20

After improvement Before improvement Filter regulator Conventional coupler model S coupler 1 2 1 2 Conventional coil tube model Coil tube L L VMG Air gun Nozzle 2.5 Nozzle 3 S2 S0 to S1 S2 S0 to S1 Effective area ratio 3.04 : 1 Effective area ratio 0.69 : 1 Before improvement After improvement Coupler S coupler Conventional model Piping Equipment TCU1065-1-20-X6 Conventional coil tube model

Ejector Valve Unit Series ZYY/ZYX

Y 3 X 3 ZZY 45 J 1 U Note 1) With ejector Number of ejectors 1 to 10 Enter the following together with the manifold number: 1. Part no. of solenoid for SY3000/SX3000 2. Part no. of ejector valve for ZYY3000/ZYX3000.

Series VQ1000 Body Ported Plug-in Unit: Flip Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

Note 1) 01 1 station Note 2) The number of max. stations differs from kit to kit. (Refer to the table below.)

CATALOG

16 3/8 3/8 3/4 5/8 1.57 1 1/2 3 3/4 1 1/4 1 3/8-24 325 (3.25) 1 1/8 3.9 1/2 0 7 1/2 1 1 1/4 1.18 2.34 4 1/4 1 3/8 3/4 5/8 2.72 8 1/4 3/4-16 3/4 7/8 1/2 5/8 1.57 1 1/8 1 1/2 3/8-24 4 1/2 1 1/4 1 400 (4) 4.7 1/2 0 7 1/2 1 1 1/4 1.18 2.34 4 1/4 1 3/8 3/4 5/8 2.72 8 1/4 3/4-16 3/4 7/8 1/2 5/8 Courtesy of Steven Engineering, Inc. !

Table of Contents

Pressure units conversion (Approximation) 17 Unit Pa (N/m2) kPa MPa bar kgf/cm2 atm mmH2O or mmAq mmHg or Torr PSI 1 x 103 1 x 106 1 x 105 1.0197 x 105 9.8692 x 106 1.0197 x 101 7.5006 x 103 1.4503 x 104 1 1.4503 x 101 1 x 103 1 x 103 1 x 102 1.0197 x 102 9.8692 x 103 1.0197 x 102 1 7.5006 1 x 106 1 x 103 1.0197 x 105 7.5006 x 103 1.4503 x 102 1 1 x 10 1.0197 x 10 9.8692 1 x 105 1 x 102 1

LEC-OM07605CN

1) (1) (1) 46.2 2 SD (1) (1) (1) 46 46.3 SD (1) (1) (1) (1) 46.5 3 DB (1) (1) (1) 46.6 4 DB (1) (1) (1) 47 47.1 SD 47.2 SD 50.1 1 SD (1) (1) (1) 50.2 2 SD (1) (1) (1) 50.3 4 SD (1) (1) (1) 50 1(1) 50.4 1 SD (1) (1) (1) 50.5 2 SD (1) (1) (1) 50.6 4 SD (1) (1) (1) 51.1 3 DB (1) (1) (1) 51 2(1) 51.2 3 DB (1) (1) (1) 8 4 8.

V

4 VXD2130-02 10 1.9 34 0.5 0.4 0.9 0.7 0.02 0.7 0.5 3/8 VXD2130-03 10 2.4 43 0.5 0.4 0.9 0.7 0.02 1 1 3/8 VXD2140-03 15 4.5 80 1.5 0.7 0.7 1 1 0.02 0.02 0.5 1/2 VXD2130-04 10 2.4 43 0.5 0.4 0.9 0.7 0.02 1 1 1/2 VXD2140-04 15 5.5 100 0.7 0.7 1 1 0.02 1 1 3/4 VXD2150-06 20 9.5 170 0.7 0.7 1 1 T E C H N I C A L SPECIFICATIONS E N E R G I Z E D C L O S E D T Y P E S E R I E S VXD 1MPa = 145PSI

15

1 1 1 1 1 1 1 1 Description Quantity Motor type NZ NY NX NM1 NM2 Motor side hub 1 1 1 1 1 Hexagon socket head cap screw/set screw (for hub fixing)* 1 1 1 1 1 1 1 1 1 Ring spacer 1 1 1 1 Hexagon socket head cap screw/set screw (for hub fixing)* 1 1 1 1 1 Hexagon socket head cap screw (for motor flange fixing)* 2 2 Ring spacer 1 1 * For screw sizes, refer to the hub mounting dimensions

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

6 e u @4 @0 @1 @2 w !4 !2 !0!1 !3 !

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1]I!

