5 Port Air Operated Valve

0.76 (A)4 2(B) 1 (P) (EA)5 3(EB) 2 position double VFA1000 VFA3000 (B)2 4(A) 5(EA) 1 (P) (EB)3 Body ported Base mounted VFA3000 VFA5000 1/8 1/4 4.0 P.1498 2(B) (A)4 (EA)5 1 (P) 3(EB) Upward 3 position closed center 2(B) (A)4 VFA5000 (EA)5 1 (P) 3(EB) 3 position exhaust center 2(B) (A)4 1/4 3/8 8.8 (EA)5 1 (P) 3(EB) 3 position pressure center 2(B) (A)4 Lateral (EA)5 1 (P) 3(EB) VFA3000 2

Model Selection 1

/N.O./ Double acting Air operated valve 17-5-63 LVQ2/3/4/5/6-S Single unit Direct operated, Space saving type N.C./N.O./ Double acting Single unit LVQ2/3/4/5/6SS 17-5-73 2 port N.C./N.O./ Double acting LVA1/2/3/4/5 Single unit Direct operated Threaded type 17-5-17 N.C./N.O./ Double acting LLA2/3/4/5A Manifold LVH2/3/40 N.C.

Shock Absorbers and Rate Controls

19.0/ -3' 3t.zo.3' 38.0 t6.o'3' 73 38 38 35 26 N/A 23.0 2 1tl PfN2 | 00cxt(sl 408 r9.04'19.o7fr 3t.lo i., 38.0 r6.0'fi 73 38 38 35 26 N/A 23.0 P 2l50(flt(S) 537 r 9.07-3 ' r9.07'3' 3r.zo 3',38.0 t6.l)f 5 7 1 38 38 35 I O r,l/A 23.0 5.08 PRO| |o(n(Sl 2l I 5.oo tl 5.00 -3' 8.00 i, o.oo j., fi/A 28 N/A 22 l l l 3 5.0 t.0 0.54 PR0r 25(lt(sl 180 6.38 -35 6.38 -3' 12.70 il I?.

HEC_W-E

FIG. 2-1 THE POSITION OF ATTACHING WARNING LABEL AND CAUTION LABEL -2-3 FIG. 2-2 DETAIL OF WARNING LABEL AND CAUTION LABEL -2-3 FIG. 3-1 INSTALLATION ENVIRONMENT -3-2 FIG. 3-2 FOOT MOUNTING SCREWS -3-3 FIG. 3-3 MOUNTING -3-3 FIG. 4-1 POSITION OF MODEL NO. LABEL -4-2 FIG. 4-2 LEGEND OF MODEL NO.

VDW

150 167.5 185 62.5 80 97.5 115 L3 52 174.5 192 69.5 87 104.5 122 139.5 157 2 stns. x 1 Manifold composition 2 stns. + 3 stns. x 2 3 stns. x 3 3 stns. x 1 2 stns. x 2 3 stns. x 2 2 stns. x 2 + 3 stns. 2 stns. + 3 stns. 2 stns. x 2 + 3 stns. x 2 Note) Manifold base is consisted of the junction of 2 and 3 station bases.

Vacuum

Digital Display (3% digit LCO) . Predicted Failure Function . 2 Setpoint Use . High Accuracy O Do not subiect body to excessive exiernal force. O Plping tightening to.ques How To Older (Exampre) 3 4 ( 3 1 3 1 7 ( 1 5 1 5 2 0 ( 1 7 NZXl Nozzle Diameter (Same as Std.) Eiector Exhaust Type (Same as Std.)

Vacuum

Digital Display (3% digit LCO) . Predicted Failure Function . 2 Setpoint Use . High Accuracy O Do not subiect body to excessive exiernal force. O Plping tightening to.ques How To Older (Exampre) 3 4 ( 3 1 3 1 7 ( 1 5 1 5 2 0 ( 1 7 NZXl Nozzle Diameter (Same as Std.) Eiector Exhaust Type (Same as Std.)

A_HEC-OM-K001

. 3-2 3.2.3 Learning control function . 3-2 3.2.4 External sensor control function . 3-3 3.2.5 Temperature sensor fine control function . 3-3 3.2.6 Memorization of Set values function (Function that backs up with EEPROM) . 3-3 3.2.7 Temperature Upper / Lower Limit Alarm Function . 3-4 3.2.8 Communication Function. 3-4 3.2.9 Remote ON/OFF function. 3-5 3.2.10 Output cutoff Alarm Function

VDW Series

115 150 45 167.5 97.5 132.5 185 69.5 L3 87 122 157 52 174.5 104.5 139.5 192 3 stns. x 1 2 stns. x 2 3 stns. x 2 2 stns. + 3 stns. x 2 2 stns. x 1 3 stns. x 3 2 stns. + 3 stns. 2 stns. x 2 + 3 stns. 2 stns. x 2 + 3 stns. x 2 Manifold composition Note) Manifold bases are composed by connecting 2 station and 3 station bases.

IDX-OM-W020

i-2-3 . i-3 i-2-4 . i-3 i-2-5 . i-3 i-2-6 . i-4 i-2-7 . i-5 i-2-8 . i-6 i-2-9 . i-6 i-3 . i-7 i-4 / . i-8 1 1-1 . 1-1 2-1 . 2-1 2-2 . 2-2 2-2-1 . 2-2 2-2-2 . 2-3 2-2-3 . 2-3 2-2-4 . 2-3 2-2-5 . 2-4 2-3 . 2-5 3 / 3-1 . 3-1 3-2 . 3-1 3-3 . 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 5 . 5-1 IDFB Series 1 6 6-1 . 6-1 6-2 GWP . 6-2 6-3 . 6-3

IDX-OM-W013

. 2 2 2 2 1 Location . 2 2 2 2 2 Anchorage . 2 2 2 2 3 Air piping . 2 3 2 2 4 Drain Tube . 2 3 2 2 5 Electric wiring . 2 4 2 3 Cautions about Reinstallation . 2 6 Chapter 3 Operation / Shutdown 3 1 Check points before operation . 3 1 3 2 Operation . 3 1 3 3 Shutdown . 3 2 3 4 Cautions about restart . 3 2 3 5 Check points before restart . 3 2 3 6 Precautions for long-term non-operation .

