XMC/XYC Series

),CF KF(NW) KF(NW),CF KF(NW) KF(NW),K(DN) ,CF KF(NW),K(D N) XYC KF(NW) KF(NW) KF(NW) KF(NW) K(DN) KF(NW) K(DN) Main material Body: SCS13(Stainless) Bellows: SUS316L, Main part: SUS304 and FKM (standard sealing material) Actuation pressure MPa (G) 0.3 to 0.6 0.4 to 0.6 Air consumption cm3 Note 3 At 0.5MPa 38 91 430 280 500 1000 Port size M5 Rc 1/8 XMC 0.36 (0.40) 0.62 1.40(1.76) 2.10 3.80

XMA/XYA Series

),CF KF(NW) KF(NW),CF KF(NW) KF(NW),K(DN) KF(NW), K(DN) ,CF XYA KF(NW) KF(NW) KF(NW) KF(NW) KF(NW) K(DN) K(DN) Main material Body: SCS13(Stainless) Bellows: SUS316L, Main part: SUS304 and FKM (standard sealing material) Actuation pressure MPa(G) 0.4 to 0.7 Air consumption At 0.5MPa 19 46 200 360 660 1350 cm3 Note 3 Port size M5 Rc 1/8 Weight kg Note 4 XMA 0.33 (0.37) 0.61 1.40 (1.76) 2.00

XMD/XYD Series

) KF (NW),CF KF(NW) KF (NW), K(DN),CF KF(NW), K (DN) Flange type XYD KF(NW) KF(NW) KF(NW) KF(NW), K(DN) KF(NW), K(DN) Main material Body: SCS13(Stainless) Bellows: SUS316L, Main part: SUS304 and FKM (standard sealing material) Note 2) Actuation pressure MPa (G) 0.4 to 0.7 Main pumping 46 200 360 660 1350 Air consumption cm3 for 0.5MPa Note 3) Initial pumping 2.5 12 15.5 30 42 Port size M5

Magnet: D (Built-in Magnet), Mounting: T (Center Trunnion), Bore Size: 100mm, Thread: Rc, Stroke: 350mm, Rod Boot: None, Cushion: Air Cushion, Pivot Bracket: No Bracket, Rod End Bracket: No Bracket, Auto Switch: P3DWA--Solid State, 2-color Indication, Magnetic Field Resist., 2 Wire, Lead Wire or Prewired Connector: SC (0.3m Cord Length, M12-4 Pin Connector, 3 & 4 Out), Number: S (1 pc.)

Magnet: Built-in Magnet, Mounting: Center Trunnion, Bore Size: 100mm, Thread: Rc, Stroke: 350mm, Rod Boot: None, Cushion: Air Cushion, Pivot Bracket: No Bracket, Rod End Bracket: No Bracket, Auto Switch: P3DWA--Solid State, 2-color Indication, Magnetic Field Resist., 2 Wire, Lead Wire or Prewired Connector: 0.3m Cord Length, M12-4 Pin Connector, 3 & 4 Out, Number: 1 pc., Made to Order: -

XMH/XYH Series

),CF KF(NW) KF(NW),CF KF(NW) Flange type XYH KF(NW) KF(NW) KF(NW) Main material Body: SCS13 (SUS304), Bellows: SUS316L,, Main part: SUS304 and FKM (standard sealing material) Operation torque 0.1 or more 0.15 or more 0.35 or more 0.5 or more Number of handle rotations 5 7 10 13 XMH 0.31 (0.35) 0.57 1.35 (1.71) 2.02 Mass kg Note 4 XYH 0.62 1.37 2.42 Note1) XYH-16 is not available.

Air Cylinder

Cylinder model: CDJ2ZD16-60Z-NW-M9BW-B Double clevis Mounting Brackets/Part No. Mounting bracket Bore size [mm] Double knuckle joint 10 16 Foot CJ-L010C CJ-L016C Flange CJ-F010C CJ-F016C Pivot bracket (T-bracket)1 CJ-T010C CJ-T016C Pivot bracket 1: The pivot bracket (T-bracket) is used with double clevis (D).

