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o o t r u t r u w y e q w y e q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VQ7-6-FG-DVQ7-6-FG-D-R o o t r u t r u w y e q w y e q FHG FJG FIG FHG FJG FIG VQ7-6-DVQ7-6-D-R o o t r u t r u w y e q w y e q VQ7-6-FPG-Do t r u w y e q i Replacement Parts (For valve

AC Servo Motor Driver (Network card type ）

Set the time taken from the rated speed to 0 r/min or 0 mm/s in units of ms. Setting "0" will apply 100 ms. 100 [ms] Dynamic brake deceleration Forced stop deceleration Rated speed Servo motor speed [Pr.

NCQ2/CQ2

Applicable Cylinder Series: (N)CDQ2, (N)CDQ2W, (N)CDQ2www-wS/wT (Single acting), (N)CDQ2, (N)CDQ2W (Large bore size), (N)CDQ2K, (N)CDQ2KW, (Non-rotating rod), (N)CDQ2 (Long stroke), CDQ2wS (High lateral load) Auto switch type s e r u t a e F l e d o M e z i s e r o b e l b a c i l p p A y r t n e l a c i r t c e l E D-A72 D-A73 Grommet (Perpendicular) D-A80 Without indicator light D-A79W

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D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

ZP

189 263 100-B01-A22 224 298 13-11-90 Series ZPT/ZPX Vacuum Pad: Large Size Bellows Type Vertical Vacuum Entry with Buffer Construction Series ZPT Series ZPX y o t y o ZX Component Parts r e i No.

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R C R C (44) G1/2 E A H 2-P Port size B (S) E G1/2 2-M Thread depth N D A H B 2-P Port size 2-M Thread depth N D L L K K N.O.

Compact Hydraulic Cylinder

9 #0 u r @5 !7 @9 @6 !8 o e @2 @3 @1 !3 !4 @7 @8 !6 !5 q w !2 !1 !

Bearing Type: Ball Bearing, Mounting: Basic Style, Bore Size: 40mm, Port Thread Type: M5X0.8: 20, 25; Rc: 32, 40, Stroke: 100mm, Rear Plate: With Rear Plate, Lock Operation: Spring and Pneumatic Locking, Auto Switch: C80C--Reed, DC Volt >5 <24, AC Volt <100, Connector, Lead Wire or Prewired Connector: -, Number: -

Bearing Type: Ball Bearing, Mounting: Basic Style, Bore Size: 40mm, Port Thread Type: M5X0.8: 20, 25; Rc: 32, 40, Stroke: 100mm, Rear Plate: With Rear Plate, Lock Operation: Spring and Pneumatic Locking, Auto Switch: K59--Solid State, Gen. Purpose, 2 Wire, Lead Wire or Prewired Connector: 3m, Number: -

High Vacuum Angle Valve

r 1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Seal material Symbol Seal material Compound no.

ZP

Applicable pad 04U/06U/08U Applicable pad 10U/16U Applicable pad 25U/32U Applicable pad 40U/50U 4.9 30 R 30 R R 25 30 R R R R 10.5 9.5 2 8 9 25 R 2 0.5 6 7 7 8 R R R R R R 45 45 45 2.7 1 R R 2.5 4.5 5 6.6 R 2.5 3.8 4.9 3.5 5 6 7.9 R 4.5 8 9 11.7 11.7 Note) R part has to be smooth with no corners.

ZP

Construction Series ZPT Series ZPR Series ZPY r Buffer r Buffer y Adaptor e Adaptor e Adaptor r Buffer t Adaptor w Lock ring w Lock ring w Lock ring q Pad q Pad q Pad q Pad With buffer With buffer With buffer Component Parts Material Note No.

smcmaintenancepartslist

For 80 and 100, remove the seal retainer and lock piston seal. q i u r y w y L o t e !

Compact Cylinder

Refer to the dimension table.) 63 to 100/With Auto Switch Both ends tapped: CQ2A/CDQ2A Both Ends Tapped (mm) O1 thread R R Bore size (mm) O1 R Standard (Through-hole): CQ2B/CDQ2B 63 80 100 M10 x 1.5 M12 x 1.75 M12 x 1.75 18 22 22 Minimum lead wire bending radius 10 Auto switch H thread effective depth C 4 x N through 8 x O counterbore F Q 2 x P (Rc, NPT, G) (Port size) D Z M E B + Stroke

Rotary Actuator

R R ot ot of e g k n e ra at at y w n io io CRQ2 a io y n n at A 1 n ra gl ra ot 8 e A a A 0 n n R dj n n g gl g gl u e st e e e in a a of of dj dj g MSQ k k u u di st st e e r y y in in e w w ct g g Angle adjusting screw a a io di di y y MSZ n r r 9 9 e e 0 0 c c ti ti o o CRQ2X MSQX n n MRQ Angle adjusting screw Angle adjusting screw The rotation range under the adjustment of an angle

Electric Actuators

MR-C10A Without brake (Horizontal specification) Non-standard Mitsubishi Electric Corporation motor HC-PQ13 100 200/230 R MR-C10A1 100/115 With brake (Vertical specification) HC-PQ13B 100 MR-C10A 200/230 100/115 SGME-01BF12 SGDE-01BP SGDE-01AP Without brake (Horizontal specification) Non-standard Yaskawa Electric Corporation motor 100 200/230 SGME-01AF12 Y SGDE-01BP SGDE-01AP 100/115 200

Battery-less

Vertical Mounting, Ball Bushing Bearing e 35 mm stroke or less r Over 40 mm stroke 100 100 LEYG32L E/40L E Load mass m [kg] Load mass m [kg] 10 10 LEYG32L E/40L E LEYG16L E LEYG16L E LEYG25L E LEYG25L E 1 1 0.1 0.1 10 100 1000 10 100 1000 Eccentric distance L [mm] Eccentric distance L [mm] The limit of vertical load mass varies depending on lead and speed.

Hydraulic

20 11 16 23 40 60 60 AC-A1bore size +0.027 0 80 M12 x 28 31 100 65 28 16 R 22 13 18 26 45 67 75 U D drill through C 0.3 +0.033 0 100 M12 x 32 35 118 80 28 17 R 24 13 20 30 50 74 90 F E +0.033 0 125 M14 x 36 41 140 90 31 20 R 26 15 22 30 55 81 112 0 0.3 G A +0.033 0 160 M16 x 40 54 174 100 34 22 R 30 17 25 40 65 95 140 H B Knuckle pin Material: Carbon steel C (f8) Order no.

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suppressor (Non-polar type) Vacuum switch None With vacuum switch Nil E Silencer Types R and U are DC only.

Made to Order

Over 200 st Over 30 st to 100 st 69 75.5 86 91.5 E 30 st or less Over 200 st Over 30 st to 100 st 6 12 23 28 Bore size (mm) HT Over 100 st to 200 st 110 110.5 127.5 127.5 Over 100 st to 200 st 47 47 64.5 64 80 93 20 25 E 50 st or less Over 200 st Over 50 st to 100 st Over 100 st to 200 st A 50 st or less Over 200 st Over 50 st to 100 st 89.5 89.5 101.5 101.5 Bore size (mm) HT Over 100 st