smcmaintenancepartslist

CBG1A Air cushion type Locking at both ends 20 25 32 40 CBG1N20-PS-W CBG1N25-PS-W CBG1N32-PS-W CBG1N40-PS-W Above no. @5, @6, @7, @8. And a grease pack. CBG1N Rubber bumper type Locking at both ends 20 25 32 40 CBG1A20-PS-W CBG1A25-PS-W CBG1A32-PS-W CBG1A40-PS-W Above no. @5, @6, @7, @8, $0, $1. And a grease pack.

0.

Note 2) Weight for threaded connection 3 Body Ported Series VQZ100/200/300 Construction VQZ100 N.C. Poppet type (A) 2 1 (P) 3 (R) q w e Component Parts No.

High Vacuum Angle Valve

Model XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 Rated voltage for heater 90 to 240 VAC Heater assembly quantity 1 1 1 1 H4 100C 100 V 200/40 200/50 400/100 600/150 Heater assembly quantity used Heater power W (Nominal value) Inrush/Power consumption (Option symbol, Operating voltage) 200 V 800/40 800/50 1600/100 2400/150 Heater assembly quantity 1 1 1 1 2 H5 120C 100 V 200/40 400/70 400/

Table of Contents

Without connector CN Output specifications 14 NPN open collector 1 output w/o analog output, 3 turns adjustment With Connector/How to Order 15 NPN open collector 1 output w/o analog output, 200 degrees adjustment Without lead wire (Connector 1 pc., Socket 4 pcs.)

Cylinder with Lock

Axial foot: C96NL-W XA + Stroke 4 x AB AH TF E1 AT SA + Stroke AO AO [mm] Bore size AB AH AO AT E1 SA TR XA 32 7 32 10 4.5 48 200 32 202 40 10 36 11 4.5 55 227 36 229 50 10 45 12 5.5 68 245 45 250 63 10 50 12 5.5 80 264.5 50 269.5 80 12 63 14 6.5 100 320 63 325 100 14.5 71 16 6.5 120 343.5 75 353.5 Flange Rod side: C96NF-W 4 x FB R E2 UF TF W MF Head side: C96NG-W MF ZF + Stroke [mm] Bore

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

For type "W", DC voltage is only available.

Electric Actuator with Integrated Guide

Motor output (W) Motor model Compatible driver model Power supply voltage (V AC) Motor dimension (mm) 100/115 MSD021P1E MSM021P1A Matsushita Electric Industrial Co., Ltd. 95 MSM022P1A 200 200/230 MSD023P1E 100/115 MR-C20A1 Mitsubishi Electric Corporation 89 200 HC-PQ23 200/230 MR-C20A 100/115 SGDE-02BP 200 SGME-02BF12 Yasukawa Electric Corporation 96.5 200/230 SGDE-02AP SGME-02AF12 Refer

Compact

load [kg] Work load [kg] Work load [kg] Work load [kg] 500 500 500 500 m 400 400 400 400 Wall mounting L5 [mm] L5 [mm] L5 [mm] L5 [mm] L5 300 300 300 300 Y 200 200 200 200 100 100 100 100 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 2 4 6 8 10 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 300 300 300 300 L6 200 200 200 200 L6 [mm] L6 [mm] L6 [mm] L6 [mm] m Z 100 100 100

Thermo-chiller

200 VAC *3 q Facility water temperature: 25C, w Circulating fluid: Tap water, e Circulating fluid flow rate: Rated flow, r Power supply: 200 VAC *4 q Facility water temperature: 25C, w Circulating fluid: Tap water, e Circulating fluid temperature: CH1 20C/CH2 25C, r Circulating fluid flow rate: Rated flow, t Power supply: 200 VAC, y Piping length: Shortest, u Load: Same as the cooling capacity

LEC-OM071xx

Maximum Main Main Power Supply Regenerative Control Applicable DRIVER Output Circuit Power Total Circuit Power Capacity per Resistor Circuit Power Servomotor Current Power Model DRIVER Power Loss [Arms] Loss [W] LECYU2Capacity Loss Supply [kVA] [W] Loss [W] [kW] [W] 0.1 V5 0.3 0.91 7.3 24.3 0.2 V7 0.6 1.6 13.5 30.5 Threephase, 17 0.4 V8 1 2.8 24.0 41.0 200 V 0.75 V9 1.6 5.5 43.8 8 68.8 Note

energy saving effect

Power cable entry (Hole 40) (Grommet with membrane) Note) A breaker handle is equipped as standard for the 400 V type only. 172 Thermo-chiller Inverter Type HRSH Series Dimensions HRSH100/150/200/250-W-20 (Water-cooled 200 V type) HRSH100/150/200/250-W-40 (Water-cooled 400 V type) HRS HRS 090 Eye bolt M12 (4 places) 715 HRS 100/150 687 Operation display panel Facility water outlet Rc1 HRSH

Mechanically Jointed Rodless Cylinders

400 300 200 100 MY3A max.

LEC-OM069xx

Maximum Main Main Power Supply Regenerative Control Applicable DRIVER Circuit Power Output Total Circuit Power Capacity per Resistor Circuit Power Servomotor Model Current Power DRIVER Power Loss [Arms] Loss [W] LECYM2Capacity Loss Supply [kVA] [W] Loss [W] [kW] [W] 0.1 V5 0.3 0.91 7.3 24.3 0.2 V7 0.6 1.6 13.5 30.5 Threephase, 17 0.4 V8 1 2.8 24.0 41.0 200 V 0.75 V9 1.6 5.5 43.8 8 68.8 Note

Refrigerated Air Dryers

VAC (50 Hz) *5 Single-phase/Three-phase: 200/220 VAC (60 Hz) Three-phase: 200 VAC (50 Hz) Three-phase: 200/220 VAC (60 Hz) Single-phase 200 V 810/940 810/940 Power consumption [W] Electric specifications 50/60 Hz *6 Three-phase 200 V 850/1070 850/1070 1450/1890 2000/2500 Single-phase 200 V 4.3/4.7 4.3/4.7 Operating current [A] Refrigerant R407C (HFC) IDF F 50/60 Hz *6 Three-phase 200

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

0.1 x W + W D 5.0 x P W W > Wv P > Pv Determination of allowable load weight & pressure Inclined operation (For vertical operation, refer to page 8-15-74.)

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

Driver Driver Servo amplifier Servo motor Servo amplifier Servo motor U U U U CAUTION V V M V M V W W W W Connecting a servo motor of the wrong axis to U, V, W, or CN2 of the driver may cause a malfunction. 3 3 3.

C95

Basic circuit CJ1 W 1.

MB

Bore size (mm) Contents 32 40 50 63 80 100 32 40 50 63 80 100 MBB32-PS MBB40-PS MBB50-PS MBB63-PS MBB80-PS MBB100-PS MBB32-PS-W MBB40-PS-W MBB50-PS-W MBB63-PS-W MBB80-PS-W MBB100-PS-W Set of the No. @9, #0, #1, #2 and #3. Set of the No. @9, #0, #1, #2 and #3.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Grommet type is available only w/ surge voltage suppressor, not w/ indicator light.

Thermo-chiller

Nil None A With caster adjuster-foot B With earth leakage breaker K Note) With uid ll port W Water-cooled refrigeration Pipe thread type Nil Rc F G (with Rc-G conversion tting) N NPT (with Rc-NPT conversion tting) Power supply 20 3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) Specications Model HRS100-W -20HRS150-W -20Cooling method Water-cooled refrigeration Refrigerant R410A (HFC