MIW/MIS

RB RA RC RF RE RD RJ SC SB SA Model MIS20-30 MIS20-20 MIS20-10 MIS12-30 MIS12-20 MIS12-10 8 6 6 M5 x 0.8 14 18 1.8 2.5 8 24 22.5 12 34 26 2.2 4 12 9 M8 x 1 10.5 11 12 Series MIW/MIS Auto Switch Mounting When mounting an auto switch, insert the switch in the switch mounting groove on the escapement from the bottom.

Escapements Series MIW/MIS

RB RA RC RF RE RD RJ SC SB SA Model MIS20-30 MIS20-20 MIS20-10 MIS12-30 MIS12-20 MIS12-10 8 6 6 M5 x 0.8 14 18 1.8 2.5 8 24 22.5 12 34 26 2.2 4 12 9 M8 x 1 10.5 11 Series MIW/MIS Auto Switch Mounting When mounting an auto switch, insert the switch in the switch mounting groove on the escapement from the bottom.

Flow Sensor Series PFMV

Ra is used to compensate the gas and/or ambient temperature. (a) The gas is static.

CQM

IC circuit 5 V A76H A96V A96 Yes No A72 A73 A80 A72H A73H A80H 200 V Solid state switch Reed switch Grommet 100 V 12 V IC circuit A90V A93V A90 A93 5 V, 12 V 12 V 12 V Relay, PLC 2-wire No Yes 24 V A73C A80C A79W F7NV F7PV F7BV J79C F7NWV Connector IC circuit 5 V, 12 V Grommet Diagnostic indication (2-color indication) Yes 3-wire (NPN) 3-wire (PNP) F79 F7P J79 M9NV M9PV M9BV M9N M9P M9B 5

BP1000

No gauge port No pressure gauge No code 0 V3 L 1 H 2 4 Ports -30 in.Hg to 30 psig -30 in.Hg to 60 psig -30 in.Hg to 100 psig -30 in.Hg to 160 psig 0 to 200 psig 0 to 400 psig -0.1 to 0.2 MPa -0.1 to 0.4 MPa -0.1 to 0.7 MPa -0.1 to 1.1 MPa 0 to 1.4 MPa 0 to 3 MPa Code Ports 2 ports 3 ports 2PW 3PW Porting Configuration e w q w q 1) Other range available.

Compact Cylinder

Relationship between Number of Needle Rotations and Piston Speed 32, 40 50, 63 800 800 32 32 50 700 700 600 600 63 Piston speed (mm/s) Piston speed (mm/s) 40 40 500 500 50 400 400 63 300 300 200 200 100 100 1 0 1 2 3 4 5 6 0 0 1 2 3 4 5 6 7 8 9 10 7 Fully opened Without restrictor Without restrictor Fully opened Number of restrictors needle rotations Number of restrictors needle rotations

CKZ2N

8.0 180 7.0 160 6.0 140 5.0 120 100 0 5 10 15 20 25 30 35 40 45 50 55 60 65 70 75 80 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 4.00 Load capacity (N) Load capacity (pounds) 80 400 17.0 380 16.0 Distance from pivot point (inches) 360 15.0 Distance from pivot point (mm) 340 14.0 320 45 13.0 300 60 75 90 105 120 135 12.0 280 260 11.0 240 10.0 220 9.0 200 8.0 180 7.0 160 140 0 5 10 15 20

Smooth Cylinder Series CQSY

0 CG1YB20 -200 Example Smooth cylinder combined with precision regulator (e.g.

Compact Cylinder with Solenoid Valve/

CD-P11 CD-P12 Load voltage 24 VDC 100 VAC or less 200 VAC Note) Hysteresis may fluctuate due to the operating environment. Please contact SMC if hysteresis causes an operational problem.

AZ1000

Material Code Body Poppet 316L SS Diaphragm 316L SS Nozzle Option S Gauge port (Inlete, Outletr) Specification Code 316L SS 316L SS Hastelloy C-22 Hastelloy C-22 Pressure gauge 1) SHP Standard (Cv: 0.09) High flow (Cv: 0.15) No code HF Code psig/bar unit MPa unit Surface finish No gauge port No code Seat material Surface finish Ra 10 in. (0.25 m) Standard 25 in. (0.62 m) Code No pressure

AP10PA

S SHP SH 316L SS secondary remelt 316L SS Ni-Cr-Mo alloy Ni-Cr-Mo alloy Ni-Cr-Mo alloy Seat material Ni-Cr-Mo alloy H Material PCTFE (Standard) Polyimide 3) PTFE 4) 5) Code No code VS TF Gauge port (Inlete, Outletr) Pressure gauge 1) psig/bar unit MPa unit Surface finish Code Code Surface finish Ra max 15 in. (0.4 m) Standard 10 in. (0.25 m) 7 in. (0.18 m) 5 in. (0.13 m) 3) Not available

