Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

E d R f j Table of UL-compliant Products JSXD Series JSXZ Series JSXM Series Option Replacement Parts J 2 x M depth 5 A G H B1 B b 2 x P Port size i DS: DIN terminal DZ: DIN terminal with light 70 CS: Conduit 58.3 51.9 500 R R DN: DIN terminal without connector WN: WN: M12 connector without cable 44.1 34.3 R R [mm] Size Port size P A B B1 C E G H J M 30 1/4, 3/8 21 <22> 57 28.5 89.8 10.5

C95

2 r!4 i yq !3t!8!1!7w !6ui e!5 !

Electric Actuator

LE-CSM-R;; is MR-PWS1CBL;M-A;-H manufactured by Mitsubishi Electric. LE-CSB-R;; is MR-BKS1CBL;M-A;-H manufactured by Mitsubishi Electric.

CY1

10 100, 200, 300 100, 200, 300, 400, 500 750 15 1 axis 100, 200, 300, 400, 500, 600 1000 20 100, 200, 300, 400, 500, 600, 800 25 1200 100, 200, 300, 400, 500, 600, 800, 1000 25 2 axes 1500 32 Note) Contact SMC if the maximum stroke is exceeded.

ITV

Because of this, VAC. and the pilot chamber e are connected, the pressure in the pilot chamber e becomes negative and acts on the top of the diaphragm r. As a result, the vacuum pressure valve t which is linked to the diaphragm r opens, VAC. and OUT. are connected, and the set pressure becomes negative.

Membrane Air Dryer

Standard dew point temperature/Outlet air flow rate P With fitting for purge air discharge Symbol Flow rate by size Outlet air flow rate (L/min [ANR]) Standard dew Combination with Type V is not available.Note) point (oC) 30 50 60 75 100 R Flow direction (Right m Left) Nil 20 300 500 Select from Series IDG H L S In the case of two or more options, indicate them 15 300 500 alphabetically

3 Port Air Operated Valve

/N.O. 2(A) 3/8 1/2 15.3 Air operated valve (P)1 3(R) VPA300 N.C. 2(A) 1/8 1/4 3.8 (P)1 3(R) N.O. 2(A) VPA500 (P)1 3(R) 1/4 3/8 P. 1564 8.8 For vacuum N.C. 2(A) VPA700 (P)1 3(R) 3/8 1/2 N.O. 15.0 2(A) (P)1 3(R) 1556 VPA300/500/700 Series Model Selection by Operating Conditions w Air Operated Valve: Manifold Series Manifold base model Applicable stations Note) EXH port type SYA VV3PA3-41 SYJA

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

port) 6-Rc 3/8 (P, R port) 6-Rc 3/8 (P, R port) 6-Rc 3/8 (P, R port) (With individual EXH spacer) 300 (PE port) VFR (PE port) Applicable cable O.D. 2.3 to 2.8 (PE port) (Lead wire length) (PE port) Applicable cable O.D.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

kPa 500 kPa 1.5 MPa 500 kPa 500 kPa 1.5 MPa 2 outputs (NPN/PNP) Output specification 1 output (NPN/PNP) Analog (Voltage/Current) Enclosure IP40 IP40 Piping M5 female thread, R1/8, NPT1/8 Note Copy function, Auto-shift function CONTENTS 3-Screen Display High-Precision Digital Pressure Switch ZSE20(F)/ISE20 Series How to Order p. 9 Specifications p. 10 Set Pressure Range and Rated Pressure

High-Precision Digital Pressure Switch

kPa 1 MPa 100 kPa 0 100 kPa 500 kPa 1 MPa 101 kPa 101 kPa For vacuum pressure Withstand pressure 500 kPa Withstand pressure 500 kPa 0 0 Rated pressure range 100 kPa 100 kPa For compound pressure Withstand pressure 500 kPa Withstand pressure 500 kPa 100 kPa 100 kPa 100 kPa 100 kPa For positive pressure 1 MPa 1 MPa 1 MPa Withstand pressure 1.5 MPa Withstand pressure 1.5 MPa 2 MPa 2 outputs

Table of Contents

r r u u u Drain Drain Drain Component Parts Material No.

CV/MVGQ

Description No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

CV/MVGQ

Description No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Air Cylinder

E TH TF WF LF + Stroke UF ZJ + Stroke A Bore Size (in) MM KK A B E EE FB LF+ P+ R TF TH UF W WF ZJ+ 500 (5") 1.000 3/4-16 1.13 1.500 5.50 1/2 NPT .50 4.50 2.88 4.10 6.63 2.75 7.63 .75 1.38 5.88 600 (6") 1.375 1-14 1.63 2.000 6.50 3/4 NPT .50 5.00 3.13 4.88 6.63 3.25 8.63 .88 1.63 6.63 MF2 Head side rectangular flange (G) P + Stroke 4-FB 2-EE KK MM B R E TH WF LF+ Stroke TF ZJ + Stroke UF

SYJ3000/5000/7000

port R2 R1 -+ -+ R port R P A, B port Mixed mounting of 3 port valves and 4, 5 port valves P port 3 port valve 4, 5 port valve Interface regulator -+ -+ A B R port R P A, B port P port -+ -+ A B R P -+ -+ A B B R port R P For detailed specifications about SYJ3000, refer to page 1-5-17.

MY1

(Except 32, 40) Side port Side port Back port Back port L L L Front port Front port L L L L L R R R R R R O-ring R R L L R R Bottom port Bottom port DL L Piping tube -X L R Technical Data Slide table operating direction For bottom piping, refer to the figure above. 1365

LG1H

Maximum Speeds for Each Transfer Load Unit (mm/s) Transfer load (kg) Model 15 20 25 30 LG1H21NC-500-F LG1H21NC-600-F LG1H21NC-700-F LG1H21NC-800-F LG1H21NC-900-F LG1H21NC-1000-F 1000 1000 700 700 600 600 500 500 500 500 500 500 500 500 500 500 500 500 500 500 930 740 600 500 Consult SMC if outside of the above conditions. 55 Series LG1H Construction/ With Coupling LG1H21 q r y !

Modular Design with Uniform Body Style

1 q r e w t i y u o !0 !

MB1

This may cause damage to the machinery. ) m m ( e z i s e r o B e v l a v n o i h s u C s t a l f s s o r c a h t d i W h c n e r w n o g a x e H 0 5 , 0 5 , 2 3 7 4 2 1 C 0 1 2 3 B M 5 . 2 5 . 2 y e k h c n e r w n o g a x e H 0 0 1 , 0 8 , 3 6 0 5 2 1 C 0 1 3 6 B M 4 4 y e k h c n e r w n o g a x e H Mounting & Piping 2. Be certain to activate the air cushion at the stroke end.

Hygienic Design Cylinder Series HY

Note 3) When the unit is installed, ensure that dirt does not collect in the rod end (threaded portion). 866 Hygienic Design Cylinder ISO Standard Type 32, 40, 50, 63 Series HYC How to Order 32 R 500 F HYCB 32 R 500 F6B F HYDCB With auto switch Number of auto switches With auto switch (Built-in magnet and switch rail) Nil S n 2 pcs. 1 pc. n pcs.