NCQ2/CQ2

Series CQ2 Stroke S2 Stroke S1 B L 1 B2 A Bore Size: 12, 16 (mm) Symbol L Stroke range B A 1 B2 S1 S2 Bore size 52.9 (63.9) + Stroke (S1 + S2) 58 (70) + Stroke (S1 + S2) 17 (28) + Stroke S1 18.5 (30.5) + Stroke S1 32.4 + Stroke S2 36 + Stroke S2 12 3.5 5 to 30 35 to 50 16 3.5 5 to 30 35 to 50 Bore Size: 20, 25 (mm) A B1 B2 Symbol Stroke range Stroke S2 55 to 75 80 to 100 Stroke S2 L Stroke

LEC-OM069xx

Setting (byte) 1 to 65535 10 Pn80A 1st Linear Acceleration Constant 1 2 100 reference units/s2 1 to 65535 10 Pn80B 2nd Linear Acceleration Constant 1 2 100 reference units/s2 0 to 65535 100 reference Pn80C Acceleration Constant Switching Speed 1 2 0 units/s 1 to 65535 10 Pn80D 1st Linear Deceleration Constant 1 2 100 reference units/s2 1 to 65535 10 Pn80E 2nd Linear Deceleration Constant

Electric Actuator / Slider type 《 High performance Battery-less absolute encoder type 》

Weight Series Stroke[mm] 50 100 150 200 250 300 350 400 450 500 600 700 800 LEKFS25 Product weight[kg] 1.7 1.8 2.0 2.1 2.3 2.4 2.5 2.6 2.8 2.9 3.2 3.5 3.8 0.26 Additional weight with lock[kg] LEKFS32 Series Stroke[mm] 50 100 150 200 250 300 350 400 450 500 600 700 800 900 1000 Product weight[kg] 3.6 3.8 4.0 4.2 4.5 4.7 4.9 5.1 5.3 5.5 5.9 6.3 6.7 7.1 7.5 0.53 Additional weight with lock[kg

3 Port Solenoid Valve SYJ300/500/700 Series

SYJ300/500/700 Preferred Option Summary Option Light and surge voltage suppressor Series Type of actuation Voltages Electrical entry Manual override Manifolds L type plug connector SYJ300 Type 42 N.C. N.O.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Caution Locked position The 10-SYJ3000/5000/7000 and 10-SYJ300/500/700 series can be mounted on the same manifold.

Compact Cylinder

Series CQ2 Stroke S2 Stroke S1 L B1 B2 A Bore Size: 12, 16 (mm) Symbol L Stroke range A B1 B2 S1 S2 Bore size 52.9 (63.9) + Stroke (S1 + S2) 58 (70) + Stroke (S1 + S2) 17 (28) + Stroke S1 18.5 (30.5) + Stroke S1 32.4 + Stroke S2 36 + Stroke S2 12 3.5 5 to 30 35 to 50 16 3.5 5 to 30 35 to 50 Bore Size: 20, 25 (mm) A B1 B2 Symbol Stroke range Stroke S2 55 to 75 80 to 100 Stroke S2 L Stroke

Refrigerated Thermo-chiller

Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.) 170 UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95) Note 1) It should have no condensation.

LEF-OM007xx

700 800 800 900 900 1000 1000 Actuator cable type 11-LEFS16 11-LEFS16 Without cable Nil Without cable Nil 11-LEFS25 11-LEFS25 Robotic type cable R Robotic type cable R 11-LEFS32 11-LEFS32 Standard cable S* Standard cable S* 11-LEFS40 11-LEFS40 *Only Step motorcan be selected AC Servo motor 11-LEFS 25 B A1 100 2 S S2 ize I/O connector 25 25 None None Nil Nil 32 32 With connector

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

Series SYJ3000/5000/7000 and Series SYJ300/500/700 can be mounted on the same manifold. How to mount on the same manifold is shown on the following pages. PDisconnection To remove the socket from the connector, pull out lead wire while depressing the hook of the socket with a fine screw driver (or similar). If the socket is to be re-used, reposition the hook again.

IZx-OMP0064

Ordering example) 10 B X10 IZS 40 1660 X10 10 B IZS 42 1660 Type 41 42 Bar length 520 1000 1420 1780 2140 700 1060 1480 1840 2200 760 1180 1540 1960 2260 880 1240 1660 2020 2380 940 1360 1720 2080 2440 Symbol Contents Specifications The main unit is shipped fitted with a drop prevention cover available as an option -X14 Model with drop prevention cover 1-2.

