K35-OMW0030

300 mm 350 350 mm 450 450 mm 530 530 mm 15 (6) Rod boot Part number Bore size Stroke (mm) (mm) Silicone rubber material Nylon tarpaulin 125 200 C96A2G-1461V-R C96A2G-0294Y-R 160 200 C95A6G-471AQ-R CS1-J16-300 300 200 200 C95B0G-472AQ-R C95B0G-0304Y-R 300 250 350 C95B5G-533AQ-R C95B5G-574EQ-R 450 200 C1SC2G-1468V-R CS1-J25-200 350 C1SC2G-1470V-R CS1-J25-530 530 320 Ambient temperature specifications

Modular/F.R.L. Units Series AC

AC AF AR AL AW AG AV AF800 AF900 303 Series AC10 to AC60 Dimensions AC10, AC20 AC25 to AC60 P2 P2 (Pressure gauge port size) (Pressure gauge port size) A A N F N F J M J M R2 R2 B C Q1 V L C Q2 Q1 V K K OUT IN OUT IN Q1 R1 Q1 R1 OUT OUT 2 x P1 (Port size) U S S U 2 x P1 (Port size) Clearance for maintenance G Clearance for maintenance Drain E G Lubricator Regulator Air Filter Drain Regulator

5

, 350, 400, 450, 500 1000 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 1000 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 1000 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 1000 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 1000 100 25, 50, 75, 100, 125, 150, 175, 200, 250

Large Size Vacuum Module: Series ZR

Symbol ZR1-R1 -R2 -R3 -R4 -R5 -R6 -R7 -R8 BM1 ZR1 R1 R2 R3 R4 R5 R6 R7 R8 R9 R10 R11 R12 R13 R14 R15 R16 PV PV PV PV PV PV PV PV PE PE Refer to Example 1).

High Vacuum Angle Valve

Nil FKM 1349-80*1 N1 EPDM 2101-80*1 P1 Barrel Perfluoro 70W Q1 Kalrez 4079 R1 Chemraz SS592 R2 SS630 R3 SSE38 S1 VMQ 1232-70*1 T1 FKM for Plasma 3310-75*1 *1 Values at normal temperature, excluding gas permeation *2 Refer to Construction on page 5 for changed part. Number corresponds with the parts number on the construction drawing.

Flow Sensor Series PFMV

or less 4 x R2 or less Secure mounting of n pcs. (2 or more) switches (Vertical) 31 0 0.4 24 or more 31 x n pcs. + 3.5 x (n pcs. 1) PFM PFMV PF2A PF2W PF2D IF 4 x R2 or less Note) If a bend (R) is used, limit it to R2 or less.

VQZ100V-OMT0001

75-1 (VQ111) [] () (V111) 1 DC24V/12V 2 AC100V 3 AC200V 4 AC 9 No.VQZ100V-OMT0001 VQZ Series/ / / / P P P P R R R R DIN DIN DIN DIN ISO#:EN ISO#:EN ISO#:EN ISO#:EN-175301 175301 175301 175301-803 803 803 803C C C C( ( ( ( DIN DIN DIN DIN 43650C)( 43650C)( 43650C)( 43650C)( 8mm) 8mm) 8mm) 8mm) DIN IP65() () 90 :3.57 ()JIS.C3306 0.5mm 2 3 1(p)3R2R5R1 3(R2 3(R2 3(R2 3(R2 R) R) R)

2-Color Display Digital Flow Switch Series PFM

or less 4 x R2 or less Secure mounting of n (2 or more) switches (vertical) 24 or more 31 0 0.4 31 x n pcs. + 3.5 x (n pcs. 1) 4 x R2 or less Note) If a bend (R) is used, limit it to R2 or less.

Possible to transfer a workpiece at low-speed.

400 Displacement (m) Displacement (m) 250 350 200 300 40 30 20 10 0 30 25 20 15 10 5 0 Load (N) Load (N) MSQXB30A MSQXB50A 350 300 300 250 Displacement (m) Displacement (m) 250 200 200 150 150 100 100 50 40 30 20 10 0 100 80 60 40 20 0 Load (N) Load (N) 336 MSQX Series Low-Speed Rotary Table Rack & Pinion Type Construction CRB2 CRB1 MSU CRJ CRA1 o i @5 @6 t y !

Refrigerated Air Dryer

Large size IDFAF Series Outlet air pressure dew point Page Model Rated inlet condition Air flow capacity (m3/h [ANR]) Port size IDFA100F-38 960 R2 40C IDFA125F-38 10C 1210 R2 1/2 0.7 MPa IDFA150F-38 1500 DIN flange 80 P. 98 to 100 IDFA100F-40 860 R2 35C IDFA125F-40 3C 1100 R2 1/2 0.7 MPa IDFA150F-40 1340 DIN flange 80 3.

