VFR External pilot port Rc 1/8 6.8 to 10 G 1/2 4-Rc 1/8 (PE port) 4-Rc 1/8 (PE port) 208.5 196.5 External pilot port PE X PE PE PE Rc 1/8 X EB EA P EB EA P 81 67 50 31 81 67 50 31 6-Rc 3/4 (P , EA, EB port) 37 37 43 72 61 37 37 6-Rc 3/4 (P , EA, EB port) 72 61 43 Formula for manifold weight M = 0.811n + 1.231 (kg) n: Stations n: Station Stations Formula L1 = 51 x n + 92 L2 = 51 x n + 110 2 194
, M5 60.3 C3: One-touch fittings for 3.2 Manual override C4: One-touch fittings for 4 C6: One-touch fittings for 6 M5: M5 thread (C3,C4,C6) 47.5 9.5 (M5) 26.5 25.5 5.4 18.5 5 23.2 Mounting holes 10 (47.5) 3-M5 X 0.8 P, R port 9.9 9.9 5 1 3 2-PE port 22.2 Die cast hole For manifold gasket positioning L plug connector (L): VQZ122 wLwC3, C4, C6, M5 0 1 M plug connector (M): VQZ122 wMwC3, C4
O.D.: 8 2One-touch fitting (X, PE ports) Applicable tubing O.D.: 6 2n1-M5 x 0.8 [4(A), 2(B) port] Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Applicable connector: D-sub equivalent JIS-X-5101 MIL-C-24308 (L4) L3 (3.2) 101.2 3.5 (With switch mounted) 8 Switch
O.D.: 8 2One-touch fitting (X, PE ports) Applicable tubing O.D.: 6 2n1-M5 x 0.8 [4(A), 2(B) port] Applicable connector: D-sub equivalent JIS-X-5101 MIL-C-24308 (L4) L3 (3.2) 101.2 3.5 (With switch mounted) 8 Switch for locking a connector 3.1 8 36.3 58.2 5.5 5.3 FREE LOCK 35 18 28.8 47.6 Terminal no. 1 7.9 DIN rail 6 Manual override Press and turn for the locking type. 4(A): Orange 2(B):
AC200230V AC100120V 40 M5 3.24[Nm] M5 3.24[Nm] 6 AC100120V AC200230V AC100120V AC200230V L1 L1 PE PE L2 2-M5 2-M5 L2 L3 CNP1 CNP1 N N P1 P1 M4 1.2[Nm] P2 P2 M4 1.2[Nm] P P C C CNP2 D CNP2 D L11 L11 L21 L21 U U CNP3 V CNP3 V W W 9 2 9 (2) LECSS-S8 [mm] 5 40 6 6 6 (80) (170) 6 6 () CN4 CN2L CN2 CN1B CN1A CN3 CN5 CNP1 L1 L2 L3 N P1 P2 P C D L11 L21 U V W L1 L2 () L3 N P1 CNP2 P2
Protective earth Connect it to the grounding terminal of the servo motor and to the protective earth (PE) of the cabinet for grounding. (PE) 3 15 3.
C4: 4 (SMC) N3: 5/32" (SMC) One-touch fitting [PE: Pilot EXH port] Applicable tube O.D.
Note 1) For preventing electric shock, be sure to connect the servo amplifier,s protective earth (PE) terminal to the control panel,s protective earth (PE).
x 0.5, piping not required) 71.9 (63.1) (M5 x 0.8) 66.9 Vacuum port (V port) Note 4) PE SMC (M5 x 0.8) 29.4 3 20.2 P 20.3 9.7 V Exhaust part 0.8 17.7 22.8 107 3.5 10 Note 1) The above dimensions are for ZQ11U-G2 L-DC.
) Note 4) PE (M5 x 0.8) 29.4 3 20.2 P 20.3 9.7 V Exhaust part 0.8 17.7 22.8 87.2 10 Note 1) The above dimensions are for ZQ11U-J2 L-F.