Electric Actuator / Slider type 《 Battery-less absolute encoder type (Step motor 24VDC) 》

250 300 350 400 450 500 600 700 800 900 1000 Product weight[kg] 3.2 3.4 3.6 3.8 4.1 4.3 4.5 4.7 4.9 5.1 5.6 6 6.4 6.9 7.3 0.53 Additional weight with lock[kg] LEKFS40 Series Stroke[mm] 150 200 250 300 350 400 450 500 600 700 800 900 1000 1100 1200 Product weight[kg] 5.5 5.8 6.1 6.4 6.7 7 7.3 7.6 8.2 8.8 9.4 10 10.6 11.2 11.8 0.53 Additional weight with lock[kg] 5 - 1.3 Construction In-line

20

After improvement Before improvement Conventional coil tube model Filter regulator Conventional coupler model S coupler 1 2 1 2 Coil tube L L VMG Air gun Nozzle 2.5 Nozzle 3 S2 S0 to S1 S2 S0 to S1 Effective area ratio 3.04 : 1 Effective area ratio 0.69 : 1 Before improvement After improvement Coupler S coupler Conventional model Piping Equipment TCU1065-1-20-X6 Conventional coil tube model

20

(I.D. 5, equivalent length 5 m) Air gun VMG (Nozzle size 2.5) Conventional model (Nozzle size 3) Coupler, Piping (S0) 13.45 mm2 5.1 mm2 Effective area Air gun (S1) 30 mm2 6 mm2 Nozzle (S2) 4.4 mm2 6.3 mm2 0.69 : 1 3.04 : 1 Effective area ratio (S0 to S1: S2) Impact pressure 0.011 MPa (at a distance of 100 mm) 0.011 MPa (at a distance of 100 mm) Regulator pressure 0.4 MPa 0.5 MPa Pressure

E-MY2_E_D

0.49 to 4.90 m/s2 0.98 to 9.80 m/s2 1.96 to 19.6 m/s2 Nominal size:16 5kg 1.25kg 10kg 2.5kg Maximum load weight NOTE2) Nominal size:25 20kg 5kg 10kg 2.5kg Acceleration and deceleration method Trapezoidal drive Moving direction Horizontal direction Positioning points Both ends (mechanical stoppers), 1 intermediate position Both ends 0.01mm Repeated Positioning stopping precision Intermediate

E-MY2B_E_A

0.49 to 4.90 m/s2 0.98 to 9.80 m/s2 1.96 to 19.6 m/s2 Nominal size:16 4(5)kg 1.25(1.25)kg 6(10)kg 2.5(2.5)kg Maximum load weight NOTE 1) Nominal size:25 11(20)kg 4(5)kg 8(10)kg 2.5(2.5)kg Acceleration and deceleration method Trapezoidal drive Moving direction Horizontal direction Positioning points Both ends (mechanical stoppers), 1 intermediate position 0.01mm Both ends Repeated Positioning

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Weight [g] LE-CA-1 220 LE-CA-3 420 LE-CA-5 700 LE-CA-8 1100 LE-CA-A 1370 LE-CA-B 2050 LE-CA-C 2720 Connector B terminal no.

SX

actuation 600 500 400 300 200 100 0 SX3140-01 900 800 700 600 500 400 300 200 100 0 SX5140-02 900 800 700 600 500 400 300 200 100 0 SX7140-03 It is when the cylinder is extending that is meter-out controlled by speed controller which is directly connected with cylinder, and its needle valve with being fully open.

VQ7-6/7-8

Bore size Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm 50 63 80 100 125 140 160 180 200 250 300 Average speed (mm/s) Series 1000 1100 Perpendicular, upward actuation 900 Horizontal actuation 800 700 600 500 400 300 200 100 VK VQ7-8-FG-S-A03 VQ7-8-FG-S-RA03 VZ VF 0 1000 1100 VFR 900 800 700 600 500 400 300 200

5 Port Solenoid Valve Series VQZ1000/2000/3000

100 0 Perpendicular, upward actuation Horizontal actuation VQZ VQZ1151-01 SQ VFS 800 700 600 500 400 300 200 100 0 VFR VQZ2151-02 VQ7 900 800 700 600 500 400 300 200 100 0 VQZ3151-03 It is when the cylinder is extending that is meter-out controlled by speed controller which is directly connected with cylinder, and its needle valve with being fully open.

VQ7-6/7-8

Bore size Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm 50 63 80 100 125 140 160 180 200 250 300 Average speed (mm/s) Series 1000 1100 Perpendicular, upward actuation 900 Horizontal actuation 800 700 600 500 400 300 200 100 VK VQ7-8-FG-S-A03 VQ7-8-FG-S-RA03 VZ VF 0 1000 1100 VFR 900 800 700 600 500 400 300 200