SMC Electronic Switch Series Variations

102 1.0197 X 102 9.8692 X 103 1.0197 X 102 1 7.5006 1 X 106 1 X 103 1.0197 X 105 7.5006 X 103 1.4503 X 102 1 1 X 10 1.0197 X 10 9.8692 1 X 105 1 X 102 1 X 101 9.8692 X 101 1.0197 X 104 7.5006 X 102 1 1.0197 1.4503 X 10 9.8067 X 104 9.8067 X 102 9.8067 X 101 9.6784 X 101 1 X 104 7.3556 X 102 1 1.4217 X 10 9.8067 X 10 1.0133 X 105 1.0133 X 102 1.0133 X 101 1.0332 X 104 7.6000 X 102 1.0332 1.4706

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2 l o 1 0 0 DualsLroke, dual rod 1 2 b 1 m DLralstroke s ngle rod 12 to 100 NPI Porr (1) 32 10 160 32 lo 100 Wilh lrcnr gulde boss (1) 12 to lO0 20 to 10O lnch-sizewrcnch flab 12 to 100 (1) Not avallab e on NCO2 seres.

Slider Type Ball Screw Drive/11-LEFS Series

How to Order 11 LEFS 16 100 B 1 1 S 6N H w e r t u y i o !0 !1 !

Dedicated Controller Series LC1 Uniaxial Type

LC1-1-S1 (PC-98 (MS-DOS) edition LC1-1-W1 (Windows 95 edition) and LC1-1-R (dedicated communication cable) Power supply 1 2 Note 2) 100/110VAC 50/60Hz 200/220VAC 50/60Hz or LC1-1-T1(Teaching box) are required. For ordering information, refer to the option part numbers on page 62.

ITVH

Self-diagnosis: 5% F.S. or less Linearity 1% F.S. or less Hysteresis 1% F.S. or less Repeatability 1% F.S. or less Sensitivity 1% F.S. or less Temperature characteristics 0.12% F.S. or less/C Output pressure display Accuracy 2% F.S. or less 1 digit 2 Output pressure [MPa] This range is outside of the control (output). 0.2 MPa Minimum unit Note 4) MPa: 0.01, kgf/cm2: 0.1, bar: 0.1, psi: 1

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

Environment Clean Room Specification ISO Class 4*1 (ISO14644-1) Built-in vacuum piping Possible to mount the main body without removing the external cover etc. Body-integrated linear guide specification *1 Changes depending on the suction flow rate.

1 D. P. Lube (Unit) Series ALD(U)600/900 F.R.L. Standard Specifications  Centralized control of multi-point (1) D.P . Lube D.P . Lube Unit Model name lubrication AV ALDU600 ALDU900 ALD900 ALD600 Model  Low oil consumption volume 1 1 1 4 1 4 3 4

Description Model ALDU900 ALD900 ALDU600 ALD600 G 126044P 113449(1) 113543(2) 126130P 126044P 126130P Bracket PPA 12661P 12651-1P Panel AL IS430-1 IS430-2 IS420-1 IS420-2 IS430-1 IS430-2 IS420-1 IS420-2 Float switch S1 ALD600 S2 } 1 4 1 2 Note1) Bracket for filter mounting: For Rc 1 ,1 Note2) Bracket for filter mounting: For Rc 2 Thread machining on filter body is needed.

D. P. Lube (Unit) Series ALD(U)600/900

Description Model ALDU900 ALD900 ALDU600 ALD600 G 126044P 113449(1) 113543(2) 126130P 126044P 126130P Bracket PPA 12661P 12651-1P Panel AL IS430-1 IS430-2 IS420-1 IS420-2 IS430-1 IS430-2 IS420-1 IS420-2 Float switch S1 ALD600 S2 } 1 4 1 2 Note1) Bracket for filter mounting: For Rc 1 ,1 Note2) Bracket for filter mounting: For Rc 2 Thread machining on filter body is needed.

LEJ-OM004xx

The vacuum aspiration fluence shows the fluence immediately before piping in the actuator. 5 - 3.How to Order 11LEJS 40 A 500 S2 1 10 9 8 7 4 5 3 2 6 *1 (2) Motor type (3) Lead [mm] (1) Size 40 LEJS40 LEJS63 Output [W] Actuator size Compatible controller Type 63 16 A 20 AC servo motor (incremental encoder) S2 10 8 B LECSA-S1 40 100 (5) Motor option AC servo motor (incremental encoder) S3

Solid State Vacuum Regulator

input type Power supply Input signal GND (COMMON) Monitor output 1 2 3 4 1 2 3 4 Power supply Input signal 1 GND (COMMON) Input signal 2 Brown Brown Brown White White Blue Blue Blue S1 White Vs Black Black Black S2 Note) A right angle type cable is also available.