Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

P Note 1) U S U S U S U S w AXT100-1-J 20 Note 1) AXT100-1-FU15 AXT100-1-FS e Note 1) Top entry connector for PU, JU while side entry connector for PS, JS.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

P Note 1) U S U S U S U S w AXT100-1-J 20 Note 1) AXT100-1-FU15 AXT100-1-FS e Note 1) Top entry connector for PU, JU while side entry connector for PS, JS.

EX120/121/122

TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 US C R C US US C R R R R R R R US C US C US C US C US C US C TYPE1 SERIAL NO.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

Attached parts 1 4 3 8 1 2 1 4 3 8 1 2 Blank plate XT015-4A XT016-5A XT038N-4A AXT394A AXT393A AXT396A Gasket, Bolt Interface speed control Gasket, Bolt Indicate valve and option number with the manifold base number. (Manifold base) VVSA430-05N1 1 (2 position single) VSA4134-00 3 (2 position double) VSA4234-00 1 (Blank plate) XTO16-5A 1 5-3-38

0.55

Piping port Port size Series Model 3.2 4 6 8 10 12 16 4(A), 2(B) 1/8 VF3;3;-;;1-01 1(P), 5(EA), 3(EB) 1/8 4(A), 2(B) 1/4 VF3;3;-;;1-02 1(P), 5(EA), 3(EB) P: 1/4, EA, EB: 1/8 4(A), 2(B) 1/4 VF3;4;-;;1-02 VF3000 1(P), 5(EA), 3(EB) 1/4 4(A), 2(B) 3/8 VF3;4;-;;1-03 1(P), 5(EA), 3(EB) 3/8 1(P), 5(R), 3(R) 1/4 Type 30 manifold base 4(A), 2(B) 1/4 Type 40 manifold base 1(P), 5(R), 3(R) 1/4 Applicable

Vacuum

20 30 46 80 91 9.9 zPlouo souo 7 u02 2 1.2 12 0.8 u04 4 4.4 1 . 6 7 12 0.8 u06 7 2.5 7 12 0.8 u08 I 7 12 1 u10 1 0 12 1 2 3 u13 1 3 1 5 4 1 3 7.7 1 2 u16 1 6 1 8 1 3 8.2 '12.5 3.5 u20 20 1 5 14 4 u25 1 5 1 4 4 u32 32 4 1 5 1 0 14.5 4 5 u40 40 43 7 1 8 18.5 I u50 50 53 7 1 8 19.5 7.5 D l 0 1 0 1 2 10.7 D16 1 8 11.7 7 D25 2A 4 15.5 20 1 0 D40 40 43 7 1 8 24.2 29 126 Uacuum Pad/Gomp serles zPR

Vacuum

20 30 46 80 91 9.9 zPlouo souo 7 u02 2 1.2 12 0.8 u04 4 4.4 1 . 6 7 12 0.8 u06 7 2.5 7 12 0.8 u08 I 7 12 1 u10 1 0 12 1 2 3 u13 1 3 1 5 4 1 3 7.7 1 2 u16 1 6 1 8 1 3 8.2 '12.5 3.5 u20 20 1 5 14 4 u25 1 5 1 4 4 u32 32 4 1 5 1 0 14.5 4 5 u40 40 43 7 1 8 18.5 I u50 50 53 7 1 8 19.5 7.5 D l 0 1 0 1 2 10.7 D16 1 8 11.7 7 D25 2A 4 15.5 20 1 0 D40 40 43 7 1 8 24.2 29 126 Uacuum Pad/Gom serles zPR

Series VQ Base Mounted Metal Seal/Rubber Seal

(1) [EX124-SCS2](2) EX120-SMJ1(-XP)(1) [EX124-SMJ1](2) AXT100-1-P (4) U S w e r U S U S VZ AXT100-1-F (4) U S AXT100-1-GU20 Note 1) Suffix XP for dust-proof SI unit.

CV/MVGQ

For single solenoid valve 1-1. Pilot valve only VO302A-00 1 pc. 1-2. With gasket VO302S-00 1 pc. 2. For double solenoid valve 2-1. Pilot valve only VO302A-00 2 pcs. 2-2. With gasket VO302D-00 2 pcs.

CV/MVGQ

For single solenoid valve 1-1. Pilot valve only VO302A-00 1 pc. 1-2. With gasket VO302S-00 1 pc. 2. For double solenoid valve 2-1. Pilot valve only VO302A-00 2 pcs. 2-2. With gasket VO302D-00 2 pcs.