Magnet: Built-in Magnet, Mounting: Basic, Bore Size: 80mm, Thread: Rc, Stroke: 450mm, Rod Boot: None, Cushion: Air Cushion, Pivot Bracket: No Bracket, Rod End Bracket: No Bracket, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Made to Order: w/Lock Status Indication

Magnet: Built-in Magnet, Mounting: Axial Foot, Bore Size: 80mm, Thread: Rc, Stroke: 450mm, Rod Boot: None, Cushion: Air Cushion, Pivot Bracket: No Bracket, Rod End Bracket: No Bracket, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Made to Order: w/Lock Status Indication

Magnet: Built-in Magnet, Mounting: Basic, Bore Size: 63mm, Thread: NPT, Stroke: 250mm, Rod Boot: None, Cushion: Air Cushion, Pivot Bracket: No Bracket, Rod End Bracket: No Bracket, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Made to Order: w/Lock Status Indication

Magnet: Built-in Magnet, Mounting: Head Flange, Bore Size: 32mm, Thread: Rc, Stroke: 400mm, Rod Boot: None, Cushion: Air Cushion, Pivot Bracket: No Bracket, Rod End Bracket: No Bracket, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Made to Order: w/Lock Status Indication

Magnet: Built-in Magnet, Mounting: Rod Flange, Bore Size: 50mm, Thread: Rc, Stroke: 200mm, Rod Boot: None, Cushion: Air Cushion, Pivot Bracket: No Bracket, Rod End Bracket: No Bracket, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Made to Order: w/Lock Status Indication

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

Cushion seal Tube gasket O-ring O-ring No. 14 15 18 39 40 41 42 43 Qty. 1 1 2 2 2 2 4 2 4 Series MY2H Single Axis Type 16, 25, 40 MY2H G Bore size Stroke PG Q + Stroke (LL) L LA 4-B depth of counter bore C LD through hole 4-MM, depth M Cylinder mounting center line PA Work piece mounting center line U Long hole depth Y Guide center line NX PB PC PF QW X 4 x 2square nut J NT NH PE PD LB NW

Precision: A (High Precision Type), Size: 30mm, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, 0.5M, Lead Wire or Prewired Connector: Z (5m), Number: 3 pcs.

Precision: B (Basic), Size: 10mm, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, 0.5M, Lead Wire or Prewired Connector: Z (5m), Number: 3 pcs.

Oscillation Angle A: [Arbitrary Setting Type] Free setting type, Torque (Range)(N⋅m): 3 to Less than 6, Type: Rotary Table 3-Points or More, Main Body Shape: Block Shape, Operation Method: Double Rack, Rigidity Accuracy: High Rigidity, High Accuracy, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 0.01 to Less than 0.1, Valves: Not Provided, Allowable Kinetic Energy

Oscillation Angle A: [Arbitrary Setting Type] Free setting type, Torque (Range)(N⋅m): 1 to Less than 3, Type: Rotary Table 3-Points or More, Main Body Shape: Block Shape, Operation Method: Double Rack, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 0.005 to Less than 0.01, Valves: Not Provided, Allowable Kinetic Energy(J): 0.007, Torque

High Vacuum L Type Valve

) KF (NW), K (DN) Main material Body: aluminum alloy, Bellows: SUS316L, Main part: SUS304 and FKM (standard sealant material) Surface treatment for body Outside: hard anodized Inside: basis material Actuation pressure MPa(G) 0.4 to 0.7 Air consumption cm3 Note 2) for 0.5MPa 31 61 220 390 680 1420 Solenoid valve SYJ319 SYJ519 Port size M5: Port1(P), 3(R) Rc1/8: Port1(P), M5: Port3(R) Weight

17

O-ring MY1B25-PS MY1B32-PS MY1B40-PS Note) For the replacement procedure of replacement parts/seals, refer to the Operation Manual. 1192 MY1B Series Mechanically Jointed Rodless Cylinder Basic Type Standard/Centralized Piping Type 25, 32, 40 MY1B25 /32 /40 Z Stroke (LL) L 2 x 2 x B counterbore depth C LD through-hole 4 x MM depth M P(MY1BG) (Hexagon socket head taper plug) PA YW PP QQ RR QW NW

Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series

XMA XYA M9N 16 A A M9N 25 Angle type In-line type q w e r t y u w Flange type q Flange size XMA Type KF (NW) K (DN) CF Symbol Nil D C Applicable flange size 16, 25, 40, 50, 63, 80 63, 80 16 (034), 40 (070), 63 (114) XMA XYA Size 16 25 40 50 63 80 XYA Nil D K (DN) KF (NW) 25, 40, 50, 63, 80 63, 80 e Indicator/Pilot port direction XMA Rear flange surface XYA Symbol Rear flange surface Right