Size: 07 (ODØ1/4" IDØ0.17"), Color: R2 (TR Red), Roll Length: 153 (500 ft)

Size: 13 (ODØ1/2", IDØ0.33"), Color: R2 (TR Red), Roll Length: 153 (500 ft)

Size: 05 (ODØ3/16" IDØ0.13"), Color: R2 (TR Red), Roll Length: 153 (500 ft)

Vacuum

Workpiece: Generic term for the object which is to be adsorbedVacuum Pressure Equivalents Chart Unit Conversion Table -14.7 760 29.9 -101.3 -13.5 700 27.6 -93.3 1 1 _ 6 600 23.6 -80.0 -9.7 500 19.7 -66.7 400 15.8 -53.3 -5.8 300 1 1 . 8 -40.0 -3.9 200 7.9 -26.7 100 3.9 .

Ø2.5), Color: R2 (TR Red), Roll Length: 153 (500 ft)

Ø4), Color: R2 (TR Red), Roll Length: 153 (500 ft)

Ø8), Color: R2 (TR Red), Roll Length: 153 (500 ft)

Ø5), Color: R2 (TR Red), Roll Length: 153 (500 ft)

Ø2.5), Color: R2 (TR Red), Roll Length: 500 m

Ø4), Color: R2 (TR Red), Roll Length: 500 m

Ø5), Color: R2 (TR Red), Roll Length: 500 m

Direct Solenoid

5.00 (120) 058) 069) (234) (n2) (310) (348) (36) (424) (462) (500) (538) (s76) {614) {652} 2 3 4.72 6.22 6.65 9_?1 10.71 12.20 13.70 15.19 16.69 1a.la 19,69 21.18 22.68 24,17 25.67 5 6 I 9 1 0 ExMol.: NVS 4llan509o (Siinglo $lnoid/$rlng rbm vals mounr< oi a meilord block) 1 2 't4 I . r I : l 1 6 TERMINAICLIP. A Bst: Axt 3!

Vacuum

Workpiece: Generic term for the object which is to be adsorbedVacuum Pressure Equivalents Chart Unit Conversion Table -14.7 760 29.9 -101.3 -13.5 700 27.6 -93.3 1 1 _ 6 600 23.6 -80.0 -9.7 500 19.7 -66.7 400 15.8 -53.3 -5.8 300 1 1 . 8 -40.0 -3.9 200 7.9 -26.7 100 3.9 .

Size: 63, Motor Type: S3 [AC Servo Motor (Incremental Encoder) 200W], Stroke: 500mm, Motor Option: None, Cable Type: S (Standard), Cable Length: 2m, Driver Type: A1 (LECSA1-S, 100~120V, Incremental, Pulse Input), I/O Connector: 1 (1.5m)

Size: 63, Motor Type: S3 [AC Servo Motor (Incremental Encoder) 200W], Stroke: 500mm, Motor Option: None, Cable Type: S (Standard), Cable Length: 5m, Driver Type: A1 (LECSA1-S, 100~120V, Incremental, Pulse Input), I/O Connector: 1 (1.5m)

Size: 63, Motor Type: S3 [AC Servo Motor (Incremental Encoder) 200W], Stroke: 500mm, Motor Option: None, Cable Type: Standard, Cable Length: 2m, Driver Type: LECSA1-S, 100~120V, Incremental, Pulse Input, I/O Connector: 1.5m

Size: 63, Motor Type: S3 [AC Servo Motor (Incremental Encoder) 200W], Stroke: 500mm, Motor Option: None, Cable Type: Standard, Cable Length: 5m, Driver Type: LECSA1-S, 100~120V, Incremental, Pulse Input, I/O Connector: 1.5m

SQ1000/2000

SQ1441 SQ1341 (A)(B) (A)(B) (A)(B) 2 4 (A)(B) (A)(B) 2 4 (A)(B) 4 2 4 2 4 2 4 2 5 1 3 (R1) (P)(R2) 5 1 3 (R1) (P)(R2) 5 1 3 5 1 3 (R1) (P)(R2) 5 1 3 5 1 3 (R1) (P)(R2) (R1) (P)(R2) (R1)(P)(R2) Parts list Dual 3 port valve: SQ1 41 A B C No.

Fluoropolymer Piping Equipment

LQ3E31-R1 LQ3E31-R2 LQ3E32-R1 LQ3E32-R2 LQ3E41-R1 LQ3E41-R2 LQ3E51-R1 LQ3E51-R2 LQ3E61-R1 LQ3E61-R2 LQ3E2A-R1 LQ3E3A-R1 LQ3E3A-R2 LQ3E4A-R1 LQ3E4A-R2 LQ3E5A-R1 LQ3E5A-R2 LQ3E5A-R3 LQ3E6A-R1 LQ3E6A-R2 6 x 4 3/8" x 1/4" 2 3 10 x 8 1/2" x 3/8" 4 3 8 x 6 3/4" x 5/8" 5 12 x 10 4 1" x 7/8" 6 19 x 16 5 Note) For details of the applicable tubing sizes, refer to page 945. 25 x 22 6 Note) For details

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

center 3 position closed center 3 position exhaust center 3 position exhaust center 3 position pressure center 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note 1) Except for VQZ1000 and metal seal Component Parts No