Air/Manually Operated High Purity Chemical Valve Series LV

Table symbols : Can be used : Depends on conditions X: Cannot be used Compatibility is indicated for fluid temperatures of 100C or less. Consult P/A regarding fluids other than the above. Consult P/A regarding operating conditions. 1.12-6

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

(-4 to 212F) Ambient temperature Note 1) 10 to 60 (14 to 140F) (with no freezing) 10 to 100C (14 to 212F) Fluid temperature Splash-proof (equivalent to IP65) Enclosure Location without corrosive or explosive gases Environment 0 (with oil pressure) Valve leakage cm3/min Unrestricted Mounting position 24VDC, 12VDC, 100VAC, 110VAC, 200VAC, 220VAC, 230VAC (50/60Hz) 100VAC, 200VAC, 220VAC, 230VAC

High Purity Chemical Valve

/N.O. with same configuration/Double acting P Compatible with 100C fluid temperature LVD LVQ LQ1 Body material: Body material: Ne New PF PFA Ne New PF PFA New PFA LVN TL/TIL LQ3 Series LVC Air Operated Type Threaded Ports Series LVA P.471 P Diaphragm material PTFE, EPR, NBR are selectable Body material: Body material: Ne New PF PFA/ Ne New PF PFA/ New PFA/ Stainless steel/ PPS Stainless steel

212

Regulator for Chemical Liquids New New Compatible with acid, alkali and DI water Fluid temperature MAX.212F (100c) Set pressure range 2.9 to 58 psi (0.02 to 0.4 MPa) Material Body New PFA Diaphragm PTFE Housing/End plate PVDF No-slide diaphragm eliminates particle generation. Integral fittings type/ tube extensions type are available.

Lock-Up Valve IL201/211/220 Series

How to Order IL 02 201 Action Suffix 201 Single acting 211 Double acting 220 3 Port Accessories Nil Standard T High temperature (5 to 100C) L Low temperature (30 to 60C) S External parts copper-free Nil None B With bracket Thread type Port size ST External parts copper-free/ High temperature (5 to 100C) Nil Rc N NPT* 02 1/4 IP F G* SL External parts copper-free/ Low temperature (30 to 60C

Precision Regulator

Pressure gauge is shipped together, but not assembled. 811 IR1000/2000/3000 Series How to Order IR 2 0 0 02 0 Precision regulator Thread type Body size Nil N Note 2) Rc NPT Suffix 1 1 2 3 IR1000 series IR2000 series IR3000 series Nil G F For high temp. environments (5 to 100C) For low temp. environments (30 to 60C) T Note 4) Semi-standard Type of setting L Note 5), 6) 0 1 Note 1) Basic

XLAQ/XLDQ

Without auto switch (Without built-in magnet) Remarks Symbol Heater Temperature 16 D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Nil H0 H4 H5 5 to 60C None None With 100C heater With 120C heater Solid state auto switch 5 to 150C Reed auto switch (Not applicable to flange size 16) Note) Size 16 is not

Safety Instructions

TD1075 10 7.5 TD1209 12 9 4 2.5 H 10 m 20 m Roll KK Color Fluid Note 1) D Flexibility: Improved by approx. 20% * SMC comparison (Fluoropolymer tubing, Series TL/TIL) Insert fitting Miniature fittings M, MS series (Hose nipple type) Fluoropolymer fitting LQ1 series MS Applicable fittings Note 2) Applications: Food, semiconductor, medical, automobile and machine tools fields LQ 20C 100C

Size: 32, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: B (Size 16: 5mm, Size 25: 6mm, Size 32/40: 8mm), Stroke: 100mm, Motor Option: C (w/Motor Cover), Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: S (Standard Cable), Actuator Cable Length: 3 (3m), Controller Type - LEC, JXC: C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type), I/O

Size: 32, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: B (Size 16: 5mm, Size 25: 6mm, Size 32/40: 8mm), Stroke: 100mm, Motor Option: C (w/Motor Cover), Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: R (Robotic Flexible Cable), Actuator Cable Length: 5 (5m), Controller Type - LEC, JXC: 6N (LECA6, NPN, Step Data Input Type), I/O

Size: 32, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: B (Size 16: 5mm, Size 25: 6mm, Size 32/40: 8mm), Stroke: 100mm, Motor Option: C (w/Motor Cover), Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: R (Robotic Flexible Cable), Actuator Cable Length: B (15m), Controller Type - LEC, JXC: C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type

Size: 32, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 5mm, Size 25: 6mm, Size 32/40: 8mm, Stroke: 100mm, Motor Option: w/Motor Cover, Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: Robotic Flexible Cable, Actuator Cable Length: 5m, Controller Type - LEC, JXC: LECA6, NPN, Step Data Input Type, I/O Cable Length for LEC

Size: 32, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 5mm, Size 25: 6mm, Size 32/40: 8mm, Stroke: 100mm, Motor Option: w/Motor Cover, Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: Robotic Flexible Cable, Actuator Cable Length: 15m, Controller Type - LEC, JXC: JXC91, EtherNet/IPâ„¢ Direct Input Type, I/O Cable Length

Size: 32, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 5mm, Size 25: 6mm, Size 32/40: 8mm, Stroke: 100mm, Motor Option: w/Motor Cover, Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: Standard Cable, Actuator Cable Length: 3m, Controller Type - LEC, JXC: JXC91, EtherNet/IPâ„¢ Direct Input Type, I/O Cable Length for LEC:

MHK2

Finger material Dust cover material DFinger material Action 20Action The packing class has been revised to adopt thermal proof materials for use at high temperature of up to 100C. Possible to select the auto switch mounting side.

180

MHF Symbol Specifications/Description Heat resistance (100C) Fluororubber seal Without magnet EPDM for seals, Fluorine grease Fluorine grease MHL -X4 -X5 -X50 -X53 -X63 -X79 -X79A -X81A Refer to How to Select the Applicable Model on page 700. Refer to pages 700 and 701 for the details on effective holding force and allowable overhanging distance.

Table of Contents

Controller Specifications LC7R-K11A LC7R-K12A Model Regeneration method Heat exchange method based on resistance Regenerative resistance capacity 40W Regenerative operation voltage 180V 380V Regenerative absorption unit Regenerative voltage input mis-wiring protection Over current protection, Overheating protection (Normally closed, Radiator sensor OFF at 100C) Protective circuit To PLC,

Dedicated Controller

Controller Specifications LC7R-K11A LC7R-K12A Model Regeneration method Heat exchange method based on resistance Regenerative resistance capacity 40W Regenerative operation voltage 180V 380V Regenerative absorption unit Regenerative voltage input mis-wiring protection Over current protection, Overheating protection (Normally closed, Radiator sensor OFF at 100C) Protective circuit To PLC,

Electric Actuator with Integrated Guide

Controller Specifications LC7R-K11A LC7R-K12A Model Regeneration method Heat exchange method based on resistance Regenerative resistance capacity 40W Regenerative operation voltage 180V 380V Regenerative absorption unit Regenerative voltage input mis-wiring protection Over current protection, Overheating protection (Normally closed, Radiator sensor OFF at 100C) Protective circuit To PLC,

MHK2

Finger material Dust cover material DFinger material Action 20Action The packing class has been revised to adopt thermal proof materials for use at high temperature of up to 100C. Possible to select the auto switch mounting side.