CG1

46 28 28 28 30 36 46 47.6 53 67.7 78.7 98.6 119.2 Consists of pins, flat washer and hexagon socket head cap bolt.

Electric Actuator

Description Material Note 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 No.

LEC-OM071xx

8.12.1 Data Order.8-36 8.12.2 Specifying Units.8-36 8.12.3 Specifying Monitor Data.8-37 8.12.4 Position Data.8-37 8.13 Common Commands.8-38 8.13.1 Common Commands.8-38 8.13.2 No Operation Command (NOP: 00H) .8-39 8.13.3 Read ID Command (ID_RD: 03H) .8-40 8.13.4 Setup Device Command (CONFIG: 04H) .8-47 8.13.5 Read Alarm or Warning Command (ALM_RD: 05H) .8-49 8.13.6 Clear Alarm or Warning

JA/JAH/JB/JS

-150 20 25, 30 40 50, 63 80 100 125, 140 160 19 25 32 65 75 90 125 150 8 10 14 18 22 26 30 36 32.5 36 49 61.5 76.5 94 131 152 19 20.5 27 34.5 43.5 52 73.5 86 8 9 13 15 18 24 38 42 48 52 70 1.25 1.25 1.5 1.5 1.5 1.5 1.5 1.5 0.5 0.5 0.75 1 1.25 2 2.5 3 36 40 52 45 55 65 82 100 1100 2500 4400 11000 18000 28000 36000 55000 21 24 31 41 50 59.5 79 96 0.08 0.12 0.28 0.63 1.15 2.07 5.2 9 6 6 9 12

JA/JAH/JB/JS

-150 20 25, 30 40 50, 63 80 100 125, 140 160 19 25 32 65 75 90 125 150 8 10 14 18 22 26 30 36 32.5 36 49 61.5 76.5 94 131 152 19 20.5 27 34.5 43.5 52 73.5 86 8 9 13 15 18 24 38 42 48 52 70 1.25 1.25 1.5 1.5 1.5 1.5 1.5 1.5 0.5 0.5 0.75 1 1.25 2 2.5 3 36 40 52 45 55 65 82 100 1100 2500 4400 11000 18000 28000 36000 55000 21 24 31 41 50 59.5 79 96 0.08 0.12 0.28 0.63 1.15 2.07 5.2 9 6 6 9 12

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

43 36 46 39 48.5 39.5 39 36 40 36 83.5 93.5 51.5 44 80 46.5 45 52 45 52.5 46.5 55 46.5 47.5 45 48.5 45 92.5 103 58 51.5 100 54 53.5 59.5 53.5 59.5 55 62 55 55.5 53.5 56.5 53.5 103 113.5 65.5 60.5 125 65.5 64.5 71 64.5 70.5 66.5 71.5 66.5 67.5 65 68.5 65 116 126 76.5 72 181 A Auto Switch Mounting C96 Series Minimum Stroke for Auto Switch Mounting [mm] Auto switch model Number of auto

Compact Rotary Actuator Series CRQ2

1 to 30 1 to 32 1 to 36 X 3 to 18 3 to 20 3.5 to 30 4 to 32 4 to 36 Size 10 15 20 30 40 X 3.5 to 21 4 to 24 4 to 27 Size 20 30 40 Symbol: A57 Symbol: A55 Symbol: A56 Both the long shaft and short shaft are shortened.

C85

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Nominal symbol C85 Mounting bracket diagram MB Lateral load applied to the rod end fR (N) 8 10 12 16 20 25 (MPa) MB1 Foot: L Rod side flange: F Head side flange: G 38 26 36 0.3 18 24 48 1.0 L CA2 29 19 27 14 0.5 18 36 W W W F C8516 23 16 22 11 0.7 14

10

31 38.5 31 41 34 43.5 34.5 77 87 33.5 31 34.5 31 43 31 46.5 39 63 38.5 36 40.5 36 43 36 46 39 48.5 39.5 83.5 93.5 39 36 40 36 48 36 51.5 44 80 46.5 45 49 45 52 45 52.5 46.5 55 46.5 92.5 103 47.5 45 48.5 45 56.5 45 58 51.5 100 54 53.5 57 53.5 59.5 53.5 59.5 55 62 55 103 113.5 55.5 53.5 56.5 53.5 64.5 53.5 65.5 60.5 125 65.5 64.5 68.5 64.5 71 64.5 70.5 66.5 71.5 66.5 115 125 67.5

Stopper Cylinder

KE [mm] Bore size A B D E F G H J K M N O P Q T V Y Z W Rc NPT G Rc NPT G 16 59.5 41.5 10 29 6 3 18 18 28 3.5 6.5 depth 4 M5 x 0.8 M5 x 0.8 M5 x 0.8 17 20 18 37 0 0 0 20 67 45 12 36 8 4 22 22 36 5.5 9 depth 7 1/8 1/8 M5 x 0.8 20 24 22 47 1.5 1.5 0 32 68 48 20 45 7.5 8 20 4.5 32 34 5.5 9 depth 7 1/8 1/8 1/8 20 36 20 14 40 80.5 52.5 25 52 8 10 28 5 41 40 5.5 9 depth 7 1/8 1/8 1/8 24.5

