90

ZK2 CH A 2 04 L A KQ2P 06 Applicable stations 02 04 06 08 10 For 2 stations manifold For 4 stations manifold For 6 stations manifold For 8 stations manifold For 10 stations manifold d Model and dimensions D Applicable size d 6 8 1/4" 5/16" Weight (g) Note A L D Symbol 06 08 07 09 White White Orange Orange 18 20.5 18 20.5 35 39 35 39 8 10 8.5 10 1 2 1 2 Connector type 1 2 D sub-connector (

VEX1

R) port 1(P), 2(A) Body size Rated voltage (Only with solenoid) 04 06 10 10 12 14 20 1 2 3 4 1 2 100 VAC 50/60 Hz (Ex.)

High Purity Chemical Valve

LQ 2 U 03 Tubing size Tubing O.D. 1/8", 3 4 3/16" 6 1/4" 6 8 10 1/4" 3/8" 10 12 3/8" 1/2" 12 1/2" 3/4", 19 3/4", 19 1", 25 Body class Applicable fitting Symbol 03 04 05 06 07 06 08 10 07 11 10 12 11 13 12 13 19 19 25 Type of fitting Symbol Nil 1 Applicable fitting LQ2 LQ1 2 Body class Symbol 2 3 4 5 6 Body class 2 3 4 5 6 Applicable fitting 3 LQ2 LQ2 4 LQ1 Type of part Symbol U B N Type of

KQ2

M5 M6 01 02 03 04 00 04 06 08 10 12 16 99 M5 x 0.8 M6 x 1.0 3.2 4 6 8 10 12 16 4 6 8 10 12 16 Thread connection Tubing (Rod) connection 23 04 06 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 R , Rc R , Rc R , Rc R , Rc 08 10 12 16 Same dia. tubing (Reducer) Different dia. tubing Same dia. rod Model Male connector Hexagon socket head universal male elbow Universal male elbow 45 male elbow Branch union elbow

Table of Contents

Universal type (throttle valve) 10-AS2301F-01-06-X214 10-AS1301F-M5-06-X214 10-AS2301F-01-06-X214 1.

Series VQ Base Mounted Metal Seal/Rubber Seal

Example) Lead wire length 1000mm VQ1110N-5LO 3 pcs. AXT661-14AN-10 3 pcs.

Series KC Self-seal Fittings

KBE1-04 KBE1-06 KBE2-06 KBH1-R1S KBH2-R1S KBH2-R2S KBH2-R3S KBH3-R2S KBH3-R3S KBH3-R4S KBH4-R3S KBH4-R4S R(PT) 1 2 R(PT) 3 8 R(PT) 1 2 R(PT) 3 8 R(PT) 1 4 R(PT) 3 8 R(PT) 1 4 4 R(PT) 1 8 Air supply port: KBE, KBH, KBB, KBS, KBL (Page 84-85) 6 KBE2-08 KBE2-10 KBE3-08 8 10 10 8 2 KBE3-10 KBE3-12 KBE4-12 R1 KB 1 H S 12 Female connector elbow union: KBL Type With sealant (only male thread) standard

Modular Type Regulator Series AR

Applicable model AR20K AR60K AR50K AR25K AR30K AR40K AR40K-06 Accessory Bracket assembly Note 1) AR50P-270AS Note 3) AR50P-270AS Note 3) AR20P-270AS AR25P-270AS AR30P-270AS AR40P-270AS AR40P-270AS Note 5) Note 5) Set nut AR20P-260S AR25P-260S AR30P-260S AR40P-260S AR40P-260S Note 2) Round G36-10-01 G36-10-01 G36-10-01 G46-10-02 G46-10-02 G46-10-02 G46-10-02 1.0MPa Note 4) Square embedded

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

3.22 04 4 06 6 08 8 10 10 12 12 01 1/8" 03 5/32" 07 1/4" 09 5/16" 11 3/8" 13 1/2" -X214 Stainless steel type (Stainless steel 303) Restrictor (Without check valve) The material can be visually identified by color of the release button.

SX

Dimensions Applicable fittings fitting d Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" 4 4 148 L dimension 0 98 1 110.5 2 123 3 135.5 No. 5 160.5 6 173 7 185.5 8 198 9 210.5 10 223 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 L dimension 11 No. 235.5 12 248 13 260.5 14 273 15 285.5 16 298 17 310.5 18

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Note) Metric size Inch size 23 04 06 08 10 12 Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT Port size AS-FE KE 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 3.2 4 6 8 10 12 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 AS-FG AS-FG N AS-FP AS-FM Note) For applicable tubing O.D. selection, refer to the Model on page 542. Use 1/8" tube.