Process Gas Diaphragm Valve

Select compatible materials of construction for the gas Vacuum to 125 psig (0.9 MPa) 200 psig (1.4 MPa) 375 pisg (2.7 MPa) -10 to 71C (No freezing) 0.29 0.5 Inboard leakage Outboard leakage 2 x 10-11 Pam3/s 2 x 10-10 Pam3/s 1) 4 x 10-9 Pam3/s 1) Ra 10in. (0.25 m) Face seal, Tube weld 60 to 110 psig (0.4 to 0.76 MPa) M5 x 0.8 Top Bottom mount 0.06 in3 (1.07 cm3) 0.24 kg 2) Leak rate Across

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

800 800 Mey L5 [mm] L5 [mm] L5 [mm] 600 600 600 m Wall L5 Y 400 400 400 200 200 200 0 0 0 0 10 20 30 40 50 0 10 20 30 40 50 60 70 0 5 10 15 20 25 30 35 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] 600 600 600 Z 400 400 400 200 200 200 0 0 0 0 10 20 30 40 50 0 5 10 15 20 25 30 35 0 10 20 30 40 50 60 70 Work load [kg] Work load [kg] Work

Floating Joint

JA200-45-150-X530 M45 x 1.5 e 5 g n ra Axial center U U g in at er 5 p O How to Order JA F 180 40-150 X530 Mounting type For pneumatic cylinders (180, 200) Nil Basic type F Flange type L Foot type Applicable bore size Nominal thread size Symbol Applicable bore size 180 180 mm 200 200 mm Nominal thread size Applicable cylinder nominal thread size 40-150 M40 x 1.5 45-150 M45 x 1.5 Basic Type

VQ7-6/7-8

Bore size Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm 50 63 80 100 125 140 160 180 200 250 300 Average speed (mm/s) Series 1000 1100 Perpendicular, upward actuation 900 Horizontal actuation 800 700 600 500 400 300 200 100 VK VQ7-8-FG-S-A03 VQ7-8-FG-S-RA03 VZ VF 0 1000 1100 VFR 900 800 700 600 500 400 300 200

Electric Rotary Table

/400 W) AC servo motor (100/200/400 W) AC servo motor (100/200/400 W) AC servo motor (100/200/400 W) Features 12 Series Variations Electric Rotary Table Series LER Max. speed [/s] Positioning repeatability [] Controller /Driver series Rotating torque [Nm] Reference page Type Basic High torque Basic High torque Basic High torque LER10 0.2 0.3 Series LECP6 280 420 0.05 (End: 0.01) Series LECP1

VQ7-6/7-8

Bore size Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm 50 63 80 100 125 140 160 180 200 250 300 Average speed (mm/s) Series 1000 1100 Perpendicular, upward actuation 900 Horizontal actuation 800 700 600 500 400 300 200 100 VK VQ7-8-FG-S-A03 VQ7-8-FG-S-RA03 VZ VF 0 1000 1100 VFR 900 800 700 600 500 400 300 200

Shock Absorbers and Rate Controls

Compretied (lbr.) 0ttt.tftt(8) .24 0.28 l2-t30 50 0,000 2t5 0,5 0 I 0ffil.t 5tjl(B) 0.38 r 2. r30 l0 168,000 200 0.8 1.7 80 2 0tlt.25(B) 0.38 t2-130 50 178.000 200 0.8 1.7 8r 2 tR0EI[.25(B] .25 0.38 3 5 0 50 r78.000 200 0.8 1.7 100 2 0tfl.35(Bl .28 0.50 t2-r30 r50 300,000 450 1.0 2.2 t20 3 r.R0r .35(B) ,n 0.50 3-50 150 300.000 450 1.0 2.2 200 3 0 r . 5 ( B ) .44 0_50 t2-180 250 284.000 775

CXT

Tube bore size B, #2(#2+#3) 40 125, 150, 175, 200, 250, 300 55 14 14 3.8-9 Series CXT Auto Switch Specifications Refer to p.5.3-2 for details on auto switch.

CRB2/CRBU2/CRB1

A parallel keyway is used instead of chamfer for size 40. +5 0 +5 0 +4 0 = Max. = 200 +4 0 = Max. = 110 End of rotation e g e n g a n r a r n n o o i t i a t a t End of rotation o t o R R Chamfer (Start of rotation) Chamfer (Start of rotation) (90) (45) A port B port A port B port Start of rotation is the position of the chamfer (keyway) when B port is pressurized.