CE Output terminal q w e r t Preset No. 6 7 8 9 10 For example, when bank 2 is selected, presets 6 through 10 are valid and when the count value coincides with the setting value of 6 through 10, the respective output terminals q through t are turned ON. Prescale Function This function allows free setting of how many millimeters will indicate one pulse.
1 5 5.5 7.5 1 [3.5] 6 5.5 9 10 1 5 5.5 7.5 17 19 22.5 24.5 10 9.5 13 14 5 9 9.5 11.5 5 4.5 0.5 1.5 10 9.5 13 14 5 9 9.5 11.5 10 9.5 13 14 5 9 9.5 11.5 0.5 [3] 3.5 [1] 5.5 [3] DDouble Acting, Double Rod 1.5 2 6 7 19.5 21.5 25 27 2.5 3 2 4 12 16 20 25 5.5 5 10 12 3.5 [6] 3 [5.5] 8 [10.5] 10 [12.5] 1.5 2 6 7 5.5 5 10 12 17 19 22.5 24.5 5.5 6 10 11 9.5 9 14 16 0.5 1 4 6 5.5 6 10 11 9.5 9 14 16
C D E F H RB I J K L M N OB Q RA W Y M4 x 0.7 4 14.5 7 5 M3 x 0.5 10 to 40 39.5 31.5 6 6 29 5.5 10 38 5 8 20 3.5 6.5 M6 x 1.0 7 18 10 5 M4 x 0.7 10 to 60 44 34 8 8 36 5.5 16 47 7 10 25.5 5.4 9 M6 x 1.0 7 19.5 10 6 M5 x 0.8 10 to 60 47.5 37.5 10 10 40 5.5 20 52 8 10 28 5.4 9 M6 x 1.0 7 23 10 49.5 7 M6 x 1.0 10 to 50, 75, 100 54 42 12 12 45 8.5 25 60 4.5 10 12 34 5.5 9 M6 x 1.0 7 26 10
: 10 or more The mean q Non-unidirectional airflow: at least two locations NL = A x 64/(10M) 0.5 q Number of sampling locations: 2 to 9 95% UCL of the mean and the mean of the averages w Number of sampling locations: 1, or 10 or more The mean Derive it from the area of the cleanroom or clean air controlled space.
8 (left side) One-touch fitting 10 (left side) Mixed 02R 03R 02L 03L 02Y 03Y C6R C8R C10R C6L C8L C10L Control equipment Symbol Nil A AP M MP F G C E Air filter with auto drain 10 stations 10 Air filter with manual drain Note) When equipped with control unit, one or two stations are used for mounting.
/s 1 Graph V = up to 300mm/s 2 0.5 0.4 CXSL6 0.05 CXSM6 Weight m (kg) Weight m (kg) 0.1 CXSL6 0.05 CXSM6 5 0.03 5 0.01 10 20 30 40 50 100 10 20 30 40 50 100 Overhang L (mm) Overhang L (mm) 10 to 32 Graph V = up to 200mm/s 3 Graph V = up to 400mm/s 4 4 20 3 10 32 5 25 1 Weight m (kg) Weight m (kg) 32 20 25 0.5 1 20 15 0.5 15 10 CXSM CXSL CXSM CXSL 10 5 0.1 5 0.1 10 20 30 40 50 100 10 20 30
Voltage 2 2 4 4 15 10 250 VAC 1.5 1.5 3 3 15 10 8 VDC 1.5 2.5 3 5 15 15 14 VDC 1.5 2.5 3 5 15 10 30 VDC 1.5 2.5 3 5 6 5 125 VDC 0.3 0.05 0.3 0.05 0.5 0.05 250 VDC 0.2 0.03 0.2 0.03 0.25 125 VAC 15 15 15 15 6 0.5 0.25 0.03 10 10 15 10 5 0.05 0.03 JIS Symbol How to Order 01 VR320 0 01 Port size Precautions Rc 1 8 NPT N01 1 8 Be sure to read before handling.
P.5-10 It indicates the set temperature. (10) Circulating fluid set temperature P.5-10 CH2 Press the numeric section to change the set temperature. (11) Circulating fluid discharge pressure It indicates the discharge pressure.
Q = T x V x x C h x 860 T x V x x C h x 60 x 1000 Q = = 20 x 0.06 x 1.80 x 10 3 x 0.23 0.25 x 860 20 x 60 x 1.80 x 10 3 x 0.96 x 10 3 = 15 x 60 x 1000 = 2.3 kW = 2304 W = 2.3 kW Cooling capacity = Considering a safety factor of 20%, Cooling capacity = Considering a safety factor of 20%, 2.8 kW (When the circulating fluid temperature is 20C.) 2.3 x 1.2 = 2.8 kW (When the circulating fluid
DA IB VA VB R H T ID U X PW IG DB 2-Rc 3/8 (plug) IF unlocking port Unlocks when pressurized 6H7 depth 10 2-Rc 3/8 PB GA GC 10 GB Q G IE J JA JB K PA + Stroke 6H7 depth 10 S FA FB C + Stroke B + Stroke A + Stroke E Note 1) Intermediate strokes other than standard strokes are manufactured by installing spacers.
