ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

5 V, 12 V M9NW V V V v v IC circuit 3-wire (PNP) M9PW V V V v v 2-wire 12 V M9BW V V V v v Relay, PLC Yes 24 V 3-wire (NPN) 5 V, 12 V M9NA*1 v v V v v IC circuit 3-wire (PNP) M9PA*1 v v V v v 2-wire 12 V M9BA*1 v v V v v Water-resistant (2-color indicator) Grommet Yes 3-wire (NPN equivalent) 5 V A96 V V IC circuit Reed auto switch 2-wire 24 V 12 V 100 V A93 V V V V Relay, PLC

Secondary Batteries

*Order part numbers for auto switches alone are D-M9BW(V)L-900, D-M9BW(V)SDPC-900, D-Y7BW(V)L-900, D-Y7BW(V)SDPC-900 and D-Z80L-900. *The auto switch is shipped together but not assembled.

Table of Contents

Exhaust center VZS 20 or less 0.43 VFS2400 VFS2410 600 Pressure center VFS 0.43 20 or less VFS2500 VFS2510 600 Double check 25 or less 0.6 VFS2600 VFS2610 600 VS4 Note 1) Based on JIS B 8375 (Once per 30 days) for the minimum operating frequency.

Large Size Vacuum Module: Series ZR

ZL SOL.C SOL.B SOL.A ZY X X PV PD ZF Supply valve Release valve V ZP SP Individual spacer ZR1-R1-2 ZCUK AMJ PV V X X AMV + + + + + + PD X X Vacuum (V) port Rc 1/8 AEP HEP PV X V Related 70.5 Equipment PD X 16.5 12 V V V 35.5 Pitch P = 33 Pitch P = 33 35.5 PS EXH PD PV PV: Air pressure supply port PS: Pilot pressure supply port PD: Release pressure supply port PE: Pilot pressure exhaust

SMC Electronic Switch Series Variations

F.S. = 5[V] 1[V] = 4[V] 3[%F.S.] = 4 X 0.03 = 0.12[V] Detection Analog output voltage [V] Pressure indication [kPa] Switch The output error induced by the temperature change can be as much as 0.12[V]. 1.12 1 0.88 P3 0 Vacuum Pressure Rated pressure P1 P2 103 100 97 Pressure display = 100[kPa] Temperature characteristic = 3[%F.S.]

MGG

150, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 200, 250, 300 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100 63 MGGL Ball bush bearing 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100, 1200 80 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100, 1200, 1300 100 Intermediate strokes and short strokes other than the above are produced upon receipt of order.

TABLE OF CONTENTS

H 364 H 364 J 116 H 364 V 564 H 364 K 332 J 116 J 116 J 116 V 564 J 116 K 332 V 564 V 564 V 564 K 332 K 332 K 332 Table B FLOW CONFIGURATION VALVE NO.

CATALOG VC10

H 364 H 364 J 116 H 364 V 564 H 364 K 332 J 116 J 116 J 116 V 564 J 116 K 332 V 564 V 564 V 564 K 332 K 332 K 332 Table B FLOW CONFIGURATION VALVE NO.

C95

switch Grommet Diagnostic indication (2-color) Z76 Z73 Z80 F59 F5P J51 J59 F59W F5PW J59W F5BAL IC IC 3-wire 5 V Yes AC 100 100 V or less 12 V 5 V, 12 V Relay, PLC No PLC 24 V 2-wire Terminal conduit 12 V Yes 100 V, 200 V Relay, PLC DIN terminal 3-wire (NPN) 3-wire (PNP) 5 V, 12 V IC 24 V 100 V, 200 V 2-wire 12 V 3-wire (NPN) 3-wire (PNP) 5 V, 12 V IC Diagnostic indication (2

MB1

(different sides, same side) 15 25 Y7P(V) 1pc. D-Y7NW(V), Y7PW(V), 2pcs. (different sides, same side) Solid state switch 20 25 Y7BW(V) 1pc. 2pcs. (different sides, same side) 20 30 D-Y7BAL 1pc. Center trunnion is not included.

SYJ300/500/700

circuit 0.35 (With indicator light: 0.4) Power consumption (W) DC 0.1 (With indicator light only) External pilot 1.4 (With indicator light: 1.5) 100 V 110 V [115 V] 200 V SYJ31 R 2 4 SYJ32 R 2 4 1.6 (With indicator light: 1.7) (A) 2 (A) 2 Apparent power (VA) AC [1.7 (With indicator light: 1.8)] X X 2.3 (With indicator light: 2.4) 220 V [230 V] 2.5 (With indicator light: 2.6) 1 (P) 3 (R)

Dual Rod Cylinder Series CXSJ/CXS

12 V 12 V Relay, PLC IC circuit 24 V Grommet Diagnostic indication (2-color indication) 5 V, 12 V 2-wire 12 V Water resistant (2-color indication) IC circuit 3-wire (NPN equivalent) Z76 5 V Grommet 24 V 12 V 100 V Z73 Z73 Z80 Relay, PLC 2-wire None IC circuit 100 V or less Solid state auto switches marked with are produced upon receipt of order.

REA/REB

Speed 600 mm/s Material No.

155

In-line D-M9N D-M9P D-M9B D-M9NA D-M9PA D-M9BA Electrical entry Special function Indicator light Wiring (Output) Applicable load Smbol A B C E F G 3-wire (NPN) 3-wire (PNP) 2-wire Relay, PLC IC circuit 24 V 5 V, 12 V Grommet Yes 12 V Yes 3-wire (NPN) 3-wire (PNP) 2-wire 24 V 5 V, 12 V Relay, PLC IC circuit Water resistance (2-color display) Grommet 12 V Option (For detail, refer to page

42

) V V CC-LINK V D side U side 1 2 3 Stations SI Unit Part No.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

Without light SY100-61-1 With light Rated voltage 24 VDC 12 VDC 100 VAC 200 VAC 110 VAC 220 VAC Voltage symbol 24 V 12 V 100 V 200 V 110 V 220 V Part no.

XL

-16 XL(A, C, H) [V]-25 XLD [V]-25 XL(F, G) [V]-16 XL(F, G) [V]-25 XLD [V]-40 XL [V]-40 XLD [V]-50 XL [V]-50 XLD [V]-63 XL [V]-63 XLD [V]-80 XL [V]-80 Construction No.

Square Tube Type Air Cylinder Series MB1

(different sides, same side) 15 25 Y7P(V) 1pc. D-Y7NW(V), Y7PW(V), 2pcs. (different sides, same side) Solid state switch 20 25 Y7BW(V) 1pc. 2pcs. (different sides, same side) 20 30 D-Y7BAL 1pc. Center trunnion is not included.

CY1

1000 20 100, 200, 300, 400, 500, 600, 800 25 1200 100, 200, 300, 400, 500, 600, 800, 1000 25 2 axes 1500 32 Note) Contact SMC if the maximum stroke is exceeded.

High Vacuum Angle Valve

80 600/130 800/180 200 V 800/40 1600/80 1600/80 2400/130 3200/180 * The inrush current of the heater flows for several tens of seconds when using 100 V, while it flows for several seconds when using 200 V.