High Vacuum Angle Valve

Model XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 Rated voltage for heater 90 to 240 VAC Heater assembly quantity 1 1 1 1 H4 100C 100 V 200/40 200/50 400/100 600/150 Heater assembly quantity used Heater power W (Nominal value) Inrush/Power consumption (Option symbol, Operating voltage) 200 V 800/40 800/50 1600/100 2400/150 Heater assembly quantity 1 1 1 1 2 H5 120C 100 V 200/40 400/70 400/

CG5-S

A A1 L1 NX MM NDH10 R1 U1 A A1 L L1 NX MM NDH10 NZ R1 U1 +0.4 +0.2 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.058 0 +0.058 0 0.2 0.4 8 20 20 I-G02SUS Y-G02SUS 8 8 8 34 8.5 16 25 M8 x 1.25 10.3 11.5 34 8.5 16 21 25 M8 x 1.25 16 10.3 11.5 IY-G02SUS +0.4 +0.2 0.2 0.4 0.3 0.5 0.3 0.5 0.3 0.5 0.3 0.5 I-G03SUS Y-G03SUS 25, 32 25,32 10 10 10 10 41 10.5 20 30 M10 x 1.25 12.8 14 41 10.5

CG5-S

A A1 L1 NX MM NDH10 R1 U1 A A1 L L1 NX MM NDH10 NZ R1 U1 +0.4 +0.2 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.058 0 +0.058 0 0.2 0.4 8 I-G02SUS Y-G02SUS 20 20 8 8 8 34 8.5 16 25 M8 x 1.25 10.3 11.5 34 8.5 16 21 25 M8 x 1.25 16 10.3 11.5 IY-G02SUS +0.4 +0.2 0.2 0.4 0.3 0.5 0.3 0.5 0.3 0.5 0.3 0.5 I-G03SUS Y-G03SUS 25, 32 25,32 10 10 10 10 41 10.5 20 30 M10 x 1.25 12.8 14 41 10.5

Table of Contents

KB 1 H S Model With sealant (Male thread only) Standard specifications Female Connector Elbow Union: KBL Tube size/Connection thread size Body size T Connection thread Model KBL1-R1S KBL2-R1S KBL2-R2S R1 8 Male Connector Socket: KBB Female Connector Socket: KBS KBL2-R3S KBL3-R2S KBL3-R3S KBL3-R4S KBL4-R3S KBL4-R4S R1 2 R3 8 R1 2 R3 8 R1 4 R3 8 R1 4 Model T Connection thread KBB1-M5 KBB2-

VS7-6

Double pilot check spacer model Applicable solenoid valve/air operated valve VV71-FPG Series VS7-6/VSA7-6 P R1 R2 R1 R2 R1 R2 With one side solenoid energized. (With one side pilot air pressured) Both sides solenoids de-energized.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

VQZ 1 (P) 5 (R1) 3 (R2) Port plug mounting port VQD 3 position exhaust center (A) 4 (B) 2 Nil A B 4 None Port 4(A) 1 (P) 5 (R1) 3 (R2) Port 2(B) 3 position pressure center (A) 4 (B) 2 5 Cylinder port 1 (P) 5 (R1) 3 (R2) C3 C4 C6 M5 L3 L4 L6 L5 One-touch fitting for 3.2 4 position dual 3 port valve One-touch fitting for 4 (2) (A) 4 (B) 2 Side ported A One-touch fitting for 6 5 (R1) 3 (R2)

VZS

VVZS2000-22A-1 VVZS2000-22A-2 VFN G L M KZ D Cylinder side pressure (P2) Check valve Applicable valve model VZS2450-FZ VZS24504(A) 2(B) 3(R2) 5(R1) 3(R2) 5(R1) 3(R2) 5(R1) 100 Ncm3/ min or less Solenoid one side 1(P) de-energized Leakage (Supply pressure: 0.5 MPa 100 Ncm3/ min or less Solenoid both sides de-energized 1(P) Piston SUP side pressure (P1) SUP side pressure P1 (MPa) 0 Operating

Rubber seal 5 Port Solenoid Valve Series SYJ5000

(P) (B) 2 (A) 4 3 position exhaust center (A) 4 (B) 2 5 (R1) 3 (R2) 1 (P) 3 position pressure center (A) 4 (B) 2 i 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 (R2) 1 (P) (This figure shows a closed center type.)

