2–4

Rc1/8 NPT1/8 NPT1/8 G1/8 7.5 10.5 G1/8 Rc1/8 NPT1/8 NPT1/8 75, 100 50 33 5 to 50 46.5 29.5 40 Rc1/8 NPT1/8 NPT1/8 G1/8 8 11 G1/8 56.5 39.5 8 11 52 50 41.4 Rc1/8 NPT1/8 NPT1/8 75, 100 56.5 39.5 10 to 50 50.5 30.5 50 10.5 10.5 G1/4 60.5 40.5 10.5 10.5 64 62 53.4 Rc1/4 NPT1/4 NPT1/4 Rc1/4 NPT1/4 NPT1/4 G1/4 75, 100 60.5 40.5 HA NN NN OA Bore size (mm) 32 40 50 V W HB IA IB J KA KB L M N OB RA

CRQ2

Sizes 10, 15 Sizes 20, 30, 40 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Flat Key Port B Port B 0 0 0 0 0 19 1 1 0 to to to 19 0 Port A 0 0 8 8 Port A to e 17 at g 0 n fl ra e 17 of ng n o e at ra ti g ta n fl ra ro on of e n Angle adjustment 5 Angle adjustment 5 ov io ti at e o ta gr ot ng R ey ro K ra ve n oo io at

MIW/MIS

RB RA RC RF RE RD RJ SC SB SA Model MIS20-30 MIS20-20 MIS20-10 MIS12-30 MIS12-20 MIS12-10 8 6 6 M5 x 0.8 14 18 1.8 2.5 8 24 22.5 12 34 26 2.2 4 12 9 M8 x 1 10.5 11 12 Series MIW/MIS Auto Switch Mounting When mounting an auto switch, insert the switch in the switch mounting groove on the escapement from the bottom.

Escapements Series MIW/MIS

(mm) NA Model P M3 x 0.5 M5 x 0.8 M5 x 0.8 M5 x 0.8 Rc1/8 PA 22.5 25 41.5 50 69.5 PB 24 27 44 55 75.5 PC 8 10 12 14 14.5 PD 4.5 6 7 8.5 11 PE 2.2 2.8 2.7 2.7 RA M4 x 0.7 M5 x 0.8 M8 x 1 M8 x 1 RB 7 8 12 12 17 RC 2 2.5 4 4 6 RD 5.7 6 9 9 12.4 LC MA MB MC MD ME NB 4.5 7.5 9.5 12 16.5 MIW8-8 MIW12-12 MIW20-20 MIW25-25 MIW32-32 M3 x 0.5 M4 x 0.7 M6 x 1 22 34 43.5 58 73 28 37 54 71 80 7.5 11

Rotary Actuator CRA1 Series Rack & Pinion Type/Size: 30, 50, 63, 80, 100

Additionally, do not mount the foot bracket with the pressure applied to the port. y 0 A port B port a 1 w y y a e k w of y e e k g n of ra n e io at g ot R n R +4 0 ra ot n io 0 at at ot 8 R io 1 R +4 0 n y ot ra a w n y 0 g at e e k of 9 io 1 n ay ra w n g ey e of k 189

2-Color Display Digital Flow Switch Series PFM

Ra is used to compensate the gas and/or ambient temperature. (a) The gas is static. Ra Ru Rh Rd Flow (b) The gas flows from the left side. 931 Series PFM7/PFM5 Component Parts Straight piping No.

Compact Cylinder

(RB) M L B + Stroke E A + Stroke 25 Width across flats K M: Rod end male thread D H Hexagon width across flats B1 Rod end nut H1 C X L1 Rod End Male Thread (mm) Bore size (mm) B1 C D H H1 K L1 X 13 13 5 5 14 14 10 12 M8 x 1.25 M8 x 1.25 8 10 22 22 16 16 20 25 Basic Style (mm) Bore size (mm) A B C D E F H I K L M N OA OB Q RA RB T 43 45 37 39 10 10 10 12 36 40 5.5 5.5 M6 x 1.0 M6 x 1.0 43

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

Sizes 10, 15 Sizes 20, 30, 40 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Flat Key Port B Port B 0 0 0 0 0 19 1 1 0 to to to 19 0 Port A 0 0 8 8 Port A to e 17 at g 0 n fl ra e 17 of ng n o e at ra ti g ta n fl ra ro on of e n Angle adjustment 5 Angle adjustment 5 ov io ti at e o ta gr ot ng R ey ro K ra ve n oo io at

Escapements Series MIW/MIS

RB RA RC RF RE RD RJ SC SB SA Model MIS20-30 MIS20-20 MIS20-10 MIS12-30 MIS12-20 MIS12-10 8 6 6 M5 x 0.8 14 18 1.8 2.5 8 24 22.5 12 34 26 2.2 4 12 9 M8 x 1 10.5 11 Series MIW/MIS Auto Switch Mounting When mounting an auto switch, insert the switch in the switch mounting groove on the escapement from the bottom.

