0.4

Note 1) 25P Note 1) 26P Top entry 20P Top entry Top entry Connector entry direction Connector entry direction Connector entry direction P. 17 P. 21 P. 25 P. 29 Top entry Side entry Top entry Top entry Side entry Side entry Without cable Without cable Without cable Without cable S0 S1 S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 S0 S1 S2 S3 U0 U1 U2 U3 U0 U1 U2 U3 U0 U1 U2 U3 Note 2) Note 2) Note 2) Note

5 Port Solenoid Valve Series SY3000/5000/7000/9000

rate: 50% Stroke 300 mm Series MB, CA2 Pressure 0.5 MPa Load rate: 50% Stroke 500 mm Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation SY3140-01 Horizontal actuation 800 700 600 500 400 300 200 100 0 SY5140-02 800 700 600 500 400 300 200 100 0 SY7140-03 800 700 600 500 400 300 200 100 0 SY9140-04 Cylinder is in extending.

Parallel Style Air Gripper Series MHZ

Do not drop, bump or apply excessive impacts (300 m/s2 or more for reed auto switches and 1000 m/s2 or more for solid state auto switches) while handling. Although the body of the auto switch may not be damaged, the inside of the auto switch could be damaged and cause malfunction. 2. Observe the proper tightening torque for mounting an auto switch.

LEC-OM07605CN

STO 13.3.3 3.2.2 ISO/EN ISO 13849-1 3 PL d 24 V EMG S4 S3 KM1 S2 KM1 K3 +24 V XS0 XS1 Z00 Z10 Z20 KM1 MELSEC (QS90SR2S) KM1 X0 COM0 24G X1 COM1 Z01 Z11 Z21 CN8 STO1 S1 EMG () STO2 STOCO M K3 TOFB1 TOFCOM 0 V TOFB2 20 S1STO (STO ) S2(STO ) S3ON S4OFF KM1 K3 EMG CN3 EM1 EM2 M . STOS1EMG0 STO[AL. 63 STO] 13.

High Vacuum Angle Valve

Heater assembly quantity 200/40 400/70 400/80 600/130 800/180 1200/300 1600/400 100V H5 120C 800/40 1600/80 1600/80 2400/130 3200/180 4800/300 6400/400 200V The inrush current of the heater flows for several ten seconds when using 100V while it flows for several seconds when using 200V. However, this inrush current decreases momentarily.

Table of Contents

Mount switches in locations where there is no vibration greater than 98 m/s2, or impact greater than 490 m/s2. 3. Do not use in an area where surges are generated.

OMR0031

The setting range is 1 to 400 mm/s. The speed can be entered when the [Speed Entry Method] has been selected in the [Step Data Input Method] in the Basic Parameter Set up window. The Speed can be set in increments of 1 mm/s. f) Accel Set the acceleration required to reach from stop to [Speed]. The setting range is 1 to 60,000 mm/s2.

ITV

(Error number 5) 4 points preset input type Brown Blue S1 White Vs Black S2 Vs: Power supply 24 VDC (Negative common) One of the preset pressures P1 through P4 is selected by the ON/OFF combination of S1 and S2. S1 OFF ON OFF ON S2 OFF OFF ON ON Preset pressure P01 P02 P03 P04 For safety reasons, it is recommended that one of the preset pressures be set to 0 MPa.

e-Rodless Actuator

Operating cylinder E-MY2H25-500 Set speed 400 mm/s Note) 1. Horizontal mounting 2. Wall mounting Set acceleration degree a 4.9 m/s2 Note) y z Mounting orientation Wall mounting Wb: MGGLB25-200 (4.35 kg) x y E-MY2H25-500TAN x z 3.

IZx-OMP0064

(ANR) L/min(ANR) L/min(ANR) 1600 1600 600 120 1600 1300 300 500 100 1300 1300 1120 1120 400 80 1120 200 820 820 300 60 820 640 580 460 400 340 640 580 460 400 340 640 580 460 400 340 200 40 100 100 20 0 0 0 0 0.1 0.2 0.3 0.4 0.5 0 0.1 0.2 0.3 0.4 0.5 0 0.1 0.2 0.3 0.4 0.5 MPa MPa MPa Pressure [MPa]] Pressure [MPa]] Pressure [MPa]] (a) Air supply from one side (b) Air supply from both sides

E-MY2_E_D

0.49 to 4.90 m/s2 0.98 to 9.80 m/s2 1.96 to 19.6 m/s2 Nominal size:16 5kg 1.25kg 10kg 2.5kg Maximum load weight NOTE2) Nominal size:25 20kg 5kg 10kg 2.5kg Acceleration and deceleration method Trapezoidal drive Moving direction Horizontal direction Positioning points Both ends (mechanical stoppers), 1 intermediate position Both ends 0.01mm Repeated Positioning stopping precision Intermediate

