Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Head Side Trunnion Style Rod end lock/-R Bore size (mm) Z (Head side trunnion) ZZ (Head side trunnion) With rod boot With rod boot Without rod boot Without rod boot 145 + l 124 + l 20 104 125 152 + l 131 + l 25 109 130 Head side trunnion style: CBG1T (Rod end lock -R only) 157 + l 133 + l 32 111 135 175(182) + l 147(154) + l 40 127(134) 155(162) 200(211) + l 168(179) + l 50 148(159) 180(191

1

Compact cylinder -XC6B Single acting (Spring return/extend) Double acting, Double rod Double acting, Single rod r, !0, !5, !8, !9, @0, @1, @9, #3 63, 80, 100 @9 is rod side only. -X CQ2W r, !1, @0 20, 25, 32, 40, 50 Axial piping type (Centralized piping type) 7 CQ2 -XC6C CQP2 r, !0, !

Air Cylinder NCQ7 Series Compact Cylinder

Female lhread length {"1') is shonerfor the lollowing . 2o0 (2') 1/g & 1A st. 1/s & 1/a st. r/s & 1/a st. l=o.44 25O (2112')' I/s st. r/s st. '/s stl=0.44 300 (3") ]/s & 1/a st. 1/e &r/l st. 1/e & 1A st. 400 (4) 1/s &1/a st. r/s & 1/a st. 1/e &14 st. Series NCQT Dimensions Spring Extend NCQTBO-OT T Type Bore,, 9t4,F' I 60re ,b,:!

asilltr

Female lhread length {"1') is shonerfor the lollowing . 2o0 (2') 1/g & 1A st. 1/s & 1/a st. r/s & 1/a st. l=o.44 25O (2112')' I/s st. r/s st. '/s stl=0.44 300 (3") ]/s & 1/a st. 1/e &r/l st. 1/e & 1A st. 400 (4) 1/s &1/a st. r/s & 1/a st. 1/e &14 st. Series NCQT Dimensions Spring Extend NCQTBO-OT T Type Bore,, 9t4,F' I 60re ,b,:!

IDG

point: 40C), IDG75S (Standard dew point: 60C) IDG100 (Standard dew point: 20C), IDG100H (Standard dew point: 15C) P1 = 0.3 MPa 0.06 0.02 P1 = 0.3 MPa Pressure drop (MPa) Pressure drop (MPa) P1 = 0.5 MPa 0.016 P1 = 0.5 MPa 0.04 P1 = 0.7 MPa 0.012 P1 = 0.7 MPa 0.008 0.02 0.004 0 100 400 200 300 0 400 800 1200 1600 Inlet air flow rate (l/min (ANR)) Inlet air flow rate (l/min (ANR)) IDG100L (

Thermo-chiller/Rack Mount Type

400 32C 25C 25C 300 300 200 200 5C 5C 100 100 Ambient temperature Ambient temperature Ambient temperature Ambient temperature 0 0 10 15 25 20 30 40 35 10 15 25 20 30 40 35 Circulating fluid temperature [C] Circulating fluid temperature [C] HRR010-W-20 [50 Hz] [60 Hz] 400 400 35C Heating capacity [W] Heating capacity [W] 35C 300 300 25C 25C 200 200 5C 5C 100 100 Facility water temperature

Table of Contents

r r u u u Drain Drain Drain Component Parts Material No.

Guide Cylinder Series MGG

Contact P/A in this case. 1 Guide Cylinder Series MGG Models and Specifications JIS symbol Models and strokes Long stroke (mm) Standard stroke (mm) Model Bearing type Bore size (mm) 20 250, 300, 350, 400 75, 100, 125, 150, 200 25 350, 400, 450, 500 MGGM Slide bearing 32 350, 400, 450, 500, 600 40 350, 400, 450, 500, 600, 700, 800 75, 100, 125, 150, 50 350, 400, 450, 500, 600, 700, 800, 900

KN Series Nozzles for Blowing

flats H1 H2 Weight (g) Connection thread KNK-R02-400 KNK-R02-600 KNK-R03-400 KNK-R03-600 KNK-R04-400 KNK-R04-600 32 32 40 40 54 54 31.9 31.9 32.4 32.4 34.1 34.1 38 38 39 39 42.2 42.2 17 17 17 17 22 22 17 17 17 17 17 17 R 1/4 R 1/4 R 3/8 R 3/8 R 1/2 R 1/2 4 6 4 6 4 6 35 D H2 H1 L1 A 8.5 Reference dimensions after R thread installation.

Mounting: Basic Style, Bore Size: 20mm, Port Thread: 20 & 25 Bore: M5 x0.8, 32-50 Bore: Rc Thread, Stroke: 400mm, Option: w/o Rear Plate, Auto Switch: H7C--Solid State, Gen. Purpose, 2 Wire, Connector, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 1 pc., Speed Control Type: -, Applicable Tubing: -, Suffix: -

Mounting: Basic Style, Bore Size: 20mm, Port Thread: 20 & 25 Bore: M5 x0.8, 32-50 Bore: Rc Thread, Stroke: 400mm, Option: w/o Rear Plate, Auto Switch: H7C--Solid State, Gen. Purpose, 2 Wire, Connector, Lead Wire or Prewired Connector: 3m, Number: 1 pc., Speed Control Type: -, Applicable Tubing: -, Suffix: -

MLGP

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Proper tightening torque (Nm) 7 to 9 12 to 14 22 to 24 Connection thread size R 1/8 R 1/4 R 3/8 CNA Caution CNS 1. Be sure to connect the load to the plate section with the lock in an unlocked condition.

MLGP

CL CL1 MLGC CNG MNB Proper tightening torque (Nm) 7 to 9 12 to 14 22 to 24 Connection thread size R 1/8 R 1/4 R 3/8 CNA Caution CNS 1. Be sure to connect the load to the plate section with the lock in an unlocked condition. If this is done in the locked state, it may cause damage to the lock mechanism.

Integrated Controller

L4 [mm] L4 [mm] L4 [mm] L4 [mm] L4 600 600 600 600 X 400 400 400 400 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 Mey L5 [mm] L5 [mm] L5 [mm] L5 [mm] 600 600 600 600 m Wall L5 Y 400 400 400 400 200 200 200 200 0 0 0 0 0 5 10 15 20 25

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Shock absorber Port variations R L R L Tighten the four unit fixing bolts equally to secure the unit body. R R R R L L L L R L R L L R Slide table operating direction 8-14-26

VFS

2, Metal joint q, w, Gasket B r, Guard !3, Steel ball End plate (D side) assembly !2 AXT625-3A-20 End plate (D) !2, Metal joint q, w, Gasket B r, Guard !3, Steel ball End plate (D) !2, Metal joint q, w, Gasket B r, Guard !

High Vacuum Angle Valve

How to Order [Option] q w y e u r t i XLAV M9N 16 A G G 1 o !

CNS

3000 3000 CLQ 2000 2000 MLGP 160 140 RLQ 1000 1000 Load weight: m (kg) Load weight: m (kg) 700 800 900 700 800 900 125 MLU 600 600 160 500 500 ML1C 400 400 140 320 125 300 300 D200 200 -X 280 20100 100 100 500 400 300 200 100 500 400 300 200 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 3000 3000 2000 2000 160 140 125 1000 1000 Load weight:

CL

Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No. Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

0.4

r (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQC1201 VQC1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQC1300 VQC1400 VQC1301 VQC1401 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) VQC1500 VQC1501 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w VQC1A01 VQC1B01 2(B) 4(A) 4