Flow Sensor Series PFMV

Ra is used to compensate the gas and/or ambient temperature. (a) The gas is static.

Smooth Cylinder/Low Speed Cylinder

Basic style (Through-hole/Both ends tapped common): CQSXB/CDQSXB 12 Auto switch Minimum lead wire bending radius 10 16 H thread effective depth C 2 x M5 x 0.8 2 x 4 x OB counterbore depth RB 2 x 4 x OA effective depth RA Note 1) 4 x N through Flat washer 4 pcs.

39

) XB R XC RW LB PB0.02 PD0.05 PC0.05 PA0.02 GC LA0.1 GB L C 2 x 2 x PH7 Depth D 2 x 2 x MM Depth J Hexagon socket head plug 2 x 2 x NPT 1/4 G Rc GA E B RD (mm) Bore size (mm) B C D E GA GC J L LA LB MM N P GB 50 63 92 48 12 13.7 95 166 95.5 12 376.6 155.5 78.4 M8 x 1.25 19 8 110 54 15 16.6 99 171.5 100.5 12 391.6 161 78 M10 x 1.5 22 10 Bore size (mm) PA PB PC PD R RB RC RD RR W XA XB XC RA

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

J (mm) DRB 7 8 12 12 17 NA Model PE 2.2 2.8 2.7 2.7 RA M4 x 0.7 M5 x 0.8 M8 x 1 M8 x 1 LC MA MB MC MD ME NB 4.5 7.5 9.5 12 16.5 P M3 x 0.5 M5 x 0.8 M5 x 0.8 M5 x 0.8 Rc1/8 PA 22.5 25 42 50 69.5 PB 24 27 44.5 55 75.5 PC 8 10 11.5 14 14.5 PD 4.5 6 7 8.5 11 RC 2 2.5 4 4 6 RD 5.7 6 9 9 12.4 MIW8-8 MIW12-12 MIW20-20 MIW25-25 MIW32-32 M3 x 0.5 M4 x 0.7 M6 x 1 7.5 11 15 20 25 14.5 19 28.5 35.5

Compact Cylinder

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Flat washer 4 pcs. 2 x 4-OA 20 2 x 4-RA (RB) K L B + Stroke M A + Stroke E 25 Width across flats K M: Rod end male thread H D Hexagon width across flats B1 Rod end nut H1 C X L Rod End Male Thread (mm) Bore size (mm) B1 C D H H1 K L X 20 25 13 14 10

CQM

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com IB RQ IA 2-N through MU T EB EA M D-X KA (KB) 2 x 2-OA V 20(RB) Note) 2 x 2-RA L M Flat washer Data W B + Stroke EB A + Stroke EA 20, 25 (mm) With auto switch HA OA Without auto switch A 31.5 Bore size (mm) Stroke range (mm) EB F HB IA IB NN NN EA A

Table of Contents

E B + Stroke A + Stroke Dimensions (mm) Bore size (mm) Standard stroke (mm) A E 25, 50 st Over 50 st B C DA DB FA FB G GA GB GC H HA J K L 25, 50 st Over 50 st 50 80 86 118 110 151 20 25 30 45 0 0 24 33 30 35 12 18 72 95 14 19 11 24 12 14.5 160 242 M10 M12 35 47 37 48 50 66 86 118 44 65 25, 50, 75, 100, 125, 150, 175, 200 Bore size (mm) Standard stroke (mm) 50 80 RB RR RL QA QB RA P PA PB

ELECTRO-PNEUMATIC POSITIONER

Use the RA face to turn it counter-clockwise (reverse actuation).

CLQ

RB 2 x 4-0 threads RA RB Standard type (through hole): CLQB63/80/100 Extension locking LOCK Approx.

Electro-Pneumatic Positioner

Main shaft Double action actuator OUT2 Main shaft Single action actuator X OUT1 OUT2 OUT1 X SUP The cam of the positioner should be set on the RA surface. SUP SUP The cam of the positioner should be set on the RA surface. The cam of the positioner should be set on the RA surface. IN + IN + IN + OUT1 is plugged.

Compact Cylinder with Lock Series CLQ

Double clevis pins and retaining rings are included. 829 33.5 Series CLQ Dimensions: 63, 80, 100 Both ends tapped style: CLQA63/80/100 RA RB 2 x 4 x O threads RA RB Basic style (Through-hole): CLQB63/80/100 P (Rc, NPT, G) Extension locking LOCK Rod side cylinder port F Q H effective thread depth C P (Rc, NPT, G) V Head side cylinder port I D M E Z T N Dust cover (Manual unlocking unit) 4