Vacuum System Peripherals:

.: MELSECNET MINI-S3 Data Link System B C4 C6 4 One-touch fitting 6 One-touch fitting Mixed M When creating the mixed specifications, complete the stations table on the right.

Series LECSB/LECSC/LECSS Absolute Type Series LECSA (Pulse Input Type/Positioning Type) Incremental Type AC Servo Motor Driver (Pulse Input Type) (CC-Link Direct Input Type) (SSCNET III Type)

Type) (CC-Link Direct Input Type) (SSCNET III Type) How to Order LECS 1 A S1 Driver Driver type Pulse input type/Positioning type (For incremental encoder) A LECSA LECSB LECSC LECSS Pulse input type (For absolute encoder) B Compatible motor type CC-Link direct input type (For absolute encoder) Encoder Capacity 100 W 200 W 400 W 100 W 200 W 400 W Type AC servo motor (S2) AC servo motor (S3

Electric Actuator/High Rigidity Slider Type Ball Screw Drive Series LEJS AC Servo Motor ( 100/200 W )

Electric Actuator/High Rigidity Slider Type Ball Screw Drive Series LEJS AC Servo Motor (100/200 W) RoHS How to Order LEJS 40 500 A S2 Motor type 1 Size Lead [mm] 40 63 A B LEJS40 16 8 LEJS63 20 10 Symbol Symbol Type Actuator size Output [W] AC servo motor (Incremental encoder) AC servo motor (Incremental encoder) Compatible drivers 2 S2 LECSA;-S1 100 40 Stroke [mm] 3 S3 LECSA;-S3 200

ITV

Communication connector Power supply connector PROFIBUS DP S1 S2 S3 S4 Preset pressure OFF OFF OFF OFF P01 ON OFF ON ON P14 ON OFF OFF OFF P02 OFF ON ON ON P15 OFF ON OFF OFF P03 ON ON ON ON P16 ON ON OFF OFF P04 OFF OFF ON OFF P05 1 4 4 5 2 2 3 3 1 For safety reasons, it is recommended that one of the preset pressures be set to 0 MPa.

4/5 Port Solenoid Valve

Type S3: Side ported (Lead wire length) 91.7[96.1] Approx. 300 10-SS5YJ3-S31Stations -M3 L1 3.5 L2 2-3.5 (For mounting) Manual override M5 x 0.8 (P, R port) 5.2 29.2 7.5 17.3 30 52.2[54.4] 51.4[53.6] 3 91.7[96.1] 78.8[83.2] 78.8[83.2] A A A A A 13.5 B B B B B P R P R P R 29.2 P R 30 17.3 25 7.5 12 25 51.4[53.6] 52.2[54.4] 13.5 B B B B B A A A A A 3 5.2 2-3.5 (For mounting) Manual override

Driver: A (Pulse Input Type for Incremental Encoder), Power Supply Voltage: 2 (200 to 230 VAC, 50/60 Hz), Motor: S3 [AC Servo Motor (S3), 200W, Incremental Encoder]

Driver: A (Pulse Input Type for Incremental Encoder), Power Supply Voltage: 1 (100 to 120VAC, 50/60 Hz), Motor: S3 [AC Servo Motor (S3), 200W, Incremental Encoder]

LEC-OM07605CN

STO 13.3.3 3.2.2 ISO/EN ISO 13849-1 3 PL d 24 V EMG S4 S3 KM1 S2 KM1 K3 +24 V XS0 XS1 Z00 Z10 Z20 KM1 MELSEC (QS90SR2S) KM1 X0 COM0 24G X1 COM1 Z01 Z11 Z21 CN8 STO1 S1 EMG () STO2 STOCO M K3 TOFB1 TOFCOM 0 V TOFB2 20 S1STO (STO ) S2(STO ) S3ON S4OFF KM1 K3 EMG CN3 EM1 EM2 M . STOS1EMG0 STO[AL. 63 STO] 13.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

M There are currently 3 versions available: version 1 products (V1.m or S1.m), version 2 products (V2.m or S2.m), and version 3 products (V3.m or S3.m). Keep in mind that in order to write a backup file (.bkp) to another controller with the JXC-BCW, it needs to be the same version as the controller that created the file.

Battery-less

M There are currently 3 versions available: version 1 products (V1.m or S1.m), version 2 products (V2.m or S2.m), and version 3 products (V3.m or S3.m). Keep in mind that in order to write a backup file (.bkp) to another controller with the JXC-BCW, it needs to be the same version as the controller that created the file.

Accuracy: Basic Type, Size: 25, Motor Mounting Position: L (Left Side Parallel), Motor Type: NZ (Mounting Type Z), Lead Screw: B [LEY25, 6mm; LEY32, 8mm, (10); LEY63, 10mm], Stroke: 50mm, Dust/Drip Proof: Size 25, 32: w/o Enclosure; Size 63: IP5x, Dust Proof Specification, Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut Included), Mounting: D (Double Clevis)

Size: 25, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm), Stroke: 50mm, Motor Option: None, Rod End Thread: M (Male), Mounting: D (Double Clevis)

Size: 32, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm), Stroke: 50mm, Motor Option: None, Rod End Thread: M (Male), Mounting: D (Double Clevis)

Size: 40, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: C (Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm), Stroke: 50mm, Motor Option: None, Rod End Thread: M (Male), Mounting: D (Double Clevis)

Size: 16, Motor Mounting Position: R (Right), Motor: Step Motor (Servo 24 VDC), Lead Screw: C (Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm), Stroke: 50mm, Motor Option: None, Rod End Thread: M (Male), Mounting: D (Double Clevis)

Size: 32, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: B (Size 16: 5mm, Size 25: 6mm, Size 32/40: 8mm), Stroke: 50mm, Motor Option: None, Rod End Thread: M (Male), Mounting: D (Double Clevis)

Size: 25, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: C (Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm), Stroke: 50mm, Motor Option: None, Rod End Thread: M (Male), Mounting: D (Double Clevis)

Size: 32, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: C (Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm), Stroke: 50mm, Motor Option: None, Rod End Thread: M (Male), Mounting: D (Double Clevis)

Size: 16, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm), Stroke: 50mm, Motor Option: None, Rod End Thread: M (Male), Mounting: D (Double Clevis)

Size: 16, Motor Mounting Position: Top, Motor: A [Servo Motor (24 VDC)], Lead Screw: C (Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm), Stroke: 50mm, Motor Option: None, Rod End Thread: M (Male), Mounting: D (Double Clevis)