Symbol: 15R3 (2 Port, N.C., Port 1 IN, Port 2 OUT), Function: Y (Standard w/Power Saving Circuit), Voltage: 5 (24VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Sub-plate Material/Port Size/ Reverse Mounting Prevention Pin: w/o Sub-plate, Lead Wire Length: 300mm, CE Compliant: Q (CE Compliant)

Symbol: 15R3 (2 Port, N.C., Port 1 IN, Port 2 OUT), Function: Y (Standard w/Power Saving Circuit), Voltage: 5 (24VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material/Port Size/ Reverse Mounting Prevention Pin: 1U (1/4-28UNF, PVDF), Lead Wire Length: 300mm, CE Compliant: Q (CE Compliant)

Symbol: 15R3 (2 Port, N.C., Port 1 IN, Port 2 OUT), Function: Y (Standard w/Power Saving Circuit), Voltage: 6 (12VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material/Port Size/ Reverse Mounting Prevention Pin: w/o Sub-plate, Lead Wire Length: 300mm, CE Compliant: Q (CE Compliant)

Symbol: 15R3 (2 Port, N.C., Port 1 IN, Port 2 OUT), Function: Y (Standard w/Power Saving Circuit), Voltage: 5 (24VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Sub-plate Material/Port Size/ Reverse Mounting Prevention Pin: w/o Sub-plate, Lead Wire Length: 300mm, CE Compliant: Q (CE Compliant)

Symbol: 15R3 (2 Port, N.C., Port 1 IN, Port 2 OUT), Function: Y (Standard w/Power Saving Circuit), Voltage: 6 (12VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Sub-plate Material/Port Size/ Reverse Mounting Prevention Pin: w/o Sub-plate, Lead Wire Length: 300mm, CE Compliant: Q (CE Compliant)

Symbol: 15R3 (2 Port, N.C., Port 1 IN, Port 2 OUT), Function: Y (Standard w/Power Saving Circuit), Voltage: 6 (12VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Sub-plate Material/Port Size/ Reverse Mounting Prevention Pin: 1U (1/4-28UNF, PVDF), Lead Wire Length: 300mm, CE Compliant: Q (CE Compliant)

Symbol: 2 Port, N.C., Port 1 IN, Port 2 OUT, Function: Standard w/Power Saving Circuit, Voltage: 12VDC, Wetted Part Material: Plate: PEEK; Diaphragm: FKM, Sub-plate Material/Port Size/ Reverse Mounting Prevention Pin: w/o Sub-plate, Lead Wire Length: 300mm, CE Compliant: CE Compliant

Symbol: 2 Port, N.C., Port 1 IN, Port 2 OUT, Function: Standard w/Power Saving Circuit, Voltage: 24VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material/Port Size/ Reverse Mounting Prevention Pin: w/o Sub-plate, Lead Wire Length: 300mm, CE Compliant: CE Compliant

Symbol: 2 Port, N.C., Port 1 IN, Port 2 OUT, Function: Standard w/Power Saving Circuit, Voltage: 24VDC, Wetted Part Material: Plate: PEEK; Diaphragm: FKM, Sub-plate Material/Port Size/ Reverse Mounting Prevention Pin: w/o Sub-plate, Lead Wire Length: 300mm, CE Compliant: CE Compliant

Symbol: 2 Port, N.C., Port 1 IN, Port 2 OUT, Function: Standard w/Power Saving Circuit, Voltage: 24VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material/Port Size/ Reverse Mounting Prevention Pin: 1/4-28UNF, PVDF, Lead Wire Length: 300mm, CE Compliant: CE Compliant

Symbol: 2 Port, N.C., Port 1 IN, Port 2 OUT, Function: Standard w/Power Saving Circuit, Voltage: 12VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material/Port Size/ Reverse Mounting Prevention Pin: w/o Sub-plate, Lead Wire Length: 300mm, CE Compliant: CE Compliant

Symbol: 2 Port, N.C., Port 1 IN, Port 2 OUT, Function: Standard w/Power Saving Circuit, Voltage: 24VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material/Port Size/ Reverse Mounting Prevention Pin: w/o Sub-plate, Lead Wire Length: 300mm, CE Compliant: CE Compliant

Symbol: 2 Port, N.C., Port 1 IN, Port 2 OUT, Function: Standard w/Power Saving Circuit, Voltage: 12VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material/Port Size/ Reverse Mounting Prevention Pin: w/o Sub-plate, Lead Wire Length: 300mm, CE Compliant: CE Compliant

Symbol: 2 Port, N.C., Port 1 IN, Port 2 OUT, Function: Standard w/Power Saving Circuit, Voltage: 12VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material/Port Size/ Reverse Mounting Prevention Pin: 1/4-28UNF, PVDF, Lead Wire Length: 300mm, CE Compliant: CE Compliant

2

6 (For mounting) Plug side 50 Panel mounting hole Component Parts t q No.

1

Connector for unit (Plug) 6 y t y t EX600-DXB EX600-DYB EX600-DXC q w q w e q w er e y t y t y t EX600-DXD EX600-DXE EX600-DYE EX600-DME EX600-DXF EX600-DYF EX600-DMF Analog Unit q w e q w e No.

Table of Contents

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Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

Note Description SY940 M2: 0.15Nm M3: 0.6Nm M4: 1.4Nm SY5000-27-1*-Q Rc 1/4: SY7000-27-1*-Q Rc 3/8: SY7000-27-2*-Q SY3000-27-1*-Q Rc 3/8: SY9000-27-1*-Q Rc 1/2: SY9000-27-2*-Q 6 Die-cast aluminum Sub-plate *Thread Pilot valve assembly Refer to "How to Order Pilot Valve Assemblies" on page 1.2-32.

ZP

-6 U4 For 4 soft tubing M-5AU-4 U6 For 6 soft tubing M-5AU-6 H Model A B C D 2 E F G H J K Vacuum inlet direction q Pad dia.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Note Description SY940 M2: 0.16 Nm M3: 0.8 Nm M4: 1.4 Nm Aluminum die-casted 1 4 3 8 3 8 1 2 SY5000-27-1 (-Q) : SY7000-27-1 (-Q) : SY7000-27-2 (-Q) SY3000-27-1 (-Q) : SY9000-27-1 (-Q) : SY9000-27-2 (-Q) Sub-plate Note) 6 Pilot valve assembly Refer to How to Order Pilot Valve Assembly on page 130.