Piping: 2 (Top Direction), Body Color: W (Urban White), Piping Type: N (NPT), Connection Size: 02 [Screw-in (Port Size 1/4)], Nozzle: 21 (Low Noise Nozzle w/Male Thread, KNS-R02-075-4)

Piping: 1 (Bottom Direction), Body Color: W (Urban White), Piping Type: N (NPT), Connection Size: 02 [Screw-in (Port Size 1/4)], Nozzle: 21 (Low Noise Nozzle w/Male Thread, KNS-R02-075-4)

Piping: 2 (Top Direction), Body Color: BU (Dark Blue), Piping Type: N (NPT), Connection Size: 02 [Screw-in (Port Size 1/4)], Nozzle: 21 (Low Noise Nozzle w/Male Thread, KNS-R02-075-4)

Piping: 1 (Bottom Direction), Body Color: W (Urban White), Piping Type: Rc, Connection Size: 02 [Screw-in (Port Size 1/4)], Nozzle: 21 (Low Noise Nozzle w/Male Thread, KNS-R02-075-4)

Piping: 2 (Top Direction), Body Color: BU (Dark Blue), Piping Type: Rc, Connection Size: 02 [Screw-in (Port Size 1/4)], Nozzle: 21 (Low Noise Nozzle w/Male Thread, KNS-R02-075-4)

Piping: 1 (Bottom Direction), Body Color: BU (Dark Blue), Piping Type: Rc, Connection Size: 02 [Screw-in (Port Size 1/4)], Nozzle: 21 (Low Noise Nozzle w/Male Thread, KNS-R02-075-4)

Piping: Top Direction, Body Color: Urban White, Piping Type: NPT, Connection Size: 02 [Screw-in (Port Size 1/4)], Nozzle: Low Noise Nozzle w/Male Thread, KNS-R02-075-4, Nozzle Cover: -, Flow Rate Adjustment: -

Piping: Bottom Direction, Body Color: Urban White, Piping Type: NPT, Connection Size: 02 [Screw-in (Port Size 1/4)], Nozzle: Low Noise Nozzle w/Male Thread, KNS-R02-075-4, Nozzle Cover: -, Flow Rate Adjustment: -

Piping: Top Direction, Body Color: Dark Blue, Piping Type: NPT, Connection Size: 02 [Screw-in (Port Size 1/4)], Nozzle: Low Noise Nozzle w/Male Thread, KNS-R02-075-4, Nozzle Cover: -, Flow Rate Adjustment: -

Piping: Bottom Direction, Body Color: Urban White, Piping Type: Rc, Connection Size: 02 [Screw-in (Port Size 1/4)], Nozzle: Low Noise Nozzle w/Male Thread, KNS-R02-075-4, Nozzle Cover: -, Flow Rate Adjustment: -

Piping: 1 (Bottom Direction), Body Color: BU (Dark Blue), Piping Type: F (G), Connection Size: 02 [Screw-in (Port Size 1/4)], Nozzle: 21 (Low Noise Nozzle w/Male Thread, KNS-R02-075-4)

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

ASV AK Flow Rate and Effective Area ASS AS1001FG AS2001FG AS2051FG AS3001FG AS4001FG Model ASR 3.2 6 6 8 10 12 6 8 10 12 4 4 Metric size ASF 6 Tubing O.D. 1/8" 3/16" 1/4" 1/4" 5/16" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 5/32" Inch size Flow Direction Symbols on Body 3/16" JIS Symbol Flow rate (l/min (ANR)) Controlled flow (Free flow) 100 130 230 290 460 420 660 920 1050 1390 Symbol Effective

Vacuum System Peripherals:

C1 Model (Stock item) Pressure range Note) Model Unit Connecting Note (kPa) GZ46-K-01 to 02 100 to 0 1 8 1 8 1 4 kPa R , kPa With covering assembly GZ46-K-01 to 02-C, C1 100 to 0 R ,1 4 1 8 1 4 kPa GZ46-K-01 to 02M 100 to 0 GZ46-K2K-01 to 02 100 to 200 R , M5 (Female thread) kPa GZ46E-K-01 to 02M 100 to 0 1 8 1 4 R , M5 (Female thread) R , 1 8 1 4 kPa Note) Do not apply pressure that exceeds

