0.4

Single wiring 1A Red COM.

/

Nil/G N/T 2-port 7 MPa 3 MPa SGH100 3 MPa SGH1-16-1A SGH100 7 MPa 3-port 7 MPa 3 MPa EBKX-W4005 EBKY-D8006 SGH200 2-port 7 MPa SGH2-16-1A 7 MPa 3 MPa SGH1-16-1A SGH200 3 MPa 3-port SGH300 7 MPa SGH2-16-1A 7 MPa 2-port 7 MPa SGH3-16-1A EBKX-Z2003 EBKY-D8007 3 MPa SGH400 3 MPa SGH2-16-1A SGH300 7 MPa 3-port 7 MPa SGH3-16-1A 2-port 7 MPa SGH4-16-1A 3 MPa SGH3-16-1A SGH400 3-port 7 MPa SGH4-16

VFR

0, Terminal i, Connection bracket q, w, Gasket e, r, O-ring y, u, Receptacle assembly 02 03 C8 C10 Plug-in type VVFS3000-1A-1Manifold block assembly Note) !0 Manifold block o, Connection bracket q, w, Gasket e, r, O-ring y, u 02 03 C8 C10 Non plug-in type VVFS3000-1A-2End plate (U) !

0.55

Applicable manifold base model VP300-25-1A VV3P3 Blanking plate assembly (With a gasket and two mounting bolts) VP500-25-1A VV3P5 VP700-25-1A VV3P7 VV3P3-41-051-02 VV3P5-42-053-03 How to Order Manifold Assembly (Example) Ordering example (VV3P3-41) VP344-5GZ1-B VP344-5GZ1-A VP300-25-1A Stations 3 2 1 D side U side VV3P3-41-051-02 1 set (Type 41, 5-station manifold base part no.)

45

SX3000-77-1A SX5000-77-1A SX3000 SX5000 Series Part no. SX3000-77-1A SX5000-77-1A SX3000 SX5000 SY SYJ Lable for block disk The labels shown below are used on manifold stations containing SUP/EXH block disk(s) to show their location. (3 pcs. each) EXH port SUP port SX VZ3000-123-1A Label for SUP/EXH block disk Label for EXH block disk Label for SUP block disk Series Assembly part no.

45

SX3000-77-1A SX5000-77-1A SX3000 SX5000 Series Part no. SX3000-77-1A SX5000-77-1A SX3000 SX5000 SY SYJ Lable for block disk The labels shown below are used on manifold stations containing SUP/EXH block disk(s) to show their location. (3 pcs. each) EXH port SUP port SX VZ3000-123-1A Label for SUP/EXH block disk Label for EXH block disk Label for SUP block disk Series Assembly part no.

AC Servo Motor Driver

0 2 3.5 5.5 8 1422 38 80 150 30 60 100 80 150 30 60 100 Cable size [mm2] a. 200V class Cable size [mm2] b. 400V class Fig. 12.3 Leakage current example (Ig1, Ig2) for CV cable run in metal conduit 12 30 12.

Compact Manifold Regulator Series ARM5

Stations L2 dimension IN IN 1 2 3 4 5 6 7 8 9 M VVQ1000-90-6 85.5 35 VVQ1000-90-7 98 16 VVQ1000-90-8 110.5 VVQ1000-90-9 123 IN side OUT side VVQ1000-90-10 135.5 Fitting size VVQ1000-90-12 160.5 Straight R Elbow S Elbow T Elbow U Straight V Elbow W Elbow X Elbow Y VVQ1000-90-13 173 4, 5/32 VVQ1000-90-14 185.5 2.5 6 11 37.5 2.5 6 11 37.5 6 VVQ1000-90-15 198 3 6.5 11 38 3 6.5 11 38 1/4 VVQ1000

SQ1000/2000

SSQ2000 1A 3 F0 01 !3 Includes gaskets.