VSA4

Attached parts 1 4 3 8 1 2 1 4 3 8 1 2 Blank plate XT015-4A XT016-5A XT038N-4A AXT394A AXT393A AXT396A Gasket, Bolt Interface speed control Gasket, Bolt Indicate valve and option number with the manifold base number. (Manifold base) VVSA430-05N1 1 (2 position single) VSA4134-00 3 (2 position double) VSA4234-00 1 (Blank plate) XTO16-5A 1 5-3-38

IDX-OM-W010

. 2 2 2 2 1 Location . 2 2 2 2 2 Anchorage . 2 2 2 2 3 Air piping . 2 3 2 2 4 Drain Tube . 2 3 2 2 5 Electric wiring . 2 4 2 3 Cautions about Reinstallation . 2 6 Chapter 3 Operation / Shutdown 3 1 Check points before operation . 3 1 3 2 Operation . 3 1 3 3 Shutdown . 3 2 3 4 Cautions about restart . 3 2 3 5 Check points before restart . 3 2 3 6 Precautions for long-term non-operation .

EX510

ZS-28-CA-2 ZS-28-CA-2 ZS-28-CA-3 ZS-28-CA-2 ZS-28-CA-3 ZS-28-CA-3 ZS-28-CA-3 ZS-28-CA-3 ZS-28-CA-3 ZS-28-CA-3 ZS-28-CA-3 ZS-28-CA-3 ZS-28-CA-4 ZS-28-CA-4 ZS-28-CA-4 SMC part no. Manufacturer's part no.

IDX-OM-W011

i-2-3 . i-3 i-2-4 . i-3 i-2-5 . i-3 i-2-6 . i-4 i-2-7 . i-4 i-2-8 . i-5 i-2-9 . i-5 i-3 . i-6 i-4 / . i-7 1 1-1 . 1-1 2 2-1 . 2-1 2-2 . 2-1 2-2-1 . 2-1 2-2-2 . 2-2 2-2-3 . 2-2 2-2-4 . 2-3 2-2-5 . 2-3 2-3 . 2-5 3 / 3-1 . 3-1 3-2 . 3-1 3-3 . 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 4-2-1 () . 4-1 1 4-2-2 . 4-1 4-2-3 . 4-2 5 5-1 . 5-1 6

IDX-OM-W089

2 2 Installation . 2 2 2 2 1 Location . 2 2 2 2 2 Anchorage . 2 2 2 2 3 Air piping . 2 2 2 2 4 Drain Tube . 2 3 2 2 5 Electric Wiring . 2 4 2 3 Cautions about reinstallation . 2 5 Chapter 3 Operation / Shutdown 3 1 Check points before operation . 3 1 3 2 Operation . 3 1 3 3 Shutdown . 3 2 3 4 Cautions about restart . 3 2 3 5 Check points before restart . 3 2 3 6 Precautions for long-term

IDX-OM-W017

i-2-1 . i-3 i-2-2 . i-4 i-2-3 . i-4 i-2-4 . i-4 i-2-5 . i-4 i-2-6 . i-5 i-2-7 . i-5 i-2-8 . i-6 i-2-9 . i-6 i-3 . i-7 i-4 / . i-8 1 1-1 . 1-1 2 2-1 . 2-1 2-2 . 2-1 2-2-1 . 2-1 2-2-2 . 2-2 2-2-3 . 2-2 2-2-4 . 2-2 2-2-5 . 2-3 2-3 . 2-4 3 / 3-1 . 3-1 3-2 . 3-1 3-3 . 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 4-2-1 . 4-1 4-2-2 . 4-1 4-2-3 . 4-1 5

VDW

3 stns. 2 stns. + 3 stns. x 2 2 stns. x 2 + 3 stns. x 2 3 stns. x 1 2 stns. x 2 3 stns. x 2 3 stns. x 3 Note) Manifold base is consisted of the junction of 2 and 3 station bases.

IDX-OM-W038

i-4 i.2.7 . i-4 i.2.8 . i-5 i.3 . i-6 i.4 . i-7 1 1.1 . 1-1 2 2.1 . 2-1 2.2 . 2-2 2.2.1 . 2-2 2.2.2 . 2-3 2.2.3 . 2-4 2.2.4 . 2-4 2.2.5 . 2-5 2.3 . 2-6 3 3.1 . 3-1 3.2 . 3-1 3.3 . 3-2 3.4 . 3-3 3.5 . 3-3 3.6 . 3-3 3.7 . 3-3 3.8 . 3-4 3.9 . 3-4 3.8 . 3-5 3.10 . 3-6 3.10.1 . 3-6 3.10.2 . 3-7 3.10.3 . 3-8 IDH Series IDX-OM-W038 3.10.5 . 3-9 3.10.6 PID . 3-

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

115 150 45 167.5 97.5 132.5 185 69.5 L3 87 122 157 52 174.5 104.5 139.5 192 3 stns. x 1 2 stns. x 2 3 stns. x 2 2 stns. + 3 stns. x 2 2 stns. x 1 3 stns. x 3 2 stns. + 3 stns. 2 stns. x 2 + 3 stns. 2 stns. x 2 + 3 stns. x 2 Manifold composition Note) Manifold bases are composed by connecting 2 station and 3 station bases.