Large Size Vacuum Module: Series ZR

X, Y, Z directions, for 2 hours each 2% F.S.

4/5 Port Air Operated Valve Series SYJA3000 1

2 position single 2 1 1/8 With sub-plate 01 F N T JIS Symbol Body ported 3 position closed center 3 position exhaust center 5 3 position pressure center 2 position single 2 position double (B) 2 (A) 4 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 3 position closed center 3 position exhaust center (A) 4 (A) 4 (B) 2 (B) 2 How to Order Manifold Base 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

1021-VQ2400 1021-VQ2301 1021-VQ2401 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r 1021-VQ2500 1021-VQ2501 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Component Parts Component Parts No.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

1021-VQ2400 1021-VQ2301 1021-VQ2401 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r 1021-VQ2500 1021-VQ2501 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Component Parts Component Parts No.

7.4

S07B5 4(A) 2(B) 5(R1) 3(R2) 1(P) 5 (R1) 4 (A) 1 (P) 2 (B) 3 (R2) y t N.O. + N.O. Component Parts S07C5 2(B) No.

SYJA3000

R1 R2 P 11.5 12 18 22 22 27.2 (R1, R2 port) 2-Rc(PT)1/4 63 5-Rc(PT)1/8 (Piping port) 3.1-21

Refrigerated Air Dryers

x Eye bolt I.D. 25 670 (143) 1120 335 (50) 267 460 51 Facility water outlet R1/2 Ball valve 1276 1375 Facility water outlet R1/2 (When symbol 4 is specified.)

5 Port Solenoid Valve Series SV1000/2000/3000/4000

Note 4) Not applicable for dual 3-port valves 2-position double (Rubber) 2(B) (A)4 1 (P) (R1)5 3(R2) C: Locking type (Manual) 3-position closed center 2(B) (A)4 3 1 (P) (R1)5 3(R2) 3-position exhaust center r Coil voltage 2(B) (A)4 D: Slide locking type (Manual) 24 VDC 5 4 1 (P) (R1)5 3(R2) t Light/surge voltage suppressor 3-position pressure center 2(B) (A)4 Y es Nil 5 1 (P) (R1)5 3(R2)

One-touch Fittings

/8 02 R1/4 03 R3/8 04 R1/2 Applicable tubing O.D.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

IO-Link compatible/ L type 100 kPa 100 kPa 100 kPa IO-Link compatible/ L type 0 0 0 0 100 kPa 101 kPa 100 kPa 100 kPa 100 kPa 101 kPa 100 kPa 100 kPa 100 kPa 500 kPa 500 kPa 1.5 MPa 500 kPa 500 kPa 2 MPa 4 MPa 2 outputs (NPN/PNP)/IO-Link4 2 outputs (NPN/PNP) Analog (Voltage/Current)5 Analog (Voltage/Current) IP65 IP65 M5 female thread, R1/8, NPT1/8 R1/41, NPT1/41, G1/41, Rc1/8, URJ1/42,

Table of Contents

Series KKA Series KKA P.15-2-89 to 15-2-95 Stainless steel type Male thread type Port size Series KKA3 KKA4 KKA6 R1/8 R1/4 R3/8 R1/2 R3/4 Female thread type Port size Series KKA3 KKA4 KKA6 Rc1/8 Rc1/4 Rc3/8 Rc1/2 Rc3/4 Series KK13 15-2-74 3 Series KK S Couplers M5 size (Series KK2) is newly added.

KJ

Series KKA Series KKA P.15-2-89 to 15-2-95 Stainless steel type Male thread type Port size Series KKA3 KKA4 KKA6 R1/8 R1/4 R3/8 R1/2 R3/4 Female thread type Port size Series KKA3 KKA4 KKA6 Rc1/8 Rc1/4 Rc3/8 Rc1/2 Rc3/4 Series KK13 15-2-74 3 Series KK S Couplers M5 size (Series KK2) is newly added.

VQ4000

push style 4 1 (P) 5 (R1) 3 (R2) 5 (R1) 3 (R2) 1 (P) VP4 2 2 position double 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 5 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ 3 position double check (A) 4 (B) 2 6Note) VQ4 Light and surge voltage suppressor 1 (P) 5 (R1) 3 (R2) E With W/o light/With surge suppressor VQZ Note) Refer to p.1.11-36 for double check style.

Micro Mechanical Valve Series VM1000

VZM400 5 port (A) (B) 2 4 Metal spool 12 3 1 5 14 Best Pneumaticsz-2 (EB) (P) (EA) Side ported 1/8 VZM500 5 port (A) (B) 2 4 Rubber spool 12 3 1 5 14 (R2) (P) (R1) VFM200 5 port (A) (B) 2 4 Metal spool 12 3 1 5 14 (EB) (P) (EA) Side ported 1/4 VFM300 5 port (C2) (C1) 2 4 Rubber spool 12 3 1 5 14 (E1) (S) (E2) Front matter 2 2/3 Port Mechanical Valve Series VM100 RoHS Compact size Piping

Fieldbus System

Note 4) Not applicable for dual 3-port valves 2-position double (Rubber) 2(B) (A)4 1 (P) (R1)5 3(R2) C: Locking type (Manual) 3-position closed center 2(B) (A)4 3 1 (P) (R1)5 3(R2) 3-position exhaust center r Coil voltage 2(B) (A)4 D: Slide locking type (Manual) 24 VDC 5 4 1 (P) (R1)5 3(R2) t Light/surge voltage suppressor 3-position pressure center 2(B) (A)4 Y es Nil 5 1 (P) (R1)5 3(R2)

High-Precision Digital Pressure Switch

pressure 1.5 MPa 100 kPa Withstand pressure 4 MPa 2 MPa 2 outputs (NPN/PNP) 2 outputs (NPN/PNP) Analog (Voltage/Current) Analog (Voltage/Current) IP65 IP65 M5 female thread, R1/8, NPT1/8 R1/4*1, NPT1/4*1, G1/4*1, Rc1/8, URJ1/4*2, TSJ1/4*3 Copy function, Auto-shift function Copy function, Auto-shift function *1 M5 female threaded *2 Face seal fitting *3 Compression fitting 3-Screen Display

ZR

Rc 1/8 P port (Air supply port) 2 2 1 Ejector Bracket B Bracket B Note) 1 Dimensions for mounting bracket B 2 2 2 Dimensions for mounting spacer B Spacer B is used to leave space for maintenance (for replacement of silencer etc.) on side mounting.

VQC

Model A side B side JIS Symbol 4 (A) 2 (B) VQC1A01 VQC2A01 N.C. valve N.C. valve 5 (R1) 3 (R2) 1 (P) 4 (A) 2 (B) VQC1B01 VQC2B01 N.O. valve N.O. valve Exhaust center : VQC1A01 VQC2A01 Pressure center: VQC1B01 VQC2B01 5 (R1) 3 (R2) 1 (P) 4 (A) 2 (B) VQC1C01 VQC2C01 N.C. valve N.O. valve 5 (R1) 3 (R2) 1 (P) R1 A P B R2 2-2-7 8 Base Mounted: Variations F Kit P Kit T Kit L Kit M Kit S Kit Sonic

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

Note 3) Value for quick response type Symbol 2 position single 3 position closed center 3 position exhaust center 3 position pressure center 2 position double (Double solenoid) 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) Manifold Specifications Piping specifications Note 4) 1 station weight (g)

VS7-6

Blank plate (Air filter, Regulator) Manifold blocks necessary for mounting 2 2 2 2 2 2 2 1 F.