DA IB VA VB R H T ID U X PW IG DB 2-Rc 3/8 (plug) IF unlocking port Unlocks when pressurized 6H7 depth 10 2-Rc 3/8 PB GA GC 10 GB Q G IE J JA JB K PA + Stroke 6H7 depth 10 S FA FB C + Stroke B + Stroke A + Stroke E Note 1) Intermediate strokes other than standard strokes are manufactured by installing spacers.
Through-hole/CQ2YB, CDQ2YB Both ends tapped/CQ2YA, CDQ2YA CDQ2YA Both ends tapped (mm) Bore size (mm) O1 R O1 thread R R M6 x 1.0 10 32 M6 x 1.0 10 40 M8 x 1.25 14 50 H thread effective depth C U 4-N through 8-O counter bore Q F 2-P (Port size) (Rc, NPT, G) I 22 D M E Z 11 Lead wire min. bending radius 10 Auto switch D-A7, A8 K M E S J L B + Stroke A + Stroke Rod end male thread H1 Auto switch
Double clevis type mm Bore size (mm) Stroke range (mm) CD hole H10 Shaft d9 CL CD CT CU CW CX CZ L A B 63 107 55 30 to 100 93 14 8 20 30 22 44 8 80 129.5 63.5 40 to 100 111.5 18 10 27 38 28 56 10 100 155 76 L CU CW RR 40 to 100 133 22 13 31 45 32 64 12 CX CZ +0.4 +0.2 0.1 0.3 B + Stroke CL + Stroke A + Stroke Bore size (mm) Stroke range (mm) 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75,
MU-D02 MU-D03 MU-D04 MU-D05 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.070 0 8 10 10 14 8 10 10 14 Applicable pin no. CD-MU02 CD-MU03 CD-MU04 CD-MU05 DZ 8 10 10 14 CZ 8 10 10 14 DY 9 11 13 16 CX 9 11 13 16 DX 18 22 26 32 CT 9.5 11 14 17 DT 9.5 11 14 17 CR 5.3 6.4 8.4 10.5 DR 5.3 6.4 8.4 10.5 CL 26 42 54 64 DL 26 42 54 64 Part no.
Bore size (mm) Z DA DB DL DU DC DX DE DR DO DT DS DH Z DD H10 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 32 40 50 63 80 100 32 40 50 63 80 100 6.6 6.6 9 9 11 11 46 52 65 75 95 114 32 32 43 43 64 64 22 22 30 30 45 45 10 10 11.5 11.5 14 14 44 44 60 60 86 86 14 14 20 20 30 30 62 62 81 81 111 111 15 15 18 18 22 22 7 7 8 8 10 10 33 33 45 45 65 65 154 158 182 182 228 228 10 10 14 14
(packaged together) 50 80 650 F 40 550 G 10 300 H 4 200 J Filter (IN port) Nil Without filter F With filter Note) 100 Note) Flow reduction rate 50 L/min: 5% or less 100 L/min: 5 to 10% 150 L/min: 10 to 15% 80 600 K 40 500 L 10 250 M 4 150 150 Specifications Flow rate (L/min) [at 0.25 MPa] 50 100 150 Power consumption (W) 80 40 10 4 80 40 10 4 80 40 10 4 Type of actuation 2-position 2 port
A 40 44 B 20 22 C 9 10 D 22 24 E 59 66 F 33 34 G 24 25 H 30 40 J 36 46 K 6 9 M 45.5 50.5 N 69 76 VVXA31 VVXA32 17-3-108
6 KA 78 79 77 77 S 16 12 10 8 D 25 18 14 12 E 2 2 2 2 F 40 32 25 20 30 22 22 18 23 0<23> 0 0 10 0 0 0 M5 x 0.8 depth 7.5 M5 x 0.8 depth 8 M14 x 1.5 M6 x 1 depth 12 12 12 1/4 1/4 3/8 1/2 58 58 27 27 32 41 14<12> 14<12> 10 10 10 10 23 20 20 20 11 11 58 72 20<17> 20<17> 16 16 71 71 13 16 89 110 7 7 10 10 55 69 80 100 10 10 10 10 32 38 50 60 150 150 182 182 18 18 22 26 90 90 108 108 20 20 25