Specifications D-sub connector assembly D-sub connector 015 030 050 AXT100-DS25Wire color Polarity Terminal no.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

R. Fittings & Tubing Air Cylinders Rotary Actuators D side U side Stations Electrical Wiring Specifications D-sub connector assembly D-sub connector 015 030 050 AXT100-DS25Wire color Polarity Terminal no.

0.4

R port R port P port P port A, B port A, B port Type of connection Type of connection VV5Q11 VV5Q21 381 A VQ1000/2000 Series Kit (D-sub connector) F VV5Q11 VV5Q21 D-sub connector reduces installation labor for electrical connections.

Digital Flow Switch (Integrated display type) ( compatible)

PD intercept b F32 N 2012 0x07DC 0 R Temp. peak value S16 0 N 0xFF9C to 0x044C (-100 to 1100) Can be displayed only when a temperature sensor is connected. 2013 0x07DD 0 R Temp. bottom value S16 0 N Accumulated PDAccumulated value conversion factor = Current accumulated flow value 2021 0x07E5 0 R Accumulated PD U16 0 N 0x0 to 0x270F (0 to 9) -82No.PF-OMW0010-D 1: "R" means Read and "W" means

Electric Actuator with Integrated Guide

D C B A 7 11 Standard Motor Series LTF6 Motor Output Rolled Ball Screw 100W 10mm/10mm lead Horizontal Mount How to Order Stroke LTF6E NH 1 R 2 Motor/switch entry direction Left entry Power supply voltage Cable length 1 2 2 3 4 5 100V/110V AC(50/60Hz) 200V/220V AC(50/60Hz) 2m 3m 4m 5m Motor/switch entry direction R L Motor straight, motor cable, switch and switch rail located on the right

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

Speed (mm/s) 250 3.5 2.3 1.5 1.2 1.1 500 2.4 1.8 1.4 1.2 1.1 Values will vary slightly depending on the operating conditions. A B C D Non-standard Motors: The following motors will be mounted when a motor mounted type is specified.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Description Manifold block assembly q For D side P/R port with One-touch fitting for 6 For U side P/R port with One-touch fitting for 6 VZ1000-2A-2D SUP/EXH block assembly D side w VZ1000-2A-2U SUP/EXH block assembly e DIN rail End block assembly End block assembly VZ1000-3A-1D For D side For U side Without D-sub connector For indicated location, P/R port with One-touch fitting for 6 r VZ1000