Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

KQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-01 KQ2P-03 KQ2P-07 KQ2P-09 3.2 4 6 8 16 16 18 20.5 31.5 32 35 39 1/8" 5/32" 1/4" 5/16" 16 16 18 20.5 31.5 32 35 39 3.2 6 8 10 5 6 8.5 10 Port plug VVQ0-58A The plug is used to block the cylinder port.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

KQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-01 KQ2P-03 KQ2P-07 KQ2P-09 3.2 4 6 8 16 16 18 20.5 31.5 32 35 39 1/8" 5/32" 1/4" 5/16" 16 16 18 20.5 31.5 32 35 39 3.2 6 8 10 5 6 8.5 10 Port plug VVQ0-58A The plug is used to block the cylinder port.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

-06SD ASD430F-02-08SD ASD430F-02-10SD ASD530F-02-06SD ASD530F-02-08SD ASD530F-02-10SD ASD530F-02-12SD ASD530F-03-06SD ASD530F-03-08SD ASD530F-03-10SD ASD530F-03-12SD ASD630F-04-10SD ASD630F-04-12SD 4 9.3 29.4 17.5 12.9 8 9.6 10 4.7 11.7 30.7 31 0.7 27.4 7.8 M5 x 0.8 6 11.6 32.5 20.6 13.7 18 6 11.6 14 38.5 22.9 38.9 13.7 36 12 14.2 11.8 7.2 34.7 1.2 31.6 10.6 R 1/8 8 15.2 15.8 44.8 28.2 38.2

Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

Speed Controller with

Note) The applicable cylinder bore sizes (mm) for AS1002F-02 are 2.5, 4, 6.

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

M M5 M5 x 0.8 01 02 03 04 00 04 06 08 10 12 R 1/8 R 1/4 R 3/8 R 1/2 Thread connection H/DL L/LL KC Applicable tubing O.D. Same dia. tubing 4 6 8 10 12 04 06 08 10 12 4 6 8 10 12 KK Tubing (rod) connection Different dia. tubing (plug-in reducer) KK130 DM Construction KDM KB KR KA KQG2 KG KFG2 MS KKA M5 type Male connector KP KP Description Material Component Parts LQ No.

5 Port Solenoid Valve SY Series

AN120-M5 AS3001F-06 AN110-01 SY3120-C6 SY3140-01 T0604 x 1 m T0806 x 1 m AS3001F-06 T0604 x 1 m T0806 x 1 m AS3001F-08 AS3001F-06 SY5120-01 SY5140-02 AS3001F-08 AN101-01 AN101-01 T1075 x 1 m T0604 x 1 m T0604 x 1 m T1209 x 1 m T1075 x 1 m AS4001F-10 SY7120-02 SY7140-03 AS3001F-06 AS4001F-10 AS3001F-06 AN110-01 AN200-02 T0604 x 1 m T1075 x 1 m T1209 x 1 m T0604 x 1 m T1075 x 1 m T1209 x 1

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

AS121FM-M5-23 AS121FM-M5-04 AS121FM-M5-06 AS221FM-01-23 AS221FM-01-04 AS221FM-01-06 AS221FM-01-08 AS221FM-02-04 AS221FM-02-06 AS221FM-02-08 AS221FM-02-10 3.2 4 6 3.2 4 6 8 4 6 8 10 22.1 22.1 22.9 27.5 27.5 27.5 32.4 34.4 34.4 36.4 43.2 8.4 9.3 11.6 9.3 9.3 11.6 15.2 10.4 12.8 15.2 18.5 17.3 17.3 18.1 20.4 20.4 20.4 25.3 25.2 25.2 27.2 33.9 12.7 12.3 7 28.8 25.1 30.1 9.6 33.8 M5 x 0.8 8 13.5

SQ1000/2000

P = 11.5 1 2 3 4 5 6 7 8 ... n: Stations 40.5 Silencer cover L Blanking plug (for One-touch fitting) Dimensions Applicable fitting size d 3.2 4 6 8 A 23 04 06 08 Model A L D KQ2PKQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 16 16 18 20.5 31.5 32 35 39 3.2 6 8 10 This is inserted into cylinder ports and SUP and EXH ports that are not used.

HRX-OM-S004

Alarm Notification and Troubleshooting . 6-1 6.1 Alarm Notification . 6-1 6.2 Alarm buzzer stop . 6-3 6.3 Troubleshooting . 6-4 6.3.1 Alarm contents, causes, and troubleshooting. 6-4 6.3.2 How to release the thermal relay trip and circuit protector . 6-8 6.3.3 How to release the pump thermal trip . 6-10 6.4 Other Errors . 6-11 Chapter 7 Control, Inspection and Cleaning . 7-1 7.1 Quality Control