HEC-OM-S008

In the case of use with specified unit No.,ensure to coincide communication No. and each Thermo-con unit No. (1) Setting Change Host STX COM Data ETX Check sum CR 101 100 10-1 10-2 (H) (L) Thermo-con ACK CR Host SOH UT STX COM Data ETX Check sum CR 101 100 10-1 10-2 (H) (L) Thermo-con ACK UT CR HECR 3-2 Communication Format (2) Confirming and reading Host ENQ COM Check

AW

Modular Type Filter Regulators Series AW Filter Regulator Series AW Model Port size Options AW10 M5 x 0.8 AW20 1/8, 1/4 AW30 1/4, 3/8 AW40 1/4, 3/8, 1/2 AW40-06 3/4 AW60 3/4, 1 Pages 366 through to 377 Filter Regulator with Backflow Function Series AWK AW20K 1/8, 1/4 AW30K 1/4, 3/8 AW40K 1/4, 3/8, 1/2 Bracket AW40K-06 3/4 Float type auto drain AW60K 3/4, 1 Square embedded type pressure gauge

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

IN side, OUT side 4 10 20 30 50 75 75 Prevents vacuum equipment trouble due to airborne contaminants. Mass (g) 22 22 30 30 39 39 Model Tubing size ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 7 7 12 12 16 16 6 6 8 8 10 Metric size Unrestricted 360 piping tube mounting.

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

8 12.7 12.7 7 9.6 17.5 9.3 10.8 28.7 28.6 25.8 25 22.2 17.5 28.7 AS131F-M5-04 AS131F-M5-03 5/32" M5 x 0.8 M5 x 0.8 8 20.3 9.3 20.3 28.6 25.8 25 22.2 7 4 9.6 9.3 10.8 9.3 AS131F-U10/32-04 AS131F-U10/32-03 5/32" 10-32UNF 10-32UNF AS131F-M5-06 AS131F-M5-05 3/16" M5 x 0.8 M5 x 0.8 13.5 11.4 21.3 23.3 34.5 16.5 20.6 21.4 31.8 11.6 6 AS131F-U10/32-06 AS131F-U10/32-05 3/16" 10-32UNF 10-32UNF 8 9.6

Micro Mechanical Valve Series VM1000

(R) 1 (P) Poppet VM200 2 port 3 port (A) 2 (A) 2 Side ported 1/4 Page 13 12 12 10 10 1 (P) 3 (R) 1 (P) VM400 3 port (OUT) 2 3 10 12 1 (N.C.)

5 Port Solenoid Valve Series VQZ1000/2000/3000

-04 KQ2P-06 KQ2P-08 KQ2P-10 L A Dimensions (mm) Applicable fitting size d Model A L D D KQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 3.2 6 8 10 12 31.5 32 35 39 43 3.2 4 6 8 10 16 16 18 20.5 22 Silencer (for manifold EXH port) Silencer is installed in the manifold EXH port. 63 38 22 13 Silencer part no.

Modular Type Regulators Series AR

Example) AR30-03BG-NR-X425 Symbol Body size Description 25 30 40 50 60 Body size Description Symbol Nil N F Thread type Rc NPT G 20 25 30 40 50 60 Nil N F Thread type Rc NPT G + 02 03 04 06 10 1/4 3/8 1/2 3/4 1 + 01 02 03 04 06 10 Port size 1/8 1/4 3/8 1/2 3/4 1 + Port size Nil B Note 2) Without mounting option With bracket With set nut (for panel fitting) H Mounting a + Note 1) Semi-standard

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

06 FH440-08 FH440-10 FH440-12 FH640-03 FH640-04 FH640-06 FH640-08 FH640-10 FH640-12 3/8 3/8 10 10 FH441-04 FH441-06 FH441-08 FH441-10 FH441-12 FH441-16 FH441-20 FH441-24 FH641-04 FH641-06 FH641-08 FH641-10 FH641-12 FH641-16 15 (1/2B) 15 (1/2B) 1/2 1/2 20 20 20 (3/4B) 20 (3/4B) 3/4 3/4 50 50 Max. 21 MPa 25 (1B) 25 (1B) 1 1 80 80 Max. 7 MPa 32 (1 1/4B) 32 (1 1/4B) 1 1/4 1 1/4 120 120 40

4/5 Port Solenoid Valve

Applicable solenoid valves: Type 10-SYJ312M Type 10-SYJ322M (10-SYJ300 3 port valve) (10-SYJ300 3 port valve) w 10-SS5YJ3-31/-S31, 10-SS5YJ3-32/-S32, 10-SS5YJ3-46/-S46, 10-SS5YJ3-32P The 3 port valve can be used without modification. The A port of the valve will flow out of the B port of the manifold.