Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 40, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm), Stroke: 700mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: S (Standard Cable), Actuator

Series: LEFB (Belt Drive), Size: 32, Motor: Step Motor (Servo 24 VDC), Lead: T, Stroke: 700mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: With, Positioning Pin Hole: Housing B (Bottom), Actuator Cable: S (Standard Cable), Actuator Cable Length: 1 (1.5m)

Series: Belt Drive, Size: 32, Motor: Step Motor (Servo 24 VDC), Lead: T, Stroke: 700mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: With, Positioning Pin Hole: Housing B (Bottom), Actuator Cable: Standard Cable, Actuator Cable Length: 1.5m, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Mounting: -, Communication Plug Connector or

Series: Ball Screw Drive, Accuracy: Basic Type, Size: 40, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm, Stroke: 700mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: Standard Cable, Actuator Cable Length

Series: Ball Screw Drive, Accuracy: Basic Type, Size: 25, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm, Stroke: 700mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: Standard Cable, Actuator Cable Length:

High Vacuum Angle Valve

Temperature N1 P1 Q1 R1 R2 R3 S1 T1 U1 Main valve: Indicator/ Pilot port direction Symbol Nil Without indicator Kalrez Number of auto switches/Mounting position Symbol Nil Without auto switch 2 pcs. 1 pc. 1 pc.

Aluminum High Vacuum Angle Valve

Q1 R1 R2 R3 S1 T1 Kalrez 4079 SS592 SS630 SSE38 1232-70 3310-75 Chemraz Example) XLH-16-XAN1A VMQ FKM for Plasma ULTIC ARMOR U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd.

Vacuum Module Series ZX

E D P F Nil Model ZX1 K1 Vacuum switch (E) (D) Adsorption confirmation switch (P) Vacuum switch (ZSE2) ZX1-K1-E (Release to atmospheric pressure) Spacer 1 (ZX1-S1) (For side mounting) Pressure sensor 78 Rc 1/8 EXH port (EXH.)

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

CDRBU2W10, 15-S CDRBU2W20, 30-S CRB2 CRBU2 CRB1 2 x S2 2 x S1 2 x S1 MSU 2 x S2 CRJ Rotary actuator CRA1 CRQ2 2 x S1 2 x S1 2 x S1 2 x S1 Rotary actuator MSQ (34.5: Connector type) MSZ A port B port CRQ2X MSQX 2 x R A port B port 2 x R MRQ 1 Auto switch Auto switch 2 5 20.5 (26.5: Connector type) 1.

Bearing Type: Ball Bushing Bearing, Stroke: 700mm, Motor Option: None, Actuator Cable Type: Standard Cable, Actuator Cable Length, m: 5, Controller Type: LECP6, Step Data Input Type, NPN, I/O Cable Length, m: 5, Communication Plug Connector: None, Controller Mounting: Screw Mounting, Made to Order: Magnet/Switch Rail

Step Motor Controller

A Controller type Motor type Power supply voltage Symbol Type AC servo motor (S2) Capacity Encoder LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSA2-S4 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 LECSB2-S8 AC servo motor (S2) 100 to 120 VAC 50/60 Hz S1 S3 S4 S5 S7 S8 100 W B Pulse input type (For absolute encoder) AC servo motor (S3) Pulse input type (For incremental encoder) Incremental AC servo

CRBU

Port locations: Axial direction CRBUWl-lSE (mm) A B C D E(g6) F(h9) G H J K L M N P Q1 (Depth) Q2 R S1 S2 T U V W X Model 10.5 8.5 10.5 11 11.5 14 12 15.5 10.5 9.5 10.5 10 11 13 13 14 CRBUW10-lS CRBUW10-lSE CRBUW15-lS CRBUW15-lSE CRBUW20-lS CRBUW20-lSE CRBUW30-lS CRBUW30-lSE M3 (4) M5 X 0.8 M3 X 0.5 M5 X 0.8 M3 X 0.5 4 -0.004 -0.012 9 0 -0.043 29 22 14 8 3 25 31 41 15.5 M3 X 0.5 5 24 3.5

PC Wiring System Series PCW

8 9 A B C D E F 1 4.1 + *S2 S1 DC24V MADE IN JAPAN 2 3 4 (48.5) (50) 133 10.5 10.5 5.1 4.5 5 5 Models Output unit can be used for mixed connection with PCW series.

Table of Contents

flow rate adjusting needle (PE port) Interface plate 63.5 18 4 15.5 2-3.3 Mounting hole M5 (or M6) (V port) Vacuum pad connection port M5 (or M6) (PV port) Air supply pressure port Bracket A (Standard accessory) Note) Dimensions : For mounting bracket A : For mounting spacer 1. 13-2-26 26 Vacuum Module: Ejector System Series ZX Adsorption confirmation switch (ZSP1) ZX1-K8-P Spacer 1: ZX1-S1

ZX

flow rate adjusting needle (PE port) Interface plate 63.5 18 4 15.5 2-3.3 Mounting hole M5 (or M6) (V port) Vacuum pad connection port M5 (or M6) (PV port) Air supply pressure port Bracket A (Standard accessory) Note) Dimensions : For mounting bracket A : For mounting spacer 1. 13-2-26 26 Vacuum Module: Ejector System Series ZX Adsorption confirmation switch (ZSP1) ZX1-K8-P Spacer 1: ZX1-S1

Series VQ Metal Seal/Rubber Seal Body Ported

Kit/Electrical entry/Cable length F P Kit (Dsub connector) Kit (Flat cable connector) Connector location Top (vertical) Side (horizontal) Connector location Top (vertical) Side (horizontal) P .1.10-40 P .1.10-36 Without cable Without cable S0 S1 S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 U0 U1 U2 U3 stations Max.16 (2) Max.16 (2) F kit P kit P kit F kit With cable (1.5m) With cable (3m) With cable (5m

Series VQ Base Mounted Metal Seal/Rubber Seal

Connector location Connector location P.1.10-124 P.1.10-128 P.1.10-132 Top (vertical) Side (honzontal) Top (vertical) Side (honzontal) Without cable With cable (1.5m) With cable (3m) With cable (5m) Without cable Without cable F F S0 S1 S2 S3 P P S0 S1 S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 U0 U1 U2 U3 U0 U1 U2 U3 0 1 2 3 (2) (2) (2) G 2 to 16 stations With cable (1.5m) With cable (3m) With cable

Programless Controller Series LECP1

A Controller type Motor type Power supply voltage Symbol Type AC servo motor (S2) Capacity Encoder LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSA2-S4 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 LECSB2-S8 AC servo motor (S2) 100 to 120 VAC 50/60 Hz S1 S3 S4 S5 S7 S8 100 W B Pulse input type (For absolute encoder) AC servo motor (S3) Pulse input type (For incremental encoder) Incremental AC servo

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A Controller type Motor type Power supply voltage Symbol Type AC servo motor (S2) Capacity Encoder LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSA2-S4 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 LECSB2-S8 AC servo motor (S2) 100 to 120 VAC 50/60 Hz S1 S3 S4 S5 S7 S8 100 W B Pulse input type (For absolute encoder) AC servo motor (S3) Pulse input type (For incremental encoder) Incremental AC servo

Step Motor Controller

A Controller type Motor type Power supply voltage Symbol Type AC servo motor (S2) Capacity Encoder LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSA2-S4 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 LECSB2-S8 AC servo motor (S2) 100 to 120 VAC 50/60 Hz S1 S3 S4 S5 S7 S8 100 W B Pulse input type (For absolute encoder) AC servo motor (S3) Pulse input type (For incremental encoder) Incremental AC servo