ZP

(Hexagon) C Width across flat 21 (Hexagon) 1/8 (Rc, NPT, NPTF) G F E D C Width across flat 21 (Hexagon) 4 x M5 x 10 C 3 x M3 x 8 4 x M4 x 8 Y A B A B A B Dimensions Dimensions Dimensions B C D Model A 63 63 63 80 80 80 B C F D E G H Y Model A 100 100 100 100 125 125 125 125 B C D Model A 40 40 40 50 50 50 ZPX40H 25-A18 ZPX40H 50-A18 ZPX40H 75-A18 ZPX50H 25-A18 ZPX50H 50-A18 ZPX50H 75-A18

High Vacuum Angle Valve

1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Seal material Symbol Seal material Compound no.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Description Manifold block assembly q For D side P/R port with One-touch fitting for 6 For U side P/R port with One-touch fitting for 6 VZ1000-2A-2D SUP/EXH block assembly D side w VZ1000-2A-2U SUP/EXH block assembly e DIN rail End block assembly End block assembly VZ1000-3A-1D For D side For U side Without D-sub connector For indicated location, P/R port with One-touch fitting for 6 r VZ1000

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

U D 5 3 U D 5 3 Individual EXH block assembly Individual SUP block assembly X U side D side U side D side X X 1(P) 1(P) 3/5(R) 4(A) 2(B) 4(A) 2(B) 4(A) 2(B) 4(A) 2(B) 1(P) 3/5(R) 3/5(R) 4(A) 2(B) 4(A) 2(B) 4(A) 2(B) 4(A) 2(B) [When a different supply pressure is required for only a middle valve.]

Table of Contents

Applicable cylinder bore size (mm) AS121-M5 Model Port size 4 6 8 10 12 M5 x 0.8 6, 10, 16, 20 Construction 1 8 AS221-01 R 20, 25, 32 1 4 AS221-02 R 20, 25, 32, 40 3 8 AS321-03 R 40, 50, 63 1 2 AS421-04 R 63, 80, 100 Note) marking is electroless nickel plated, provided as standard.

Electric Actuator/Slider Type

0 @2 C B r w D-D C-C B-B !2 !4 !7 D Body Table D !3 Component Parts No. Description Material Note 15 Cover plate Aluminum alloy Coating No.

Table of Contents

V) 3 The length (Dimension S) is 25.5 when any of the following grommet type auto switches are used: D-R73, D-R80, D-S79, D-T79, and D-S7P The length (Dimension S) is 34.5 when any of the following connector type auto switches are used: D-R73, D-R80, and D-T79 (mm) R A B C D E (g6) F (h9) G K L M N P Q S 90 100 241 Y Model 301 CDRB2BW15-D CDRB2BW20-D CDRB2BW30-D 5 6 8 12 14 16 34 42 50 20

Air Cylinder

Return: Double Clevis (D) Stroke CJ2D 10 16 SZ CDH9+0.030 0 Piping port M5 x 0.8 GB NB CJ1 Clevis pin (cdd90.030 0.060) MM Rod end nut C C CJP D CZ 0 0.3 B 0 0.3 CJ2 CJ2 ZZ + Stroke Z + Stroke S + Stroke H A NA CX+0.2 +0.1 B 0 0.3 JCM U U CZ 0 0.3 R R CM2 CM3 CG1 [mm] Bore size A B C CD (cd) CX CZ D GB H MM NA NB R U S 5 to 15 st 16 to 30 st 31 to 45 st 46 to 60 st 61 to 75 st 76 to 100

One-touch Fittings

8.7 Metric Size M, R, Rc Inch Size UNF, NPT Inch Size M, R, Rc Metric Size G Metric Size R, Rc Inch Size NPT Inch Size R Metric Size Uni Inch Size Uni 2 x Applicable tubing D D M M L Sealant/Gasket Seal Face Seal Gasket Seal Different Diameter Straight: KQ2H Applicable tubing O.D.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Volume (cm 3) Vane type Double vane Single vane CRB2BW40-S CRB2BW10-D CRB2BW15-D CRB2BW20-D CRB2BW30-D CRB2BW40-D CRB2BW10-S CRB2BW15-S CRB2BW20-S CRB2BW30-S Model 90 180 270 90 180 270 90 180 270 90 180 270 90 180 270 90 100 90 100 90 100 90 90 100 100 Rotation 1 (0.6) 1.5 (1.0) 4.8 (3.6) 11.3 (8.5) 25 (18.7) 1.2 1.5 2.9 3.7 6.1 7.9 15 20.2 31.5 41 1.0 1.1 2.6 2.7 5.6 5.7 14.4 14.5 33 34