SYJ300/500/700

Example 10-SS3YJ3-20-03 1 set (Manifold base) 10-SYJ312M-5LZ-M3 2 sets (Valve) SYJ300-10-1A 1 set (Blanking plate assembly) The asterisk denotes the symbol for assembly.

Table of Contents

Blanking plate assembly Fitting assembly Refer to page 14-4-38.

Large Size Vacuum Module: Series ZR

Example) ZR100-K15MZ-EC (-Q) . 1 pc. 3 L 38 ZS VJ10-20-4A-6 . 3 pcs.

XM, XY

AS568-016V XLD50-2-9-1A AS568-016V XLD63-2-9-1A XLD80-2-9-1A Standard AS568-009V S Valve seal assembly r XGT XLD80-2-9-1A XMD XYD XLD40-2-9-1A AS568-016 XLD50-2-9-1A AS568-016 XLD63-2-9-1A AS568-009 Special CYV Note 1) List the optional seal material symbol (refer to Table 1 below) after the model number, except for the standard seal material (FKM: compound no. 1349-80, produced by Mitsubishi

4/5 Port Solenoid Valve

(Valve) SYJ7000-21-1A 1 pc. (Blanking plate assembly) SS5YJ7-41-03-01 1 pc. (Manifold base) SYJ7140-5LZ 1 pc. (Valve) SYJ7240-5LZ 1 pc. (Valve) SYJ7000-21-1A 1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.

Modular Design with Uniform Body Style

-A C4LL-38-A *1 The bowl assembly comes with a bowl seal.

SYJ300/500/700

In the case of 2000 mm of lead wire For AC SYJ312-1LO-M3 SY100-30-1A-20 For DC SYJ312-5LO-M3 SY100-30-4A-20 VKF VQZ VZ Crimping area Core wire crimping area Core wire Lead wire Socket 0.2 to 0.33 mm2 Max. cover diameter: 1.7 mm VS VFN Hook Insulation 3.

Modular F.R.L. Units

-A C4LL-38-A * Bowl seal is included for the AL20-A to AL60-A.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

0, Terminal i, Connection bracket q, w, Gasket e, r, O-ring y, u, Receptacle assembly 02 03 C8 C10 Plug-in type VVFS3000-1A-1Note) 10 Manifold block assembly Manifold block o, Connection bracket q, w, Gasket e, r, O-ring y, u 02 03 C8 C10 Non plug-in type VVFS3000-1A-2End plate (U) !

modular-press-e

C3SL-36W w C1SL-2 C2SL-2 C3SL-2 C4SL-2 e C1SL-2 C2SL-2 C3SL-2 Metal t C1SL-23 C2SL-23 C3SL-23 C4SL-23 C1SL-23 C2SL-23 C3SL-23 IN OUT C3LL-8 C4LL-8 C3LL-8 Metal bowl with level gauge r i C3LL-38 C4LL-38 C3LL-38 121538-1A 121538-1A 121538-1A-S1 [IS400-1 (Float switch only)] 121538-1A-S2 [IS400-2 (Float switch only)] 1000 cm3 tank 121538-1A-S1 IS400-1 Metal bowl with level gauge 121538-1A-S2

Modular F.R.L. Pressure Control Equipment

C3SL-36W w C1SL-2 C2SL-2 C3SL-2 C4SL-2 e C1SL-2 C2SL-2 C3SL-2 Metal t C1SL-23 C2SL-23 C3SL-23 C4SL-23 C1SL-23 C2SL-23 C3SL-23 IN OUT C3LL-8 C4LL-8 C3LL-8 Metal bowl with level gauge r i C3LL-38 C4LL-38 C3LL-38 121538-1A 121538-1A 121538-1A-S1 [IS400-1 (Float switch only)] 121538-1A-S2 [IS400-2 (Float switch only)] 1000 cm3 tank 121538-1A-S1 IS400-1 Metal bowl with level gauge 121538-1A-S2