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

P R2 R1 P R2 13 5 10 10 10 M5 x 0.8 (P, R1, R2 port) 17.5 14 28 L plug connector (L): SYJ3140-L-M5 M8 connector (W0): SYJ3140-W0-M5 M plug connector (M): SYJ3140-M-M5 Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 64.3 [66.5] 54.5 [56.7] 63.4 56 49.5 R1 P R2 R1 P R2 R1 P R2 10 10 10 10 10 10 28 28 28 14 14 14 5 5 5 28.5 28.5 28.5

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

P R2 R1 P R2 13 5 10 10 10 M5 x 0.8 (P, R1, R2 port) 17.5 14 28 L plug connector (L): SYJ3140-L-M5 M8 connector (WO): SYJ3140-WO-M5 M plug connector (M): SYJ3140-M-M5 Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 64.3 [66.5] 54.5 [56.7] 63.4 56 49.5 R1 P R2 R1 P R2 R1 P R2 10 10 10 10 10 10 28 28 28 14 14 14 5 5 5 28.5 28.5 28.5

Electric Actuator

30 to 500 Stroke 30 to 300 30 to 400 30 to 500 Stroke 30 to 200 30 to 300 30 to 300 Stroke 30 to 400 30 to 500 Stroke 30 to 400 30 to 500 Size 16 25 32 Size 16 25 32 Size 16 25 32 Size 25 32 Size 25 32 Stroke 30 to 200 30 to 300 30 to 300 Size 16 25 32 CAT.NAS100-83 Slider Type Step Motor (Servo/24 VDC) Servo Motor (24 VDC) AC Servo Motor (100/200/400 W) Ball Screw Drive Belt Drive Ball

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

L3 [mm] L3 [mm] L3 [mm] m 600 600 600 L3 Z 400 400 400 200 200 200 0 0 0 0 10 20 30 40 50 60 70 0 10 20 30 40 50 0 5 10 15 20 25 30 35 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 L4 [mm] L4 [mm] L4 [mm] 600 600 600 L4 X 400 400 400 200 200 200 0 0 0 0 10 20 30 40 50 0 10 20 30 40 50 60 70 0 5 10 15 20 25 30 35 Work load [kg] Work load [kg] Work load [kg] 1000

10

Bore size [mm] A A1 E1 L1 MM R1 U1 NDH10 NX Part no.

C95

, 500 40 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 50 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 63 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 80 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 100 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 Intermediate strokes are available.

MB

, 450, 500 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700

CM2

With Rod Boot Data l Z Symbol h B3 e f Stroke Bore size (mm) 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 20 36 17 30 68 81 93 106 131 156 181 12.5 25 37.5 50 75 100 125 160 173 185 198 223 248 273 25 36 17 32 72 85 97

Clean Exhaust Filter

/8 65 52 R1/8 130 53 R1/4 130 73 R1/4 200 Symbol Port size Max. flow capacity L/min (ANR) 3A 4 30 4B 6 65 5C 8 130 7D 10 200 Male thread type One-touch fitting type Symbol Applicable tubing O.D.

MNB

1000 1000 100 100 CLQ 500 400 300 500 400 300 80 80 63 63 100 100 MLGP 200 200 50 50 40 40 80 80 100 100 RLQ 63 63 50 50 Load weight: m (kg) Load weight: m (kg) 32 32 50 40 30 50 40 30 MLU 40 40 32 32 20 20 ML1C [Example] 10 10 D5 4 3 5 4 3 -X 2 2 201 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5

MNB

] 10 10 D5 4 3 5 4 3 -X 2 2 201 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 1000 1000 100 100 80 80 500 400 300 500 400 300 63 63 100 100 50 50 40 40 80 80 200 200 63 63 100 100 32 32 50 50 40 40 Load weight: m (kg) Load weight: m (kg) 50 40 30 50 40 30 32 32 20 20 10 10 5 4 3 5 4 3 2 2

Booster Regulator Series VBA1110 to 4200 1

Accessory (Option) /Part No. 0.2 to 1.0 MPa VEX Model VBA2200 Ambient and fluid temperature 2 to 50C (No freezing) VBA1110-1 VBA4100 VBA2100 VBA4200 Description AMR G27-20-R1 2 pcs. G46-10-01 2 pcs. G27-10-R1-X209 2 pcs. G27-10-R1-X209 2 pcs. G46-10-01 2 pcs.