3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

M5 x 0.8 1(P) port M5 x 0.8 3(R) port R 3 P 1 10.7 9 M5 X 0.8 external pilot port 32 (Only external pilot type (R)) For the One-touch fittings for P/R port and silencer model no., refer to page 4-14-3.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

) (L3) L2 L1 3 2 1 16.5 Stations 5.5 D side 2-M5 X 0.8 External pilot port (Only external pilot style (R)) 2.3 21.6 35 53 5.5 300 (Lead wire) 39.5 7.8 (C3, C4, C6) (M5) Cover diameter 1.6 Cross section 0.34mm2 42.5 (11) R P 1 3 15 8 2-Rc(PT)1/8 R(EXH) port 16.3 13.4 2-M5 X 0.8 PE port 41.2 46.5 2-Rc(PT)1/8 P(SUP) port L plug connector (L) M plug connector (M) 66 71 300 (Lead wire) 55.5 56.5

VQC

C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread (7.5) 20.5 2-C8 1(P) port 34 P = 10.5 Formulas: L1 = 10.5n + 45, L2 = 10.5n + 167.5 (for 1 input block.

VP300/500/700

9 : With light/surge voltage suppressor 3(R) 1(P) 3.5 DIN terminal (D, Y) M5 x 0.8 108.5 (PE port) Applicable cable O.D.

Table of Contents

Example) M5 x 75l (MK2B) MK232/40 10 2 ML2B 6 Moment of inertia (kgm2) C J G5-S 4 MK220/25 CV 2 Mounting bolt 10 3 MVGQ 6 CC 4 Flat washer Operating range RB 2 Note) Be sure to use a flat washer to mount cylinders via through-holes. 10 4 J Model C D 75 85 80 90 90 100 80 90 105 135 105 135 Mounting bolt M5 x 75l M5 x 85l M5 X 80l M5 x 90l M5 x 90l M5 x 100l M5 x 80l M5 x 90l M6 x 105l M6

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

And How To Order Aoolicable valves N\|z3120-OOO-M5 N\r23220-OOO-M5 N\r23320-OOO-M5 Nllz3{20-ooo-M5 N\1z3520-OOO-U5 Ootions Blank plate ass'y: DXTl92-13-1A EXH Relocation Spacer ass'y: DXr192-21-'1A Applicable valves N\rz3r40-ooo N\rel2'lO-OOO l{ }340-ooo Nv4ttt40-coo N\rz9540-OOO Options Blank plate ass'y: DXTl9213-1A EXH Relocation Spacer ass'y: DXT192-21 -1A SUP Relocation Spacer ass'y:

SX

Port size M5 x 0.8 SX3000 SX3000-39-2A SX5000 SX5000-39-16 A SX7000 SX7000-39-16 A Series Assembly part no. Port size M5 x 0.8 SX3000 SX3000-38-2A SX5000 SX5000-38-16 A SX7000 SX7000-38-16 A Bolt and gasket part no. 1 8 1 4 Note) The SUP port may be either on the lead wire side or on the end plate side.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Black () B A 17.5 17.5 A B PE X P EB EA Insulation: Red (+) 35 17 17 56 65.4 62.5 M5 x 0.8 (Pilot EXH. port) 153.6 L 66.5 (For E type) (Lead wire length) 1.55 0.3 mm2 22 18 18 9.5 28 5 x 1/4" (Piping ports) L plug connector with cover (LL) 52-SY5240 (R) -LL-02 L 143.4 (Lead wire length) Insulation: Red (+) Insulation: Black () 0.3 mm2 4.1 37.2 34.5 (71.7) Cable

5 Port Solenoid Valve, Series VQC

C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread (7.5) 20.5 2-C8 1(P) port 34 P = 10.5 (mm) Formulas: L1 = 10.5n + 45, L2 = 10.5n + 167.5 (for 1 input block.

VQ4000

X 41.5 32 30.5 X PE 27 R1 R2 P 15.5 14.5 R2 R1 P 15.5 Rc 1/8 External pilot port 19.5 (21) 19.5 (21) Rc 1/8 PE port Rc 1/8 PE port 19.5 (21) 19.5 (21) 31 31 5-Rc 1/4, 3/8 31 G1/2 31 1(P), 4(A), 2(B), 5(R1), 3(R2) port 5-Rc 1/4, 3/8 Electrical entry 1(P), 4(A), 2(B), 5(R1), 3(R2) port : 3 position ( ): Rc 3/8 2-5-6 7 Base Mounted Series VQ4000 Plug-in/Plug Lead: Single Unit Plug Lead Type

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

For grounding actuator, connect the copper wire of the actuator to the driver,s protective earth (PE) terminal and connect the copper wire of the driver to the earth via the control panel,s protective earth (PE) terminal. Do not connect them directly to the control panel,s protective earth (PE) terminal.

