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For ordering information, refer to the option part numbers on page 82. 74 78 Controller Series LC1 Performance/Specifications General specifications Model LC1-1H1 LC1-1H2 Item 100/110V AC 10%, 50/60Hz (100V AC, 50/60Hz for LC1-1HV1) 200/220V AC 10%, 50/60Hz (200V AC 10% for LC1-1H32) (200V AC, 50/60Hz for LC1-1HV2) Power supply Leakage current 5mA or less Dimensions 80 x 120 x 244mm Weight

209 268 483 Stainless steel High Vacuum Angle/In-line Valve Double Acting/Bellows Seal XMC, XYC Series How to Order Angle type M9N A A 16 50 M9N XMC XMC Flange size 16, 25, 40 M9N A 25 1 Flange size 50, 63, 80 XYC XYC Flange size 25, 40 Flange size 50, 63, 80 In-line type A 1 50 M9N Note) The XMC and XYC series with solenoid valve are also available.

Flange size XMH Symbol Nil C XMH V V V V XYH V V V Type KF (NW) CF Applicable flange size 16, 25, 40, 50 16 (034), 40 (070) Size 16 25 40 50 XYH Nil KF (NW) 25, 40, 50 3.

S1 S2 Effective area ratio 2.3 : 1 Pressure loss: Large K M 3 Without nozzle 3 H Pressure Loss of Air Gun Only Effective area (mm2) Upstream side S1: 15 Nozzle side S2: 6.4 D S1 : S2 = 2.3 : 1 Effective area ratio Nozzle size (mm) Number of nozzles Supply pressure Regulator pressure Outlet pressure Pressure loss 3 MS Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco,

Detection nozzle: 1.0 Detection side piping: 6 x 4 tubing Detection nozzle: 1.5 Detection side piping: 6 x 4 tubing Detection nozzle: 2.0 Detection side piping: 6 x 4 tubing 70 70 70 60 60 60 Supply pressure Supply pressure Not detectable 50 50 50 0.1MPa Hysteresis (m) Hysteresis (m) Hysteresis (m) 0.1MPa 40 40 40 Supply pressure 30 30 30 0.1MPa 20 20 20 0.15MPa 0.15MPa 0.15MPa 10 10 10 0.2MPa

/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Note 1) The code is L for elbow piping for all manifold stations.

For ordering information, refer to the option part numbers on page 82. 74 3 Controller Series LC1 Performance/Specifications General specifications Model LC1-1H1 LC1-1H2 Item 100/110V AC 10%, 50/60Hz (100V AC, 50/60Hz for LC1-1HV1) 200/220V AC 10%, 50/60Hz (200V AC 10% for LC1-1H32) (200V AC, 50/60Hz for LC1-1HV2) Power supply Leakage current 5mA or less Dimensions 80 x 120 x 244mm Weight

AL How to Order ALD600 ALD 20 B 9 00 S1 Float switch Style None ALD ALDU D.P. Lube (Single unit) D.P.

Lead wire length Nil 0.6 m 30 3 m Example) ZSE1-00-15CN-X129 ZS-20-5A-50 1 pc. 1 pc. 50 5 m 1086 Ejector Valve Unit Series ZYY/ZYX Internal Circuit and Wiring Example How to Set the Pressure How to Use the Connector 1. Attaching and detaching connectors ZSE1-14, -15 The ON pressure is set with the pressure setting trimmer. High vacuum settings are obtained by turning it clockwise.

The station address is set using the rotary switches S1 and S2. (1) Settings of the Rotary Switches S1 and S2 Set the station address using the rotary switches S1 and S2.

MA210-YNM3-R1 MA210-YNM3-R2 MA210-YNM3-R3 MA210-YNM3-R4 MA210-YNM3-R5 MA210-AM3 260 8 25 10 11 AHC unit 30 300 14 15 20 35 Tool adapter 100 742 AHC System Series MA2 Robot adapter MA210-C MA210-CS1 MA210-CR1, 2, 3, 4 MA210-CR5 50 50 50 AHC unit mounting hole 4 x 3.4 (PCD44.5) AHC unit mounting hole 4 x 3.4 (PCD44.5) AHC unit mounting hole 4 x 3.4 (PCD44.5) +0.022 0 10H8 11H8 +0.027 0

This reduces noise considerably compared with A much lower air consumption is required than the current model. the current model. 1: Conditions: Unseated for 5 seconds and seated for 20 seconds (For G type) Comparison of detection circuit ISA3 New New Current model (ISA2) A B EXH port EXH port P1 Sensor Sensor SUP port S1 S3 SUP port S2 Sensor S1 S4 S2 Detection port P2 Detection port C D

After improvement Before improvement Conventional coil tube model Filter regulator Conventional coupler model S coupler 1 2 1 2 Coil tube L L VMG Air gun Nozzle 2.5 Nozzle 3 S2 S0 to S1 S2 S0 to S1 Effective area ratio 3.04 : 1 Effective area ratio 0.69 : 1 Before improvement After improvement Coupler S coupler Conventional model Piping Equipment TCU1065-1-20-X6 Conventional coil tube model

(I.D. 5, equivalent length 5 m) Air gun VMG (Nozzle size 2.5) Conventional model (Nozzle size 3) Coupler, Piping (S0) 13.45 mm2 5.1 mm2 Effective area Air gun (S1) 30 mm2 6 mm2 Nozzle (S2) 4.4 mm2 6.3 mm2 0.69 : 1 3.04 : 1 Effective area ratio (S0 to S1: S2) Impact pressure 0.011 MPa (at a distance of 100 mm) 0.011 MPa (at a distance of 100 mm) Regulator pressure 0.4 MPa 0.5 MPa Pressure

/60Hz) 2* 200VAC (50/60Hz) 3* 110VAC (50/60Hz) 4* 220VAC (50/60Hz) 5 24VDC 6 12VDC 9* Others Courtesy of Steven Engineering, Inc. !

535 1 5 10 20 50 1 5 10 20 50 16-11-13 10 For details about certified products conforming to international standards, visit us at www.smcworld.com.

1 11 LEFS H Clean Series q 11 Vacuum type e Motor type q Accuracy r Lead [mm] t Stroke [mm] Symbol 11-LEFS25 11-LEFS32 11-LEFS40 A 12 16 20 B 6 8 10 50 50 to to 1000 1000 y Motor option Nil Basic type H High precision type Symbol Type Output [W] Actuator size Compatible driver S2* AC servo motor (Incremental encoder) 100 25 LECSA-S1 S3 200 32 LECSA-S3 S4 400 40 LECSA2-S4 * Refer to the applicable

[mm/s2] The value of 50% or less is the same as duty ratio 50% Duty ratio: 50% 15000 15000 Duty ratio: 50% Duty ratio: 25% 10 10 Duty ratio: 100% 5000 5000 Duty ratio: 100% Duty ratio: 75% Duty ratio: 75% 0 0 0 10 20 30 0 10 20 30 40 Work load [kg] Work load [kg] LEJS40B LEJS63B 20 20 Acceleration/Deceleration [mm/s2] Acceleration/Deceleration [mm/s2] The value of 50% or less is the same

/60Hz) 2* 200VAC (50/60Hz) 3* 110VAC (50/60Hz) 4* 220VAC (50/60Hz) 5 24VDC 6 12VDC 9* Others Courtesy of Steven Engineering, Inc. !

4000 [rad/s] PB32 VICB 50 [ms] PB26 CDP 0003 () PB27 CDL 50 [pulse] PB28 CDT 100 [ms] 7 19 7.