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

V) 3 The length (Dimension S) is 25.5 when any of the following grommet type auto switches are used: D-R73, D-R80, D-S79, D-T79, and D-S7P The length (Dimension S) is 34.5 when any of the following connector type auto switches are used: D-R73, D-R80, and D-T79 (mm) R A B C D E (g6) F (h9) G K L M N P Q S 90 100 241 Y Model 301 CDRB2BW15-D CDRB2BW20-D CDRB2BW30-D 5 6 8 12 14 16 34 42 50 20

smcmaintenancepartslist

For 20 to 63, remove the lock piston seal. d. For 80 and 100, remove the seal retainer and lock piston seal. q i u r y w y L o t e !

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Order) E L E C T R I C A L E N T R Y O P T I O N S None Z With Indicator Light and Surge Voltage Suppressor F Through Base H O W T O O R D E R M A N I F O L D S E E I N S I D E F R O N T C O V E R F O R FOR FURTHER TECHNICAL DETAILS ON THIS PRODUCT, REQUEST CATALOG REFERENCE N233 DETAILS OF YOUR LOCAL SALES OFFICE 2.74 SOLENOID VALVES SERIES NVFS H O W T O O R D E R M A N I F O L D / O P

CRB2/CRBU2/CRB1

Volume Double vane Single vane Vane type CRB2BW40-S CRB2BW10-D CRB2BW15-D CRB2BW20-D CRB2BW30-D CRB2BW40-D CRB2BW10-S CRB2BW15-S CRB2BW20-S CRB2BW30-S Model Rotation 90 180 270 90 180 270 180 270 180 270 180 270 90 100 90 100 90 100 90 100 90 100 90 90 90 1 (0.6) 1.5 (1.0) 4.8 (3.6) 11.3 (8.5) 25 (18.7) 1.2 1.5 2.9 3.7 6.1 7.9 15 20.2 31.5 41 1.0 1.1 2.6 2.7 5.6 5.7 14.4 14.5 33 34 Volume

Battery-less

4 A-A r t B C o @4 B C e @5 @6 D-D C-C B-B !1 !3 !6@8 D w D !2 Component Parts No. Description Material Note 19 End cover LEFS16 Aluminum alloy Anodized No.

Mechanically Jointed Rodless Cylinder Series MY1

MY1B16 to 100 MY1M16 to 63 MY1C16 to 63 MY1H16 to 40 L L R L L L L R R R R R L R R L Note 2) Note 2) R R L L O-ring L R Slide table operating direction Piping tube Note 2) For bottom piping, refer to the figure above.

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D. Applicable tube O. D.

Metal Seal/Rubber Seal Series VQ Body Ported

(One label for each) D side U side SUP/EXH block bush assembly SUP Block bush assembly 5(R1) 1(P) 3(R2) D side U side R1 P R2 VVQ1000-87A-B-50 Shut off label 7.8 ~ =6.5 2(B) 4(A) 2(B) 4(A) When ordering a block bush incorporated with the manifold, a block indication label is attached to the manifold. 2.8 10.5 R P R R P R R P R SUP passage blocked EXH passage blocked SUP/EXH passage

Vacuum Pad

(Hexagon) C Width across flat 21 (Hexagon) 1/8 (Rc, NPT, NPTF) G F E D C Width across flat 21 (Hexagon) 4 x M5 x 10 C 3 x M3 x 8 4 x M4 x 8 Y A B A B A B Dimensions Dimensions Dimensions B C D Model A 63 63 63 80 80 80 B C F D E G H Y Model A 100 100 100 100 125 125 125 125 B C D Model A 40 40 40 50 50 50 ZPX40H 25-A18 ZPX40H 50-A18 ZPX40H 75-A18 ZPX50H 25-A18 ZPX50H 50-A18 ZPX50H 75-A18

Vacuum Pad

(Hexagon) C Width across flat 21 (Hexagon) 1/8 (Rc, NPT, NPTF) G F E D C Width across flat 21 (Hexagon) 4 x M5 x 10 C 3 x M3 x 8 4 x M4 x 8 Y A B A B A B Dimensions Dimensions Dimensions B C D Model A 63 63 63 80 80 80 B C F D E G H Y Model A 100 100 100 100 125 125 125 125 B C D Model A 40 40 40 50 50 50 ZPX40H 25-A18 ZPX40H 50-A18 ZPX40H 75-A18 ZPX50H 25-A18 ZPX50H 50-A18 ZPX50H 75-A18