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

) Sound absorbing material (PE sintered body) Case (PE) Rod (C3604) Note 1) About the display of products material PP: Polypropylene PE: Polyethylene C3604: Copper alloy Note 2) Recommended flow rate is the flow at 0.5 MPa in the inlet pressure. 5-10-6 7 Silencer High Noise Reduction Type Series AN02 How to Order Over 35 dB (A) noise reduction Case adopts UL94-V0 grade Flame resistant material

Large Type Vacuum Unit Series ZR

SMC PRESSURE SWITCH PD PV 57 1 67 1 32.4 109 Approx. 300 Ejector RESET SET Supply valve Release valve V 21.2 Manual override Suction filter 1 2-4.6 (mounting hole) 1 5.6 1 8 1 10.2 123 1 4.6 1 8 SOL. c SOL. a Silencer SOL. b Interface A Light Suction filter Manual override Interface B Digital vacuum pressure switch M5 port PE (pilot valve exhaust port) M5 port PD (vacuum breaking pressure

Title not found

And How To Order Aoolicable valves N\|z3120-OOO-M5 N\r23220-OOO-M5 N\r23320-OOO-M5 Nllz3{20-ooo-M5 N\1z3520-OOO-U5 Ootions Blank plate ass'y: DXTl92-13-1A EXH Relocation Spacer ass'y: DXr192-21-'1A Applicable valves N\rz3r40-ooo N\rel2'lO-OOO l{ }340-ooo Nv4ttt40-coo N\rz9540-OOO Options Blank plate ass'y: DXTl9213-1A EXH Relocation Spacer ass'y: DXT192-21 -1A SUP Relocation Spacer ass'y:

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

J (mm) DRB 7 8 12 12 17 NA Model PE 2.2 2.8 2.7 2.7 RA M4 x 0.7 M5 x 0.8 M8 x 1 M8 x 1 LC MA MB MC MD ME NB 4.5 7.5 9.5 12 16.5 P M3 x 0.5 M5 x 0.8 M5 x 0.8 M5 x 0.8 Rc1/8 PA 22.5 25 42 50 69.5 PB 24 27 44.5 55 75.5 PC 8 10 11.5 14 14.5 PD 4.5 6 7 8.5 11 RC 2 2.5 4 4 6 RD 5.7 6 9 9 12.4 MIW8-8 MIW12-12 MIW20-20 MIW25-25 MIW32-32 M3 x 0.5 M4 x 0.7 M6 x 1 7.5 11 15 20 25 14.5 19 28.5 35.5

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

J (mm) DNA Model P M3 x 0.5 M5 x 0.8 M5 x 0.8 M5 x 0.8 Rc1/8 PA 22.5 25 42 50 69.5 PB 24 27 44.5 55 75.5 PC 8 10 11.5 14 14.5 PD 4.5 6 7 8.5 11 PE 2.2 2.8 2.7 2.7 RA M4 x 0.7 M5 x 0.8 M8 x 1 M8 x 1 RB 7 8 12 12 17 RC 2 2.5 4 4 6 RD 5.7 6 9 9 12.4 LC MA MB MC MD ME NB 4.5 7.5 9.5 12 16.5 MIW8-8 MIW12-12 MIW20-20 MIW25-25 MIW32-32 M3 x 0.5 M4 x 0.7 M6 x 1 7.5 11 15 20 25 6 7 10 12 15 9 12.5

Thermo-chiller

6 Mounting screw (Size: M5) 2 !7 Cable tie holder 5 !8 Binding band 4 !9 Reusable band 1 (170) @0 Sealant tape PTFE 1 @1 DI control solenoid valve extension cable 1 1 The product should be replaced when it can no longer preserve the electrical conductivity set value.

IDX-OM-U022

B V IDFA100F V IDFA125F V IDFA150F B IDFA100F150F 1 4 1.3 IDX-OM-U022 1. 3.7 5.2 (IDFA100F, 125F) R OFF 5.2 L1 L2 L3 1,2 3,4 5,6 M5 9.5mm 3.5mm 2 1 3 2 4 5 6 M3 6.5mm 1.25mm 2 L1,L2,L3 PE: L2 L3 PE L1 M4 9.5mm 5.5mm 2 IDFA100F150F 1 5 1.3 IDX-OM-U022 1. 5.2 3.7 5.2 (IDFA150F) R OFF L1 L2 L3 M5 9.5mm 3.5mm 2 L1,L2,L3 PE: L2 L3 PE L1 1,2 3,4 5,6 1 3 2 4 5 6

CATALOG

x 0.8 M5 x 0.8 M5 x 0.8 Rc (PT) 18 Rc (PT) 18 Fluid Air Action Double Acting Op.

SYJ300/500/700

1.4 (PE port) L plug connector (L): SYJ52-L-M5 (-F) M plug connector (M): SYJ52-M-M5 (-F) DIN terminal (D): SYJ52-D-M5 (-F) M8 connector (MO): SYJ52-WO-M5 (-F) Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 60.9 28.1 [35.1] 53.4 Max. 10 74.6 42.1 12.7 M8 x 1 32.6 15.1 39.2 [46.2] Approx. 300 (Lead wire length) Pg7 65.5 [67.7] 75.5 55.7 [57.9] 64.6 57.2 50.7 34.7 8 9 8 9 8