Electric Slide Tables

Motor cable 20 20 24 20 24 Lock cable 20 15 15 Dimensions (mm) Model L C D E F G H 108.5 J 40 LES16R-304 38 102.3 78 2 40 LES16R-50136.5 6 34 130.3 106 2 78 78 LES16R-75180.5 8 36 174.3 150 4 36 72 LES16R-100205.5 10 36 199.3 175 5 36 108 16 Series LES Dimensions: Basic Type/R Type LES25R 5H9 (+0.030 0 ) depth 2 A-A 66.5 0.3 Motor cable (2 x 5) 18 7.3 (Max. screw-in depth) 5.5 45.8 24 3.3

C85

CJP CJ2 CM2 Series C85: 8, 10, 12, 16 (cm) 10.0 Operating pressure Mounting style Maximum stroke that can be used according to buckling strength CG1 Nominal symbol C85 Mounting bracket diagram MB Lateral load applied to the rod end fR (N) 8 10 12 16 20 25 (MPa) MB1 Foot: L Rod side flange: F Head side flange: G 38 26 36 0.3 18 24 48 1.0 L CA2 29 19 27 14 0.5 18 36 W W W F C8516 23 16 22 11

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Shaft type Applicable size XC7 XC30 XC31 to 36 XC37 to 58 XC59 to 61 XC62 XC8 to 11 Description Part no.

Rotary Actuator

Applicable shaft types: S, W CRB1 Y2 = X = X = Y = X = MSU CRJ CRA1 CRA1 CRQ2 Y = Y1 = Y1 = Y2 = [mm] [mm] MSQ [mm] Size Y1 Y2 W Y 30 3 to 8 15 to 25 50 1 to 20 18.5 to 36 63 1 to 22 21 to 41 80 1 to 25 25 to 50 100 1 to 30 32.5 to 60 Size X Y1 Y2 W Y W Y 30 15 to 25 3 to 8 15 to 25 50 18.5 to 36 1 to 20 18.5 to 36 63 21 to 41 1 to 22 21 to 41 80 25 to 50 1 to 25 25 to 50 100 32.5 to 60 1

ZP

18 36 M12 x 1 M12 x 1 M12 x 1 Vertical 36 Width across flat 14 Vertical Width across flat 14 Width across flat 14 With Buffer: Vacuum Inlet With Buffer: Vacuum Inlet 10 5 15 10 5 15 10 5 15 Lateral Lateral 2 2 2 With Adapter: Vacuum Inlet 17 16 11.4 1.8 13 8.4 1.8 11 10 6 1.8 With Adapter: Vacuum Inlet 14 Lateral With Buffer: Vacuum Inlet Construction Adapter Applicable Pad List ZP3-T10B

Table of Contents

Cooling water (l/min) 180C Inlet air temperature Correction factor Air flow (l/min (ANR)) Model 50C 70C 100C 41.5 43 45.5 37 43 49.5 37 43 45.5 37 42 43.5 40 44 46 39.5 43 44.5 41 43 45.5 A B C A B C A B C A B C A B C A B C A B C 35.5 36 36.5 33.5 36 38 33.5 36 36.5 33.5 35 36 34.5 36 37 34.5 35.5 36 34.5 35.5 36 38.5 40 42 36 40 45.5 36 40 42.5 36 40 41 38 40 42.5 38

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Shaft type Applicable size XC7 XC30 XC31 to 36 XC37 to 58 XC59 to 61 XC62 XC8 to 11 Description Part no.

CQS

For details about auto switches with pre-wire connector, refer to page 7-9-36. 7-4-36 37 Compact Cylinder: Anti-lateral Load Type Double Acting, Single Rod Standard Specifications Type Pneumatic (Non-lube) Action Double acting, Single rod Fluid Air Proof pressure 1.5 MPa Maximum operating pressure 1.0 MPa Without auto switch: 10 to 70C (No freezing) With auto switch: 10 to 60C (No freezing

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

SB) A (3 x 3.2) Section SD SD Auto switch mounting groove dimensions (2 locations) MHSJ3-16D MHSJ3-20D MHSJ3-25D 4 4 5 4 6 5 3 6.5 5 3 3 20 20 5 5 90 90 20 20 20 20 (mm) NB 5h9 6h9 6h9 K 4 5 6 J 10 12 14 HB 36 42 50 HA 44 50 59 FX 12 15 18 EO 9.5 10 12.5 EC 7.5 8 9.5 DO 19.5 22 26.5 A 39 42 47 CB 14 14 17.5 DC 17.5 20 23.5 B 30 36 42 CA 7 7 7.5 AE 27 28 32 Q 6 7 8 AA 46 49 55 AD 16 18 20

Electric Actuator with Integrated Guide

No FOR 36 NEXT command was executed without executing FOR command. No operation program 37 Trying to execute a program/step with no commands. Invalid movement command 38 Trying to execute a command other than MOVA, MOVI, or ASET with a step (position movement) designated operation. Format error 39 An error is found in the attached value of a command being programmed.