Applications Medical Equipment, Laboratory Instruments, Pick 'n Place, Process Control Specifications Regulator Type: Vacuum Relieving, Wetted Materials: Cast Aluminum, Buna-N, EPDM, Acetal, Polyurethane, Stainless Steel, Supply Consumption: .6 LPM, Max Supply: 30” (760 mm) Hg, Temperature Range: 40° - 150° F (4° - 66° C), Effect of Supply Variation: ± 5% of span, Sensitivity: 5” H2O,

Applications Medical Equipment, Laboratory Instruments, Pick 'n Place, Process Control Specifications Regulator Type: Vacuum Relieving, Wetted Materials: Cast Aluminum, Buna-N, EPDM, Acetal, Polyurethane, Stainless Steel, Supply Consumption: .6 LPM, Max Supply: 30” (760 mm) Hg, Temperature Range: 40° - 150° F (4° - 66° C), Effect of Supply Variation: ± 5% of span, Sensitivity: 5” H2O,

Applications Medical Equipment, Laboratory Instruments, Pick 'n Place, Process Control Specifications Regulator Type: Vacuum Relieving, Wetted Materials: Cast Aluminum, Buna-N, EPDM, Acetal, Polyurethane, Stainless Steel, Supply Consumption: .6 LPM, Max Supply: 30” (760 mm) Hg, Temperature Range: 40° - 150° F (4° - 66° C), Effect of Supply Variation: ± 5% of span, Sensitivity: 5” H2O,

IR1000/2000/3000

N01 Connection NPT 1/8 N02 Connection NPT 1/4 Port size N03 Connection NPT 3/8 Option specifications Application Size Symbol N04 Connection NPT 1/2 IRV3000 IRV2000 IRV1000 F01 Connection G 1/8 01 02 03 04 1/8 1/4 3/8 1/2 F02 Connection G 1/4 F03 Connection G 3/8 F04 Connection G 1/2 Accessory (Option) Part No. Part no.

PFM7

Port size Instruction manual Symbol Description Flow rate range 10 With instruction manual (Leaflet: Japanese and English) None Nil N 25 50 11 01 02 N01 N02 F01 F02 C4 C6 C8 N7 Rc1/8 Rc1/4 NPT1/8 NPT1/4 G1/8 G1/4 Unit specification With unit switching function M Nil Fixed SI unit Note) Note) Fixed unit: Real-time flow rate: l/min Accumulated flow: l 4 (5/32") one-touch fitting 6 one-touch

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

/4 ASV410F-N02 14 13.5 NPT 3/8 ASV410F-N03 14 13.5 NPT 1/4 ASV510F-N02 27 23 NPT 3/8 ASV510F-N03 29 27 JIS Symbol NPT 1/2 ASV510F-N04 29 27 Specifications Series ASV120F ASV220F ASV310F/410F ASV510F Air Fluid 1.5 MPa Proof pressure 1 MPa Max. operating pressure 0.1 MPa Min. operating pressure Ambient and fluid temperature Number of needle rotations 10 turns 8 turns 12 turns 15 turns Applicable

1

M5 x 0.8 NN MM C D B 0 0.3 B 0 0.3 A F NA H Z + Stroke S + Stroke NB F For details of the mounting nut, refer to page 376.

2

, 60C (F and FS type only)] IDF IDU IDF FS Refer to SMC website for details.

V

30.5 15 46 12 10 D I M E N S I O N S PA D D I A M E T E R S 10, 13, 16 D I M E N S I O N S PA D D I A M E T E R S 40, 50 F L AT T Y P E F L AT W I T H R I B G:M5x0.8 G:M6x1 Y Model A B C D F L AT T Y P E F L AT W I T H R I B E F E F Flat Flat with rib H:M6x1 H:M8x1 Y ZPT10 U C 10 12 12 17 20 38 25 43 3 1.7 Model A B D E C F G C F G Flat Flat with rib ZPT13 U C 13 15 12 17 20 38 25 43 3 1.8

ALF400 to 900, ALT-5/-9

n a t n e e w t e B * s e i r e S F L A N r o t a c i r b u L d e e F o t u A l e d o M 0 0 4 F L A N 6 0 N 0 0 4 F L A N 0 0 5 F L A N 0 0 6 F L A N 0 0 8 F L A N 0 0 9 F L A N e z i s e p i P 8 / 1 8 / 3 2 / 1 4 / 3 4 / 3 1 1 4 / 1 1 2 / 1 1 2 m f c s p i r d l i o r o f w o l f . n i M 2 . 2 5 . 3 2 . 4 2 . 4 6 . 6 7 . 7 1 . 6 1 3 2 3 6 ) f g k ( s b l t h g i e W ) 5 8 . 0 ( 7 8 . 1

Digital Flow Switch (Integrated display type)

of maximums rated flow [H_2] Setting of Hysteresis (OUT2) PFM710: 0.3 L/min, PFM725: 0.8 L/min PFM750: 1.5 L/min, PFM711: 3 L/min [F 3] [FLU] Operating fluid [ A i r ] dry air, N2 Page 28 [F 4] [rEF] Reference condition [Anr] Standard condition Page 29 [F 5] [eES] Response time [1.00] 1 second Page 30 [F 6] [dSP] Display mode [inS] Instantaneous flow Page 31 [F 7] [inP] External input [r_

Digital Pressure Switch

Setting Mode 28 Function Selection Mode 30 Function selection mode 30 Default setting 30 F 0 Units selection function 32 F 1 Setting of OUT1 33 F 2 Setting of OUT2 36 F 3 Digital filter setting 38 F 4 Auto-preset function 39 F 5 FUNC terminal setting 41 F 6 Fine adjustment of display value 43 F10 Sub display setting 44 F11 Display resolution setting 50 F80 Power saving mode 51 F81 Security

Secondary Batteries

B L F G D *Mounting brackets are shipped together, (but not assembled).

Digital Pressure Switch ( compatible)

OUT1 ON : Green OUT1 OFF: Red [F 2] Setting of OUT2 Page 37 Same setting as [F 1] OUT1.

I

M a n i f o l d m o u n t e d v e r s i o n s o f t h e V YH y r e g a r e a v a i l a b l e .

ITV

Output deviation factor (% F .S.) 0.6 0.5 0.4 Return 0.2 0 0 0.2 0.4 0.5 Out 0.6 0.8 0 25 50 75 1 1 2 3 4 1 5 100 Input signal (%F .S.)

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

70pvpump

N AIR EXH FLUID IN T, F, N are options.

ISE7xG.eng

[F 3] Digital filter setting 0.00 ms [F80] Power saving mode OFF [F81] Security code OFF [F 4] Auto-preset function OFF Press the SET button between 3 and 5 sec. Press the SET button between 1 and 3 sec. 0.0% [F 6] Fine adjustment of display value [F90] Setting of all functions OFF Press the SET button once.

ISE70_71-AB.eng

Item Default setting Item Default setting [F80] Power saving mode OFF [F 3] Digital filter setting 0.00 ms Bracket B [F81] Security code OFF [F 4] Auto-preset function OFF Press the SET button for 3 and 5 sec. Press the SET button for 1 and 3 sec. Press the SET button once.