Series VQ Base Mounted Metal Seal/Rubber Seal

Connector location Connector location P.1.10-124 P.1.10-128 P.1.10-132 Top (vertical) Side (honzontal) Top (vertical) Side (honzontal) Without cable With cable (1.5m) With cable (3m) With cable (5m) Without cable Without cable F F S0 S1 S2 S3 P P S0 S1 S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 U0 U1 U2 U3 U0 U1 U2 U3 0 1 2 3 (2) (2) (2) G 2 to 16 stations With cable (1.5m) With cable (3m) With cable

NCQ2/CQ2

Series CQ2 Stroke S2 Stroke S1 B L 1 B2 A Bore Size: 12, 16 (mm) Symbol L Stroke range B A 1 B2 S1 S2 Bore size 52.9 (63.9) + Stroke (S1 + S2) 58 (70) + Stroke (S1 + S2) 17 (28) + Stroke S1 18.5 (30.5) + Stroke S1 32.4 + Stroke S2 36 + Stroke S2 12 3.5 5 to 30 35 to 50 16 3.5 5 to 30 35 to 50 Bore Size: 20, 25 (mm) A B1 B2 Symbol Stroke range Stroke S2 55 to 75 80 to 100 Stroke S2 L Stroke

Compact Cylinder

Series CQ2 Stroke S2 Stroke S1 L B1 B2 A Bore Size: 12, 16 (mm) Symbol L Stroke range A B1 B2 S1 S2 Bore size 52.9 (63.9) + Stroke (S1 + S2) 58 (70) + Stroke (S1 + S2) 17 (28) + Stroke S1 18.5 (30.5) + Stroke S1 32.4 + Stroke S2 36 + Stroke S2 12 3.5 5 to 30 35 to 50 16 3.5 5 to 30 35 to 50 Bore Size: 20, 25 (mm) A B1 B2 Symbol Stroke range Stroke S2 55 to 75 80 to 100 Stroke S2 L Stroke

V100

Lubrication Manual override Shock/Vibration resistance (2) Enclosure Non-locking push type 150/50 m/s2 Dustproof Note 1) Based on dynamic performance test, JIS B 8374-1981.

20

Flow-rate Characteristics Note) Values when the main valve is fully open Male thread nozzle High efficiency nozzle 1L = 0.035 SCFM 1L = 0.035 SCFM 14.5 29.0 43.5 58.0 72.5 87.0 102 116 131 145 psi 14.5 29.0 43.5 58.0 72.5 87.0 102 116 131 145 psi 1500 1400 1300 1200 1100 1000 900 800 700 600 500 400 300 200 100 400 VMG1-R02-400:4 KNH-R02-200 VMG1-R02-350:3.5 350 VMG1-R02-300:3 Flow rate [

20

Flow-rate Characteristics Note) Values when the main valve is fully open Male thread nozzle High efficiency nozzle 1500 1400 1300 1200 1100 1000 900 800 700 600 500 400 300 200 100 0 400 VMG1-R02-400:4 KNH-R02-200 VMG1-R02-350:3.5 350 VMG1-R02-300:3 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 300 KN-R02-250:2.5 KN-R02-200:2 250 KN-R02-150:1.5 KNH-R02-150 200 KN-R02-100:1 150 KNH-R02-100

10

For Air Upstream pressure of valve P1 1.0 MPa 1.0 Downstream pressure of valve (P2) [MPa] 0.8 Subsonic 0.9 0.6 Critical pressure 0.7 0.8 Sonic 0.4 0.6 0.5 0.4 0.2 0.3 0.2 0.1 0 2 50 100 150 200 250 300 400 350 3 100 200 300 400 500 4 400 600 800 1,000 1,200 5 200 1,400 600 1,000 7 350 700 8 400 700 1,000 1,300 10 (Connection: 1/4) 500 700 10 (Connection: 3/8, 1/2) Flow rate Q [L/min (ANR

NCG/CG1

Solid state switch Reed switch Type 3-wire: 100 A or less, 2-wire: 0.8 mA or less (4) Leakage current None Note 2) Operating time 1 ms or less (3) 1.2 ms Impact resistance 1000 m/s2 300 m/s2 50 M or more at 500 M VDC (Between lead wire and case) Insulation resistance Note 3) 1000 VAC for 1 minute (Between lead wire and case) 1500 VAC for 1 minute (1) (Between lead wire and case) Withstand

25

Nil P NPN PNP Bar length (mm) 340 400 460 580 640 820 1120 1300 1600 1900 2320 2500 With 2 pcs. 340 400 460 580 640 820 1120 1300 1600 1900 2320 2500 Since input/output function cannot be used, specify Nil when the AC adapter is being used.