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Flow Rate and Sonic Conductance AS1001FG AS2001FG AS2051FG AS3001FG AS4001FG Model 3.2 6 8 10 12 4 6 6 8 10 Metric size 4 12 Tubing 6 Flow Direction Symbols on Body O.D. 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 3/16" 1/4" Indication symbol Symbol Inch size 5/32" 1/4" 5/16" 3/16" Flow rate (L/min (ANR)) 100 130 230 290 460 420 660 920 1050 1390 Controlled flow Free flow Sonic conductance

SV

With External Pilot Specifications (Pitch) 20.5 15.8 9.5 17.5 P = 16 11.9 9.2 25.2 11.8 5.4 30.6 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 49.9 E 3/5 E 3/5 E 3/5 E 3/5 63.5 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B P 1 1 P P 1 1 P PE One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 10 3/8" PE X X One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 4, 5/32" 6, 1/4" 8, 5/16

JXCx-OMT0061CN

INP 1 2 CC-Link CC-Link * 6 - 2.2 LE C P MJ (LE ) LEFS16B-100B-S1MJS P (DC24V) [LEFS16B-100] MJ CC-Link D DIN S T T <> LEHZ10K2-4 7 - 2.3 *1 CC-Link *4 PLC *3 LEC-CMJDC24V CN5 *1 *2 CN4 LE-CP-LE-CP---S CN3 120.3 120.3 mm mm 200 200 mm/s mm/s 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN2 *3 DC24V USB A-miniB type CN1 <> ( 2) AWG20 (0.5mm (3m)

2/3 Port Valve

P P Model Solenoid coilO Orifice size (mm) Model Port size Rc(PT) Coil: Class B, Class H VX311 0 2 4 1 8 1 4 , 1.5 VoltageO 2.2 VX312 0 2 4 AC Standard Option 100V, 200V 48V, 110V, 220V, 240V , 1 8 1 4 3 VX313 0 2 4 , 1 8 1 4 DC Standard Option 24V 12V 3 VX3234 2.2 VX3224 , 1 4 3 8 , 1 4 3 8 , 1 4 3 8 , 1 4 3 8 , 1 4 3 8 , 1 4 3 8 4 VX3244 MaterialO 2.2 VX3324 3 VX3334 Body Seal Brass, Stainless

REC

(Refer to p.4.9-5) Caution Model Recommended SMC speed controller Caution Model Elbow Straight In-line REC20 AS2201F-01-06-X214 AS2001F-06-X214 AS2301F-01-06-X214 REC25 AS2201F-01-06-X214 AS2001F-06-X214 AS2301F-01-06-X214 REC32 AS3201F-01-08-X214 AS3001F-08-X214 AS3201F-01-08-X214 REC40 AS3201F-02-08-X214 AS3001F-08-X214 AS3301F-02-08-X214 4.9-3 Be sure to read before handling.

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

0.5 1 5 10 20 50 0.5 1 5 10 20 50 Load (kN) Load (kN) Bore size 80 B rod C rod 2000 6 4 8 3 7 5 1 5 2 4 8 3 7 6 1 2 1000 Stroke (mm) 500 100 50 1 5 10 20 50 1 5 10 20 50 Load (kN) Load (kN) Bore size 100 B rod C rod 4 8 8 3 3 7 7 5 4 5 2000 6 6 1 2 1 2 1000 Stroke (mm) 500 100 50 1 5 10 20 50 100 1 5 10 20 50 100 Load (kN) Load (kN) 28 Series CH2E/CH2F/CH2G/CH2H Technical Data 3 Relationship

Connection: Insert Fitting, Connection Size: 10 (Insert Fitting Ø10), Nozzle Diameter: 100 (Ø1), Number of Holes: 4 Holes