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

Dimensions (mm) Weight (g) Effective area (mm2) Recommended flow (m3/min (ANR)) Port size R Model A B C 1 8 1 4 3 8 1 2 3 4 1 1 1 14 64 22 18 ANA1-01 ANA1-02 ANA1-03 ANA1-04 ANA1-06 ANA1-10 ANA1-12 ANA1-14 ANA1-20 4 37 16 10 15 35 60 90 160 280 450 610 0.8 or less 1.2 or less 2.7 or less 4.5 or less 7.0 or less 12.0 or less 20.0 or less 32.0 or less 45.0 or less 22 36 110 180 544 612 873

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

13.7 ASD330F-01-06SD 38.9 22.9 38.5 14 11.6 6 13.7 35.6 1.2 14.2 11.8 7.2 12 R 1/8 31.6 10.6 ASD330F-01-08SD 38.2 28.2 44.8 15.8 15.2 8 18.5 ASD430F-02-06SD 25.2 43.5 12.8 6 17 18 ASD430F-02-08SD 41.7 40.7 1.2 28.2 18.5 15 7.2 46.5 15.2 17 8 R 1/4 34.7 11 18.5 ASD430F-02-10SD 31 49.3 18.5 19.7 10 21 ASD530F-02-06SD 25.2 48.3 12.8 6 17 20.3 ASD530F-02-08SD 28.2 51.3 15.2 8 18.5 53.7 55.3 1.2

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

X Port size) Speed controller System figure System Solenoid valve SYJ7l40-01 Rc(PT)1/8 (S = 12.6mm2) AN110-01 (S = 35mm2) 4 X 1/8 AS2301F-01-04 A 02 03 AS3301F-06 6 X 1/4 B q 02 03 AS3301F-08 SYJ7l40-02 Rc(PT)1/4 (S = 12.6mm2) 8 X 1/4 C AN200-02 (S = 35mm2) 02 03 AS3301F-10 10 X 1/4 D 12 X 1/4 12 X 1/2 AS4001F-12 w E 1.2-53 Series SYJ7000 How to Order Light and surge voltage suppressor

Sine Cylinder Series REC

-01-06-X214 AS2001F-06-X214 AS2301F-01-06-X214 DREC32 AS2201F-01-06-X214 AS3001F-08-X214 AS2301F-01-06-X214 REC40 AS3201F-02-08-X214 AS3001F-08-X214 AS3301F-02-08-X214 -X Use the recommended speed controllers.

Sine Cylinder Series REC

-01-06-X214 AS2001F-06-X214 AS2301F-01-06-X214 DREC32 AS2201F-01-06-X214 AS3001F-08-X214 AS2301F-01-06-X214 REC40 AS3201F-02-08-X214 AS3001F-08-X214 AS3301F-02-08-X214 -X Use the recommended speed controllers.

Series VQ Base Mounted Metal Seal/Rubber Seal

VFS VS Blank plug (For One-touch fittings) Dimensions (mm) VS7 23 04 06 08 Color: White KQP-X19 X19 A L D Model Fittings size d 16 16 18 20.5 3.2 6 8 10 31.5 32 35 39 KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 3.2 4 6 8 It is inserted into an unused cylinder port and SUP/ EXH ports. The minimum order quantity is 10 pcs.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

C6 C8 Rc(PT)1/8 Rc(PT)1/4 One-touch fitting for 6 One-touch fitting for 8 Rc(PT)1/8 Rc(PT)1/4 One-touch fitting for 6 One-touch fitting for 8 01 02 C6 C8 D N Drop prevention Stop in the middle Note)When specifying more than one symbol, indicate them alphabetically.

Series AP500

Short type 7) Code FV4 MV4 TW4 FV6 MV6 TW6 FV8 MV8 TW8 02 No code P SC Sub-atmospheric(A):100 mm Hg absolute to 30 psig (-88 kPa to 0.2 MPa) 2 to 60 psig (0.014 to 0.4 MPa) 2 to 100 psig (0.014 to 0.7 MPa) 5 to 150 psig (0.034 to 1.0 MPa) 06 10 15 6) Panel mounting hole: 1.56 inch (39.6 mm). 7) Bonnet port is not threaded.

HRX-OM-Q026

Alarm Notification and Troubleshooting . 6-1 6.1 Alarm Notification . 6-1 6.2 Alarm Buzzer Stop . 6-3 6.3 Troubleshooting . 6-4 6.3.1 Alarm contents, causes, and troubleshooting. 6-4 6.3.2 How to release Fan Breaker Trip alarm . 6-8 6.4 Other Errors . 6-10 Chapter 7 Control, Inspection and Cleaning . 7-1 7.1 Quality Control of Circulating Fluid and Facility Water . 7-1 7.2 Inspection and

Ionizer Nozzle type IZN10 Series IZS

Maintenance detection signal ON OFF Output Requirement for maintenance detected ON OFF Input External switch signal 1, 2 455 IZN10 Series Dimensions 06 07 06 07 Energy saving static neutralization nozzle/IZN10-01 High flow rate nozzle/IZN10-02 20 Note 1) (110) 16 100 5 5 46 A 3.4 18.5 11 6 5 6 A 8 7 (Tap for ground wiring) M3 x 0.5 depth 4 40 25 12 A 93.6 A-A (mm) A Model 01 02 01 02 IZN1006