High-Precision Digital Pressure Switch

or less Multiple (2 pcs. or more) secure mounting Panel mount example 31 x n pcs. + 3.5 x (n pcs. 1) 4 x R2 or less 24 or more Panel mount example 31 0 0.4 24 or more 31 x n pcs. + 3.5 x (n pcs. 1) 4 x R2 or less Multiple (2 pcs. or more) secure mounting Panel fitting dimensions (Bottom ported) Individual mounting 36 x n pcs. +

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

or less Multiple (2 pcs. or more) secure mounting Panel mount example 31 x n pcs. + 3.5 x (n pcs. 1) 24 or more 31 0 0.4 4 x R2 or less Panel mount example 31 0 0.4 24 or more 31 x n pcs. + 3.5 x (n pcs. 1) 4 x R2 or less 23 2 Outputs + Analog Output (Voltage/Current) 3-Screen Display High-Precision Digital Pressure Switch for General Fluids

Table of Contents

Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB, CA1 Pressure 0.5 MPa Load factor 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Average speed Series (mm/s) VQC 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SQ VQ0149-C4 VQ0 VQ4 800 700 600 500 400 300 200

Manifold Specifications

Applicable base VV5Z3-20 VV5Z3-21 Rc 1/8 1(P) port Gasket Caution Applicable base VV5Z3-20 VV5Z3-21 Mounting Screw Tightening Torques M2.5: 0.45 Nm (5(R1), 3(R2) port) 3-3-25 Series VZ3000 Type 20 Manifold VV5Z3-20Station 1 Grommet (G), (H) (4(A), 2(B) port) (Pitch) (Mounting hole) 6-Rc 1/8 (1(P), 3/5(R) port) G: 300 mm H: 600 mm Manual override (Non-locking) (PE port) (Lead wire length)

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

15 273 262.5 244 14.5 17 298 287.5 265 16.5 18 310.5 300 275.5 17.5 19 310.5 300 286 12.5 20 323 312.5 296.5 13.5 L1 L2 L3 L4 389 Cassette Type Manifold 10-SZ3000 Dimensions: 10-SZ3000 for Plug-in 10-SS5Z3-60PD (26 pins) U1 2 Stations Directional Control Valves Air Grippers Modular F.

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

-6 = 9.0 x 10-6 (kgm2) Moment of inertia around Z axis IA = IZ1 + m1r12 X 10-6 z r2 Z2 B part r2 = 47(mm) Calculation of weight m2 = d x e x f x Specific gravity m2 = 5 x 10 x 12 x 2.7 x 10-6 = 0.002 (kg) Moment of inertia around Z2 axis IZ2 = {m2 (d2 + e2)/12} x 10-6 IZ2 = {0.002 x (52 + 102)/12} x 10-6 = 0.02 x 10-6 (kgm2) IB = 0.02 x 10-6 + 0.002 x 472 x 10-6 = 4.4 x 10-6 (kgm2) I =

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

-6 = 9.0 x 10-6 (kgm2) Moment of inertia around Z axis IA = IZ1 + m1r12 X 10-6 z r2 Z2 B part r2 = 47(mm) Calculation of weight m2 = d x e x f x Specific gravity m2 = 5 x 10 x 12 x 2.7 x 10-6 = 0.002 (kg) Moment of inertia around Z2 axis IZ2 = {m2 (d2 + e2)/12} x 10-6 IZ2 = {0.002 x (52 + 102)/12} x 10-6 = 0.02 x 10-6 (kgm2) IB = 0.02 x 10-6 + 0.002 x 472 x 10-6 = 4.4 x 10-6 (kgm2) I =

Vacuum Module Series ZX

ZX1-R1 R2 R3 R4 R5 R6 R7 R8 Symbol Part no. ZX1-R 9 R10 R11 R12 R13 R14 R15 R16 PS PS PS PS PV PV PV PV PV PV PV PV R1 R2 R3 R4 R5 R6 R7 R8 R 9 R10 R11 R12 R13 R14 R15 R16 PE PE Caution when ordering manifold PD PD PD PD PE PE The asterisk denotes the symbol for assembly. Prefix it to the ejector part numbers to be mounted.

Series VQ Metal Seal/Rubber Seal Body Ported

5m Speed controller: AS3000F-06 (S=6.5mm2) Cylinder stroke 100mm Fitting (One-touch fitting) Effective area (mm2)(Cv) Cylinder Speed (mm/s) Model AS3000F-06 (S=6.5mm2) Cylinder stroke 50mm 10 6 16 20 25 32 40 40 50 63 80 100 150 300 450 600 750 150 300 450 600 750 6 4.5 (0.25) VQ1000 (Metal seal) 6 6.3 (0.35) VQ1001 (Rubber seal) Series VQ2000 Cylinder bore size (mm) Series CJ2 Pressure 0.5MPa

Digital Flow Switch

For analog voltage output of 0 to 10 V Can be changed Can be changed 10 5 At a time of shipment At a time of shipment Analog output [V] Analog output [V] 1 0 3150 300 0 3150 300 30 3000 30 3000 Maximum value of the display range Maximum value of 10% of the rated flow range 100% of the rated flow range 10% of the rated flow range 100% of the rated flow range the display range Flow [L/min]