2-3/8 Ports R1, R2 (Port A) 17.5 13.5 (Port B) Indicator light SMC 2 4 T 5 1 3 16 16 13 A 40 53 66 53 66 B A VQ5000 2 4 14 5 1 3 12 Manual override 2-6.5 Mounting hole 17.5 13.5 35 53 35 53 3-1/2 Ports P, A, B Bottom ports 16 M5 ground screw SMC (Ports A, B) 26.5 18 31.5 37 41 50 98 PE X P R1 R2 27.5 41 41 27.5 1/8 Port PE 1/8 External pilot port 5-1/2 Ports P, A, B, R1, R2 0 1 G H 2 position
BAT6V1SET (38.5) 4 0.8 [kg] M5 3.24 [N m] CNP1 CNP2 CNP 3 L1 P+ U (40) 2-M5 6 C D V L2 (6) L3 W NP3 L11 L21 P4 1560.5 (168) PE M4 1.2 [N m] (6) 9 2 9
X A 4 A 4 A 4 A 4 A 4 P 1 A 4 A 4 A 4 A 4 P 1 A 4 2-One-touch fitting 2-One-touch fitting (P, R ports) Applicable tube O.D.: 8 (X, PE ports) Applicable tube O.D.: 6 2n1-M5 x 0.8 (A, B ports) Applicable connector: D-SUB equivalent { } JIS-X-5101 MIL-C-24308 (L4) L3 Lateral connector entry Connector case attachment lever (both sides) (3.2) 101.2 3.5 (With switch mounted) 9 3.1 8 36.3 58.2
2-3/8 Ports R1, R2 (Port A) 17.5 13.5 (Port B) Indicator light SMC 2 4 T 5 1 3 16 16 13 A 40 53 66 53 66 B A VQ5000 2 4 14 5 1 3 12 Manual override 2-6.5 Mounting hole 17.5 13.5 35 53 35 53 3-1/2 Ports P, A, B Bottom ports 16 M5 ground screw SMC (Ports A, B) 26.5 18 31.5 37 41 50 98 PE X P R1 R2 27.5 41 41 27.5 1/8 Port PE 1/8 External pilot port 5-1/2 Ports P, A, B, R1, R2 0 1 G H 2 position
C3: One-touch fitting ass'y for 3 2n-C3, C4, C6, M5 VQZ C3: One-touch fitting ass'y for 3 C4: One-touch fitting ass'y for 4 C4: One-touch fitting ass'y for 4 C6: One-touch fitting ass'y for 6 M5: M5 thread C6: One-touch fitting ass'y for 6 M5: M5 thread VQD 45.5 2.5 10.5 (5) 21.5 VZS Dimensions Equation L1=11n+20 n: Staion ( Max. 24 stations) 7.5 L n 1 31 50 60.5 2 42 62.5 73 3 53 75 85.5
for 1/4" M5: M5 thread 53 13.8 A 2 10 Manual override 24.5 7.8 (N1, N3, N7) (M5: 5.7) Cover diameter 1.4 Cross sectional area 0.2mm2 (Lead wire length) 300 SMC 27.5 16.3 18 13.6 7 23.4 Mounting holes 41 M5 x 0.8 P port M5 x 0.8 R port R 3 P 1 10.7 9 M5 x 0.8 External pilot port 32 (Only external pilot port type(R)) L type plug connector (L): VQZ115L -N1, N3, N7, M5 M type plug connector
For grounding actuator, connect the copper wire of the actuator to the drivers protective earth (PE) terminal and connect the copper wire of the driver to the earth via the control panels protective earth (PE) terminal. Do not connect them directly to the control panels protective earth (PE) terminal. Control panel Driver PE terminal Actuator 2.
0 SJ SY SV SYJ SZ VP4 o r o r S0700 y PE 5(EA) 4(A) 1(P) 2(B) 3(EB) Bleed PE 5(EA) 4(A) 1(P) 2(B) 3(EB) PE VQ 5 1 3 w VQ4 VQ5 VQC 3 position closed center/exhaust center/pressure center VQZ Closed center: VFR630 !1 i q !
. 168 156 0.5 PE 3-M5 screw Screw size: M4 Tightening torque: 1.2 [N m] 42 0.3 Approx. 12 Approx. 6 Mounting hole process drawing 9 4 9.
M5 148.5 For M5 M5 150.5 For M6 M6 165.5 For M6 M6 169.5 For M8 M8 181.5 For M8 M8 186 For M8 M8 190 8 Coolant Valve Series SGH External pilot solenoid type U F L S K Manual override (Non-locking) Pilot port Pilot EXH port (Filter standard installation) Q: Female thread for mounting bracket 4 threads on each side. 8 threads in total. 12 PE E Bracket R Main port T J D 1 3 2 O I N M C B P: