VZ3000

Center/Pressure Center VZ3320 Grommet (G), (H) VZ3 20-M5 G H 3 4 5 VZ3420 VK Manual override (Non-locking) VZ3520 VZ (Lead wire length) (Mounting hole for manifold) VF G: 300 mm H: 600 mm VFR VP4 VZS VFS VS4 (Mounting hole) VQ7 2-M5 x 0.8 (PE port) EVS VFN (Piping port) L plug connector (L) VZ3 20-L-M5 M plug connector (M) VZ3 20-M-M5 3 4 5 3 4 5 300 (Lead wire length) 300 (Lead wire length

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

) P=10.5 13.5 (L3) 3 L2 6 .5 L1 2 1 16 .5 Station 5.5 D side 2.3 2-M5 X 0.8 External pilot port (Only external pilot style(R)) 7.8(C3, C4, C6) 21.6 (M5: 5.7) 35 5.5 53 300 (Lead wire) Cover dia 1.6 Cross section 0.34mm2 (Top piping) 39.5 7.8 42.5 P R 1 3 15 8 2-M5 X 0.8 PE port 13.4 2-Rc(PT)1/8 R(EXH) port 16.3 The broken line indicates DIN rail mounted style [-D]. 41.2 2-Rc(PT)1/8 P(SUP)

AC Servo Motor Driver (CC-Link Type ）

OUTLINE DRAWINGS (3) LECSC2-T9 [Unit: mm] 6 mounting Rating plate Lock knob Exhaust hole plate Cooling fan intake With LEC-MR-J3BAT Mass: 1.4 [kg] Terminal signal layout 60 PE terminal PE L1 L2 L3 CNP1 N P3 P1 Screw size:M4 Tightening torque:1.2[Nm] M4 1.2[Nm] P4 P2 2-M5 screw P 3-M5 C CNP2 D 420.3 L11 (6) (12) L21 Mounting hole process drawing U CNP3 V Mounting screw W Screw size:M5 Tightening

Electric Actuators

Effective thread depth 4 (PE terminal) M3 x 0.5 Stroke + 126 3.3 LXFH5S Q 24 1 3 21 5 3 25.5 80.5 5.8 Label 8 59 F 5H9 +0.030 0 depth 5 T-slot dimension (2/1) 29.5 5H9 +0.030 0 depth 5 Phillips binding head screw (included) 6 (11.5) 38 E M3 x 4l 4-M5 x 0.8 (for body mounting) thread depth 8 Crimping terminal When using a PE terminal, use accessories included as shown on the left.

Silencer Series AN

(1 8 NPT) NAN101-N01 (1 8 NPT) Model NAN101-01 NAN110-01 NAN120-M3 NAN120-M5 Port Size 18* 18* M3 M5 Noise Reduction (dB) 16 21 13 18 Max Operating Pressure 1MPa / 145PSI Ambient & Fluid Temperature 5~150C / 40~300F Effective Orifice mm2 (Cv) 20 (1.1) 35 (1.9) 1 (0.05) 5 (0.27) Weight (gf) 9.5 20 1 3.3 H O W T O O R D E R SERIES AN SILENCER *Tapered thread ISO7/1 AN120-M3 (M3) AN120-M5 (

VQ5000

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3-Rc 1/2 1(P), 4(A), 2(B) port M5 ground screw SMC 26.5 16 4(A), 2(B) port 31.5 37 41 50 98 G1/2 Electrical entry PE X P R1 R2 18.4 18 27.5 41 41 27.5 Rc 1/8 PE port Rc 1/8 External pilot port 5-Rc 1/2 1(P), 4(A), 2(B), 5(R1), 3(R2) port 3 position double

Electric Actuator/Slider Type

For grounding actuator, connect the copper wire of the actuator to the driver,s protective earth (PE) terminal and connect the copper wire of the driver to the earth via the control panel,s protective earth (PE) terminal. Do not connect them directly to the control panel,s protective earth (PE) terminal. Control panel Driver PE terminal Actuator 2.

Vacuum

Individual Vacuum l\,ls o 1lA o o o o o o PS M3 o PS M5 o o PD PD o o PE A EXH 1la A A Individual SUP spacer 1PS,lPD, :PE (R1) PV M5 o 1ta o o o o spa@r (R16) lPV, xPS, IPD,lPE 'Common o o PS t\r3 a PS a a PD PD O o PE EXH 1t8 A A each valve unit.

Plug-in/Plug Lead: Single Unit

Note 3) When two or more symbols are specified, indicate them alphabetically. 3 m 2-6-11 Base Mounted Series VQ5000 Kit (D-sub Connector kit) F Applicable connector: D sub connector (25P) (Conforming to MIL-C-24308) 83 29.5 29.5 2-Rc 1/8 (Pilot EXH port) 12 21 47.5 36 5 R1 PE 3 R2 1 P SMC 6-Rc 3/4 (P), 5(R1), 3(R2) port 179 106 9 9 59.2 46.8 When U side mounting (FU) 83.5 55.5 M5 ground

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

Note 1) For preventing electric shock, be sure to connect the servo amplifier,s protective earth (PE) terminal to the control panel,s protective earth (PE).

Vacuum Ejector Series ZM

) M3 (M5) ZMA (Needle fully open) ZQ ZH ZU ZL Pilot pressure supply for supply Pilot pressure supply for release Release flow rate adjusting needle ZY Pilot pressure exhaust port (PE) M5 through 1/8 (Rc, NPTF, G) ZF A Air pressure supply port (P) ZP Supply SP 86.4 (89.2) ZCUK 2 x 4.5 (Mounting hole) AMJ AMV Vacuum AEP HEP 1/8 (Rc, NPTF, G) Vacuum Vacuum port (V) Related Silencer Dimensions

AC Servo Motor Driver (CC-Link Type ）

PE terminals PE terminals (c) If a leakage current breaker is used to prevent an electric shock, the protective earth (PE) terminals (marked ) of the driver must be connected to the corresponding earth terminals.

LX

Effective thread depth 4 (PE terminal) M3 x 0.5 Stroke + 126 3.3 LXFH5S Q 24 1 3 21 5 3 25.5 80.5 5.8 Label 8 59 F 5H9 +0.030 0 depth 5 T-slot dimension (2/1) 29.5 5H9 +0.030 0 depth 5 Phillips binding head screw (included) 6 (11.5) 38 E M3 x 4l 4-M5 x 0.8 (for body mounting) thread depth 8 Crimping terminal When using a PE terminal, use accessories included as shown on the left.

LX

Effective thread depth 4 (PE terminal) M3 x 0.5 Stroke + 126 3.3 LXFH5S Q 24 1 3 21 5 3 25.5 80.5 5.8 Label 8 59 F 5H9 +0.030 0 depth 5 T-slot dimension (2/1) 29.5 5H9 +0.030 0 depth 5 Phillips binding head screw (included) 6 (11.5) 38 E M3 x 4l 4-M5 x 0.8 (for body mounting) thread depth 8 Crimping terminal When using a PE terminal, use accessories included as shown on the left.

Power Valve Precision Regulator

ITV VEX123 -01, 02 0 3 IC ITVH ITVX Air operated type PVQ VY1 (Mounting hole) VBA VBAT AP100 Pressure gauge (Option) 851 VEX13 Series 0 3 Manifold: VVEXB---01 Valve mounting side Applicable valve: VEX1B33 Pilot port Blanking plate VEXB-5 Port 2(A) 10.5 30 30 M5 2 x 5.5 Mounting hole 79.5 PE PE PE PE PE P1 P1 P1 P1 P1 37 43 19.5 19.5 5.5 P=31 21.5 L1 L2 6.5 Pressure gauge (Option) G27-10-

3 Port Solenoid Valve Metal Seal Series VZ200 1

5-L(Z)-01 300 (Lead wire length) With light/surge voltage suppressor Applicable cable O.D. 3.5 to 7 Max.10 84 With light/surge voltage suppressor M5 x 0.8 (Pilot EXH) Pg7 76 68.2 1 2 M: VZ2 5-M(Z)-01 43 19.5 PE PA 11 8.5 7 With light/surge voltage suppressor 300 2.5 3-Rc 1/8 (Lead wire length) (Pilot EXH) M5 x 0.8 M5 x 0.8 (Pilot EXH) 4-15-6 7 Series VZ200 Manifold Specifications Manifold

Vacuum

Individual Vacuum l\,ls o 1lA o o o o o o PS M3 o PS M5 o o PD PD o o PE A EXH 1la A A Individual SUP spacer 1PS,lPD, :PE (R1) PV M5 o 1ta o o o o spa@r (R16) lPV, xPS, IPD,lPE 'Common o o PS t\r3 a PS a a PD PD O o PE EXH 1t8 A A each valve unit.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

M5: 5.7) 35 5.5 53 (For top ported) Cover dia. 1.6 Cross section 0.34 mm2 39.5 7.8 42.5 P R 1 3 15 8 2-M5 x 0.8 PE port 13.4 2-Rc 1/8 Port 3(R) 16.3 41.2 2-Rc 1/8 1(P) port 46.5 The broken lines indicate the DIN rail mounting style [-D].

Fieldbus System

Cylinder port size C3 With 3.2 One-touch fitting C4 With 4 One-touch fitting C6 With 6 One-touch fitting M5 M5 thread CM Mixed sizes and with port plug L3 Top ported elbow with 3.2 One-touch fitting L4 Top ported elbow with 4 One-touch fitting L6 Top ported elbow with 6 One-touch fitting L5 M5 thread B3 Bottom ported elbow with 3.2 One-touch fitting B4 Bottom ported elbow with 4 One-touch

48

150, 200 44.5 30 12 11.5 3 32 15 7.5 13 109 16 8 16 21 M6 x 1 15 M6 x 1 40 (32 x 2) 54 37 16 13 4 41 19.5 21 12 17.5 9 120 20.5 4 20.5 27 M8 x 1.25 20 M6 x 1 Bore size OA OB OL P PD PE PW Q R S T U VA WA X YY YL Z Nil TN TF Nil TN TF 20 (16 x 2) 4.3 8 3.5 M5 x 0.8 7.5 19 21 10 36 18 66 54 75 15.9 29 M5 x 0.8 7.5 4.5 25 (20 x 2) 4.3 8 4 M5 x 0.8 9.5 22 22 12 38 22 75 60 84 12.7