CA2

1 !2 !3 !4 !5 !6 !7 !8 !

Air Cylinder Series CA2

1 !

VDW

1/8 1 (IN) port 8.5 (6.3) VXA 6 12.8 VCHm 1/8, 1/4 1 (IN) port 1/8, 1/4 2 (N.C.) port 2 x M3 x 5 Dimensions inside ( ) are for port size 1/8.

A_HEC-OM-K001

A_HEC-OM-K001-1.7 Contents Contents Chapter 1 Safety Instructions . 1-1 1.1 Before using the Chemical Thermo-con . 1-1 1.2 Safety training . 1-1 1.3 Hazard Levels . 1-2 1.3.1 Definitions of Serious injury and Minor injury . 1-3 1.3.2 Symbols . 1-3 1.4 Hazard Warning Labels . 1-5 1.4.1 Location of hazard warning labels . 1-6 1.5 Safety Measures . 1-12 1.5.1 Precautions . 1-12 1.5.2 Protective

5 Port Air Operated Valve

0.76 (A)4 2(B) 1 (P) (EA)5 3(EB) 2 position double VFA1000 VFA3000 (B)2 4(A) 5(EA) 1 (P) (EB)3 Body ported Base mounted VFA3000 VFA5000 1/8 1/4 4.0 P.1498 2(B) (A)4 (EA)5 1 (P) 3(EB) Upward 3 position closed center 2(B) (A)4 VFA5000 (EA)5 1 (P) 3(EB) 3 position exhaust center 2(B) (A)4 1/4 3/8 8.8 (EA)5 1 (P) 3(EB) 3 position pressure center 2(B) (A)4 Lateral (EA)5 1 (P) 3(EB) VFA3000 2

SZ3000

If 12 VDC specifications are required, enter 12 at the end of the assembly part number. 1 2 1 2 P N SZ3000-42-6A-DSZ3000-42-5A-D For flat ribbon cable 20 pins D side 1 2 1 2 P N SZ3000-42-8A-DSZ3000-42-7A-D For flat ribbon cable 10 pins D side SZ3000-42-10A-D For serial D side Note) Connector block assembly can be shipped as an assembly only in the case of double wiring.

SZ3000

If 12 VDC specifications are required, enter 12 at the end of the assembly part number. 1 2 1 2 P N SZ3000-42-6A-DSZ3000-42-5A-D For flat ribbon cable 20 pins D side 1 2 1 2 P N SZ3000-42-8A-DSZ3000-42-7A-D For flat ribbon cable 10 pins D side SZ3000-42-10A-D For serial D side Note) Connector block assembly can be shipped as an assembly only in the case of double wiring.

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

1 (A) 4 (B) 2 (A) 4 (B) 2 4(A) SOL.a SOL.b SOL.a SOL.b 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) 2(B) o 5(EA)/3(EB) 1(P) SJ3C60 [N.C., N.O. valve x 1 (each)] SJ3C60K with back pressure check valve SJ3C60 [N.C. valve, N.O. valve x 1 (each)] !0 y t r q e u w !2 i !

HEC_W-E

OF USE -1-1 1.2 OPERATION BY EXTERNAL COMMUNICATION -1-1 1.3 CONTENTS OF OPERATION MANUAL-1-2 2 SAFETY INSTRUCTIONS -2-1 2.1 BEFORE USING THE THERMO-CON -2-1 2.1.1 SAFETY TRAINING -2-1 2.1.2 IDENTIFICATION OF DANGER, WARNING, CAUTION AND NOTE -2-1 2.2 WARNING LABEL AND CAUTION LABEL -2-3 2.2.1 THE POSITION OF ATTACHING WARNING LABEL AND CAUTION LABEL -2-3 2.3 PRECAUTIONS FOR RUNNING -2-4

Model Selection 1

/N.O./ Double acting 0 to 0.5 Pilot pressure: 0.3 to 0.5 LVA1/2/3/4/5 2, 4, 8, 12, 20 1/8 to 3/4 Single unit Direct operated Threaded type 17-5-17 0 to 0.5 Pilot pressure: 0.3 to 0.5 N.C./N.O./ Double acting 1/4 to 3/4 4, 8, 12, 20 LLA2/3/4/5A Manifold 1/8 to 1/2 LVH2/3/40 N.C. Single unit Direct operated Manually operated 17-5-27 0 to 0.5 4, 8, 12 LLH2/3/4A 1/4 to 1/2 N.C.