ZP

Adapter Specifications Vacuum Inlet Direction Vertical T Type/ZPT Connection Male thread Female thread Pad diameter 2 to 8 10 to 16 20 to 50 2 to 81 10 to 16 20 to 32 40, 50 M5 x 0.8 M6 x 1 M8 x 1.25 1/8 (Rc, NPT, NPTF) Vertical Lateral Vertical Lateral M5 x 0.8 M6 x 1 1/8 (Rc, NPT, NPTF) M6 x 1 M8 x 1.25 1/8 (Rc, NPT, NPTF) Connection thread M5 x 0.8 M6 x 1 M6 x 1 M8 x 1 M4 x 0.7 M5 x 0.8

CQ2

X 1.0 40 10 M6 X 1.0 M8 X 1.25 50 14 Refer to p.2.3-18 for rod end nut and optional brackets.

LX

Stroke + 124 Stroke + 141 Motor unit 4.5 4H9 4H9 3 6 38 34 Section C detail (Scale: 5/1) Stroke + 104 Stroke + 121 12 7.5 4-M6 x 1 4H9 E 1 5.4 8.4 4-9.5 4-5.6 50 4.5 Section C 4-M6 x 1 9 43 5.5 D 30 Cross section BB Refer to page 300 for mounting.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

x 1.0 M6 x 1.0 40 10 50 14 M8 x 1.25 B + Stroke CL + Stroke For details about the rod end nut and accessory brackets, refer to page 7-6-20.

LX

Stroke + 124 Stroke + 141 Motor unit 4.5 4H9 4H9 3 6 38 34 Section C detail (Scale: 5/1) Stroke + 104 Stroke + 121 12 7.5 4-M6 x 1 4H9 E 1 5.4 8.4 4-9.5 4-5.6 50 4.5 Section C 4-M6 x 1 9 43 5.5 D 30 Cross section BB Refer to page 300 for mounting.

Vacuum Module Series ZX

) 1 4.7 AMJ 20 5 AMV Pitch = 21 22.5 Vacuum port (V) M5 (or M6) AEP HEP Related Equipment + 79 65.1 10.7 8.5 V V V V Pitch = 21 Vacuum Port (V) M5 (or M6) 4.2 22.5 Vacuum Port (V) M5 (or M6) Vacuum Port (V) M5 (or M6) 897 Series ZX Vacuum port (V) Vacuum port (V) Ejector System Manifold: Type K1 Common EXH port (EXH.)

Table of Contents

MHC2-25 D2-M6 x 1 thread depth 10 (Mounting thread) 204-M6 x 1 thread depth 12 (Mounting thread) Bottom hole dia. 5.1 through (Mounting hole) 26H9 depth 1.5 +0.052 0 Closed 10 Open 30 Auto switch mounting groove (Both sides) 2-M6 x 1 thread depth 12 (Mounting thread) Note) When single acting type is used, one side port is breath port and adjusting needle for finger speed is not attached.

ZP

1 8 M5 x 0.8 M6 x 1 M8 x 1.25 Rc M6 x 1 M8 x 1 M6 x 1 M8 x 1 4 6 8 10 13 16 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 1 8 M6 x 1 M8 x 1.25 Rc 1 8 13-11-2 Series ZPT Vacuum Pad: Vertical Vacuum Entry without Buffer How to Order Vacuum entry port Pad dia.

Made to Order

x 1.0 9.5 M5 6 8 26 70 6.0 28.5 41 92 40 55 71 M6 x 1.0 9.5 M5 6 8 35 86 6.0 35 49 110 40 65 87 M8 x 1.25 11 M6 8 11 36 100 7.0 42 57 122 50 80 101 M8 x 1.25 18 M6 10 11 Note 1) With dimension F, the amount of clearance between the body and the floating joint is 1 mm.

ZX

Individual air supply port PV Individual air supply port PV Adapter D Adapter D M5 (or M6) Pitch = 21 Individual air supply port (PV port) M5 (or M6) Individual air supply port (PV port) Pitch = 21 M5 x 0.8 (or M6) Vacuum pad connection port (V port) (or M6) Vacuum pad connection port (V port) M5 x 0.8 M5 x 0.8 (or M6) Adsorption nozzle piping port 13-2-35 35 Series ZX Vacuum pad connection

ZP

1 8 M5 x 0.8 M6 x 1 M8 x 1.25 Rc M6 x 1 M8 x 1 M6 x 1 M8 x 1 4 6 8 10 13 16 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 1 8 M6 x 1 M8 x 1.25 Rc 1 8 13-11-2 Series ZPT Vacuum Pad: Vertical Vacuum Entry without Buffer How to Order Vacuum entry port Pad dia.

