Secondary Batteries

Example) 90-AFM30-N03B-RZ Air Filters/Pressure Control Equipment Actuators Air Grippers AFD 30 90 03 B Series compatible with secondary batteries q r t w e 90 Material restriction q Symbol Description 30 40 Body size Nil N F Rc NPT G w Thread type + 02 03 04 06 1/4 3/8 1/2 3/4 Port size e + Nil B Note 1) a Without mounting option With bracket Option r Mounting + Nil R Flow direction b Flow

Cylinder with Lock

B1 B2 B3 CN d1 d2 d3 E FL H (Max.) L1 l1 (Min.) l2 R SR (Max.)

Compressed Air Cleaning Filter Series

66 5 2 1/4, 3/8 103 18 98 90 5 90 10 150 80 28 8 7 7 14 7 12 50 95 34 80 5 2.3 3/8, 1/2 132 57 Odor Removal Filter Series AMF Dimensions AMF450C/550C P D Q T R E D N F L U Bracket (Accessory) O J K M V W B IN OUT C I A G Maintenance space H (mm) A Model Port size Bracket related dimensions B C D E F G H I 172 N 90 J 31 K 10 U 9 V 9 L 18 M 9 W 15 O 55 P 111 Q 50 R 88 T 3.2 AMF450C AMF550C

Metal Seal/Rubber Seal Series VQ Body Ported

Description Zinc die-casted Zinc die-casted Body Body w w Stainless steel Aluminum/HNBR Spool/Sleeve Spool valve e e Resin Resin Piston Piston r Pilot valve assembly r Pilot valve assembly Note) L M G 2 Note) L M G 2 VQ111(H) (Y) Voltage 1 to 6 VQ111(H) (Y) Voltage 1 to 6 Single Single VQ110L L M 2 VQ110L L M 2 Double (Latching) Double (Latching) Voltage 1 to 6 Voltage 1 to 6 Note) L M G

High Vacuum Angle Valve

r 1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Seal material Symbol Seal material Compound no.

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

w r MK !

IZx-OMT0049

in height fr om ioniz er to workpiec e [ mm] Installation distance in height fr om ioniz er to workpiec e [ mm] mm mm 250 200 150 100 50 0 50 100 150 200 250 150 100 50 0 50 100 150 150 100 50 0 50 100 150 (250) (200) (150) (100) (50) 0 50 100 150 200 250 (150) (100) (50) 0 50 100 150 200 250 300 350 400 450 500 0 0 mm () mm Installation distance in depth from ionizer to work piece [mm

CA2

7 i q r e y @2 t !8 !9 !6 !1 !2 !4 !5 !0 !

Thermo-chiller

Applicable model HRS-BP008 HRS100HRS150q To circulating fluid outlet To circulating fluid return port r t w y r u r t r e Parts List No.

Compact Manifold Regulator Series ARM5

q i w t y ARJ w r AR425 to 935 t AMR e ARM u y u q i ARP r IR o Replacement Parts Component Parts IRV Description Material Part no.

Vacuum Pad

Applicable pad 04U/06U/08U Applicable pad 10U/16U Applicable pad 25U/32U Applicable pad 40U/50U 4.9 30 R 30 R R 25 30 R R R R 10.5 9.5 2 8 9 25 R 2 0.5 6 7 7 8 R R R R R R 45 45 45 2.7 1 R R 2.5 4.5 5 6.6 R 2.5 3.8 4.9 3.5 5 6 7.9 R 4.5 8 9 11.7 11.7 Note) R part has to be smooth with no corners.

Vacuum Pad

Applicable pad 04U/06U/08U Applicable pad 10U/16U Applicable pad 25U/32U Applicable pad 40U/50U 4.9 30 R 30 R R 25 30 R R R R 10.5 9.5 2 8 9 25 R 2 0.5 6 7 7 8 R R R R R R 45 45 45 2.7 1 R R 2.5 4.5 5 6.6 R 2.5 3.8 4.9 3.5 5 6 7.9 R 4.5 8 9 11.7 11.7 Note) R part has to be smooth with no corners.

Vacuum Pad

Applicable pad 04U/06U/08U Applicable pad 10U/16U Applicable pad 25U/32U Applicable pad 40U/50U 4.9 30 R 30 R R 25 30 R R R R 10.5 9.5 2 8 9 25 R 2 0.5 6 7 7 8 R R R R R R 45 45 45 2.7 1 R R 2.5 4.5 5 6.6 R 2.5 3.8 4.9 3.5 5 6 7.9 R 4.5 8 9 11.7 11.7 Note) R part has to be smooth with no corners.

Vacuum Pad

Applicable pad 04U/06U/08U Applicable pad 10U/16U Applicable pad 25U/32U Applicable pad 40U/50U 4.9 30 R 30 R R 25 30 R R R R 10.5 9.5 2 8 9 25 R 2 0.5 6 7 7 8 R R R R R R 45 45 45 2.7 1 R R 2.5 4.5 5 6.6 R 2.5 3.8 4.9 3.5 5 6 7.9 R 4.5 8 9 11.7 11.7 Note) R part has to be smooth with no corners.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

6 e #1 @9 #0 i !0 !3 !1 !2 @7 t y o u @8 r #2 @1 @2 @5 @4 @3 CY1HT32 @6 Material Note Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 No. !8 !

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

R.

AC Servo Motor Driver (CC-Link Type ）

1 A Q a q 0 0 1 0 2 STX DC2 2 B R b r 0 0 1 1 3 ETX DC3 # 3 C S c s 0 1 0 0 4 $ 4 D T d t 0 1 0 1 5 % 5 E U e u 0 1 1 0 6 & 6 F V f v 0 1 1 1 7 7 G W g w 1 0 0 0 8 ( 8 H X h x 1 0 0 1 9 ) 9 I Y i y 1 0 1 0 10 : J Z j z 1 0 1 1 11 ; K [ k { 1 1 0 0 12 , L l | 1 1 0 1 13 M ] m } 1 1 1 0 14 . N ^ n 1 1 1 1 15 / ?

JIS Standard Hydraulic Cylinder

2 @2 @4 t e !0 CH2G Series !3 @3 r @5 !

LEC-OM02704CN

0 H RX0F RX00 1 1 FROM E 1 H RX 1 F RX 1 0 M15 M10 M5 M0 E 2 H E 2 H R X F R X 0 0 0 0 0 0 0 0 0 0 0 0 0 0 1 1 RX 2 F R X 2 0 2 E 3 H 2 E 3 H RX 3 F RX 3 0 2 E4 H RX4F RX40 E5 H 3 RX5F RX50 M31 M26 M21 M16 15E H RX1F RX10 1 0 RX 7E F RX 7E 0 64 15F H RX 7F F RX 7F 0 . 1 Ready bit0 1 (1) M0(RD) M1(INP) M2(CPO) M3(ZP) M4(TLC) M5 M6(MBR) M7(PUS) M8 (MOF) M9 (COF) M10(

CV/MVGQ

Description No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !