AC Servo Motor Driver (Pulse input type/Positioning type ） 9 D-Side End Plate Assembly @0 U-Side End Plate Assembly MES80 D 03 2 MES80 U 03 2 Size 2 4 Size 18 mm Size 26 mm Option Size 2 4 Size 18 mm Size 26 mm Option Nil Nil None External pilot Built-in silencer External pilot + Built-in silencer -S None Built-in silencer -R -S Thread type -RS Nil Rc G NPTF F T Thread type Nil Rc G NPTF F T Port size Symbol 03 04 Port size 3/8" 1/2" Size 18 mm
class 2 3 4 5 6 Type of part 5 Symbol U B N Type of part Nut & insert bushing Insert bushing Nut LQ1 LQ2 3 6 LQ1 LQ1 For pilot port Tubing size Body class LQ1 1 U 03 LQ1 Tubing O.D. 1/8" (3) 4 Body class Symbol 1 Body class 1 Symbol 03 04 Applicable fitting LQ1 1 Type of part Note) Cannot change to tubing of different diameter.
8.5 13 12.7 2-2.6 (For manifold mounting) 28.1 [35.1] (Light/Surge voltage suppressor) 2-2.6 (For mounting) + 14.5 3 23 20 2.3 55.6 [57.8] 12.7 28.1 [35.1] 8 9 M5 x 0.8 (P, R port) 23 7 (Bracket) R P 11 11.5 1.4 (PE port) L plug connector (L): SYJ52-L-M5 (-F) M plug connector (M): SYJ52-M-M5 (-F) DIN terminal (D): SYJ52-D-M5 (-F) M8 connector (MO): SYJ52-WO-M5 (-F) Applicable cable O.D.
YA-03 Joint YU-03 RS W M V T2 Joint Part No. 2-D through 2-O counterbore T1 B E J Applicable mounting bracket Bore size (mm) Weight (g) Joint part no.
Parts name VEX312-01 02 VEX33202 03 04 VEX34202 03 04 VEX35004 06 10 VEX322-01 02 VEX370-10 12 VEX390-14 20 Bracket (With bolt and washer) VEX1-18-1A VEX5-32A VEX7-32A VEX9-32A B Foot (With bolt and washer) VEX1-18-2A VEX3-32-2A F Pilot exhaust (P2) port silencer N AN120-M5 AN103-01 AN210-02 Internal pilot solenoid/External pilot solenoid Symbol Weight (kg) VEX33202 03 04 0.3 0.4 VEX34202
AC-OMX0051-D PRODUCT NAME Air Combination MODEL / Series / Product Number AC20(A)-(F,N)01~(F,N)02(C,E,E1,E2,E3,E4,G,M)-(1,2,3,6,C,J,N,R,Z,ZA)-D AC20B,C,D -(F,N)01~(F,N)02(C,E,E1,E2,E3,E4,G,M)-(1,2,6,C,J,N,R,Z,ZA)-D AC30(A)-(F,N)02~(F,N)03(C,D,E,E1,E2,E3,E4,G,M)-(1,2,3,6,8,J,N,R,W,Z,ZA)-D AC30B,C,D -(F,N)02~(F,N)03(C,D,E,E1,E2,E3,E4,G,M)-(1,2,6,8,J,N,R,W,Z,ZA)-D AC40(A)-(F,N)02~(F,N)04(C,D
2008) or Zone 20 (as defined in IEC 60079-10-2: 2009)(Refer to page 40 for details) How to Order 5 2 LL SY 53 40 Thread type UL/CSA compliant Nil F N T Rc G Series NPT NPTF 5 7 9 53-SY5000 Port size 53-SY7000 Symbol Port size Applicable series 53-SY9000 Nil Without sub-plate Type of actuation 02 53-SY5000 53-SY7000 53-SY7000 53-SY9000 03 1/4 With sub-plate 2-position single (A) 4 2 (B) 3
, 04, 06, 07 01, 23, 03, 04, 06, 07 AS-F 06, 07, 08, 09, 10 500 08, 09, 10, 11 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min (ANR) 03, 04 TMH 400 200 06, 07 02 01, 23 ASD 300 50 03, 04 100 200 AS 01, 23 100 AS-FE 0 0 0 KE 5 0 10 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Number of needle rotations AS-FG AS-FG Note) -U10/32 has the same specification
G H C4, N3 C6, N7 4 3.5 19.5 3.5 B A P R1 16 15 10.6 R2 One-touch fitting (A, B port) 32.3 (3.2) 21 M5 x 0.8 (P, R1, R2 port) 1.4 (PE port) Applicable tubing O.D.: 4, 5/32" : 6, 1/4" (2.3) L plug connector (L): SYJ5120-L-M5(-F) M plug connector (M): SYJ5120-M-M5(-F) DIN terminal (D): SYJ5120-D-M5(-F) M8 connector (WO): SYJ5120-WO-M5(-F) Approx. 300 (Lead wire length) Applicable cable O.D
Symbol A R P 4 Metric sizes 03 04 06 3 4 6 Valve type N.C. 0 N.C.
Note5) Note6) Y110-M5-A Y210-01-A Y310-(01)-A Y410-(02)-A Y510-(02)-A Y610-03-A Y610-(03)-A VHS40-02A VHS20-01A VHS30-02A VHS50-06A Pressure relief 3 port valve Note6) VHS40-03A VHS40-06A Attachment VHS20-02A VHS30-03A VHS50-10A VHS40-04A E400-02-A E200-01-A E300-02-A E400-03-A E600-06-A Piping adapter Note6) E100-M5-A E200-02-A E300-03-A E500-06-A E400-04-A E600-10-A E200-03-A E300-04
Linearity (77F) 0.15% F .S. Repeatability (77F) 0.6% F .S. 0.5% F .S.
U D U D Kit/Electrical entry/Cable length F L Cylinder port kit (D-sub connector) kit (Lead wire cable) 03 04 B CM Rc 3/8 Rc 1/2 Bottom ported Rc 1/2 Mixed Note) Note)In case of mixed specification, indicate on the manifold specification sheet. .
-06 AS321FG-N02-11 31.8 43.3 55 17 27.8 39.3 6 12.8 3/8" 17.9 21 67 AS321FG-03-08 AS321FG-N03-07 27.8 39.3 57 18.5 29.5 41 8 15.2 1/4" 13.2 17 55 23 35.2 40.4 45.4 19 40.2 R 3/8 19.8 NPT 3/8 AS321FG-03-10 AS321FG-N03-09 29.5 19.8 19 41 59 21 45.4 31.8 43.3 40.2 40.4 10 18.5 5/16" 15.2 35.2 18.5 57 23 AS321FG-03-12 AS321FG-N03-11 31.8 43.3 61 22 32.8 44.3 12 20.9 3/8" 17.9 21 59 AS421FG-04
(For F, L, S, T kit) VVQ4000 3A 1 VVQ4000 2A 1 Electrical entry Electrical entry L F C L F C F , L, T, S kit F kit (Connector side) C kit (Plug lead type) F , L, T, S kit F kit (Connector side) C kit (Plug lead type) (1) (1) Option Option VQC Nil W CD SD Standard IP65 enclosure For exhaust cleaner mounting Direct exhaust with silencer box Nil W CU SU Standard IP65 enclosure For exhaust cleaner
)] Flow rate [L/min (ANR)] 06, 07, 08, 09, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 200 400 06, 07 TMH 02 01, 23 300 50 03, 04 ASD 100 200 01, 23 AS 100 AS-FE 0 0 0 5 0 10 5 0 10 5 0 10 KE Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.
12 17.2 38.5 54.3 12 17 21.7 21.7 Screw-in connection S type: White color L type: Black color (Mounting hole) B C D E F G H Model A 3 8 Rc3 8 Rc3 8 Rc3 8 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 Rc 133 52.45 42 19 3.5 19 20.95 20.95 133 52.45 42 19 3.5 19 151.1 60.95 47.7 19 3.5 24 26.75 151.1 60.95 47.7 19 3.5 24 26.75 I J K L M N O Model 3 8 Rc3 8 Rc3 8 Rc1 2 Rc1
YA-03 Joint YU-03 RS W M V T2 Joint Part No. 2-D through 2-O counterbore T1 B E J Applicable mounting bracket Bore size (mm) Weight (g) Joint part no.