ZP

Thread dia. 4, 6 tube 4, 6, 8 tube 6, 8 tube 2 x 4, 3.5 x 7, 4 x 10 Thin section series (10 to 16) 2 to 8 10 to 16 20 to 32 40 to 50 M5 x 0.8, M6 x 1 M4 x 0.7, M5 x 0.8 M5 x 0.8, M6 x 1 M5 x 0.8, M6 x 1 M6 x 1, M8 x 1 M6 x 1, M8 x 1 M5 x 0.8, M6 x 1, M8 x 1.25 M6 x 1, M8 x 1.25 Pad Type Flat 2, 4, 6, 8, 2 x 4, 3.5 x 7, 4 x 10, 10, 13, 16, 20 25, 32, 40, 50 Flat with ribs Deep Bellows Pad

KQ2

(mm) Mass (g) Model D1 D2 L Application KQ2C-04 4 0.1 KQH, KQ2H04-M5, M6 KQS, KQ2S04-M5, M6 10.1 5.2 2.9 4 KQ2C-04A8.5 5 2.2 0.1 Applicable tubing KQL, KQ2L04-M5, M6 KQT, KQ2T04-M5, M6 KQY, KQ2Y04-M5, M6 4 KQ2C-04B9.7 5 2.2 0.1 KQ2C-06 6 0.1 2.9 12.1 7.2 KQH, KQ2H06-M5, M6 KQS, KQ2S06-M5, M6 6 KQ2C-06A10.5 7 0.1 2.2 KQL, KQ2L06-M5, M6 KQT, KQ2T06-M5, M6 KQY, KQ2Y06-M5, M6 6 KQ2C-06B12.0 7

Table of Contents

x 1 5.6 110 55 42 9 M5 x 0.8 30 20 MY1B25 40.5 2 M5 x 0.8 9 39 53 140 11 6.6 19 30 68 16 M8 x 1.25 6.8 140 70 52 12 M6 x 1 37 25 MY1B32 50 2 M5 x 0.8 10 49 64 170 14 8.5 23 36.5 84 15 M10 x 1.5 8.6 170 85 64 12 M6 x 1 45 30.5 MY1B40 63 2 M6 x 1 13 61.5 75 (mm) PC PD T VV XX YH YW Z ZZ P PA PB Q PP QW QQ RR SS TT UU WW Model Rc 1/8 60 30 206 12 42 16 16 6 14.5 15 12.5 MY1B25 55 6 10 16 28

Magnetically Coupled Rodless Cylinder

x 1.0 21 5.5 47 35 9.5 6 80 60 61 M5 36 22.5 8 M6 x 1.0 27.5 6.0 55 40 9.5 6 92 70 71 M5 41 26 8 M6 x 1.0 28.5 6.0 65 40 11 8 110 86 87 M6 49 35 11 M8 x 1.25 35 6.0 80 50 18 10 122 100 101 M6 57 36 11 M8 x 1.25 42 7.0 Note 1) Dimension F provides a clearance of 1 mm between the body and the floating joint, but does not consider dead weight deflection of the cylinder tube, etc.

ZP

Thread dia. 4, 6 Nylon tube, 4, 6 Urethane tube 4, 6 Nylon tube, 4, 6 Urethane tube 6 Nylon tube, 6 Urethane tube 2 x 4, 3.5 x 7, 4 x 10 Thin section series (10 to 16) 2 to 8 10 to 16 20 to 32 40 to 50 M5 x 0.8, M6 x 1 M4 x 0.7, M5 x 0.8 M5 x 0.8, M6 x 1 M5 x 0.8, M6 x 1 M6 x 1, M8 x 1 M6 x 1, M8 x 1 M5 x 0.8, M6 x 1, M8 x 1.25 M6 x 1, M8 x 1.25 Pad Type Pad form Flat with ribs Deep Bellows

Hygienic Design Cylinder Series HY

x 1 M6 x 1 12 12 24 29 72 80 M5 x 0.8 M6 x 1 13 14.5 18 26 70 78 M5 x 0.8 M6 x 1 10 12 Individual -X Note 1) Refer to page 888 for details about the optional parts (plug bolt).

2 Phase Stepper Motor/Without Motor Brake Series LXP

Stroke + 124 Stroke + 141 Motor unit 4.5 4H9 4H9 3 6 38 34 Section C detail (Scale: 5/1) Stroke + 104 Stroke + 121 12 7.5 4-M6 x 1 4H9 E 1 5.4 8.4 4-9.5 4-5.6 50 4.5 Section C 4-M6 x 1 9 43 5.5 D 30 Cross section BB Refer to page 300 for mounting.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(Example) For M3: L1 = 6 mm Applicable shaft types: S, Y L2 + (3 x P) L1 + (3 x P) Y axis S axis Q1 = M (mm) (mm) Q1 Q2 L1 = Shaft type Shaft type M3, M4, M5 S Y S Y Size Size L2 + (3 x P) L2 = 50 50 M3, M4, M5, M6 M3, M4, M5 L2 = 63 63 M4, M5, M6 M4, M5, M6 M4, M5, M6 Q2 = M 80 80 M4, M5, M6 M4, M5, M6, M8 M4, M5, M6 Q2 = M 100 100 M5, M6, M8 M5, M6, M8, M10 M5, M6, M8 Symbol: A33 Machine

CRB2/CRBU2/CRB1

(Example) For M4: L2 = 8mm Applicable shaft types: S, Y L2 + (3 x P) L1 + (3 x P) Y axis S axis Q1 = M (mm) (mm) Q1 Q2 Shaft type Shaft type L1 = S Y S Y Size Size L2 + (3 x P) L2 = 50 50 M3, M4, M5, M6 M3, M4, M5 M3, M4, M5 L2 = 63 63 M4, M5, M6 M4, M5, M6 M4, M5, M6 Q2 = M 80 80 M4, M5, M6 M4, M5, M6, M8 M4, M5, M6 Q2 = M 100 100 M5, M6, M8 M5, M6, M8, M10 M5, M6, M8 Symbol: A33 Symbol