Table of Contents

N] F=-q x PA+w x PC F=q x PA+(e-q) x PC F=-q x PA+r x PB+(w-e) x PC F=q x PA q, w and e are piston areas.

ZP

Model A B C D E Y Y B C D A E Flat Model ZPY10D--A10 10 12 15 25 41 6 Flat with ribs U C ZPY16D--A10 ZPY10 -A10 16 18 16 26 42 7 15 12 22 1.7 10 12 1.8 3 38 ZPY13 -A10 U C 13 Dimensions by Stroke ZPY16 -A10 U C 38.5 16 18 12.5 22.5 1.2 3.5 10 16 H Model Dimensions by Stroke F G F G 10, 13 16 ZPYD10--A10 52 23 86 53 87 H Model F G F G ZPYD20--A10 62 124 63 125 51 U C U C U C U C U C ZPYD30

ZP

E F Flat Flat with ribs H: M5 x 0.8 H: M6 x 1 Y H: M6 x 1 H: M8 x 1 Y Model A B C F G C F G Flat Flat with ribs D E Model A ZPT10 U C ZPT13 U C ZPT16 U C U C U C 10 12 1.7 ZPT40 40 43 6.5 15 4.5 40.5 18.5 24.5 50.5 3.3 17 38 43 3 12 3.8 25 3 41.5 25 13 15 20 1.8 ZPT50 50 53 7.5 19.5 25.5 51.5 12.5 16 18 17.5 38.5 43.5 3.5 1.2 Deep Deep H: M6 x 1 H: M8 x 1 Y B C F G C F G D E Model A H: M5

Metal Seal/Rubber Seal Series VQ Body Ported

F kit (D-sub connector) T kit (Terminal block) P kit (Flat ribbon cable connector) S kit (Serial) kit U S F 15P U S P 26P U S A S U S P 20P U S P 16P U S P A B C 10P F 25P T2 T1 Type Note) Note) Note) Max. points 14 8 8 16 16 16 16 16 14 Note) Due to the limitation of internal wiring.

ZP

Model A B C D E Y Y B C D A E Flat Model ZPY10D--A10 10 12 15 25 41 6 Flat with ribs U C ZPY16D--A10 ZPY10 -A10 16 18 16 26 42 7 15 12 22 1.7 10 12 1.8 3 38 ZPY13 -A10 U C 13 Dimensions by Stroke ZPY16 -A10 U C 38.5 16 18 12.5 22.5 1.2 3.5 10 16 H Model Dimensions by Stroke F G F G 10, 13 16 ZPYD10--A10 52 23 86 53 87 H Model F G F G ZPYD20--A10 62 124 63 125 51 U C U C U C U C U C ZPYD30

V

B U F F E R 40~50 Symbol Stroke 2~8 10~16 20~32 K6 6mm Non-Rotating K10 10mm Non-Rotating J10 10mm With Buffer J6 6mm With Buffer F L AT T Y P E F L AT W I T H R I B Model A B C D E F G H I Y Flat Flat with Rib ZPR40 U C 40 43 18.5 32 42.8 60.6 72.6 122.6 140.6 6.5 3.3 A P P L I C A B L E T U B E ZPR50 U C 50 53 19.5 33 43.8 61.6 73.6 123.6 141.6 7.5 3.8 Applicable Tube OD P Q R S D E E

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

VV5FS2 1 06 01 01F 1 U Nil N Rc NPT NPTF G Series VFS2000 Manifold Plug-in type With D-sub connector T F Symbol Passage EA,EB P Porting specifications A, B U side Symbol Connector mounting direction Option Port size 1 2 Side Bottom D side mounting U side mounting D U Symbol 01 02 A, B P, EA, EB Common Common 1 8 Rc Rc Rc M Mixed 3 4 5 6 7 8 Option Side Bottom Common Individual 1 4 1 4 Stations

Base Mounted Metal Seal/Rubber Seal Series VQ

T kit (Terminal block) P kit (Flat ribbon cable connector) S kit (Serial transmission) Kit F kit (D-sub connector) F 25P U S P 26P U S F A 15P U S P C 20P U S P 16P U S B P A 10P U S S Type T1 T2 Max. points Note) 16 Note) 16 16 16 Note) 16 14 14 8 8 Note) Due to the limitation of internal wiring.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Quick wiring permits ease of installation. 01C VV5FR5 1 D 05 04 CE-compliant Stations Series VFR5000 Manifold Q CE-compliant Nil 02 2 stations Plug-in Type with multi-connector 08 8 stations Connector mounting direction Thread type U side Max: 8 stations U side mounting D U Port size D side mounting Nil Rc G F A, B P , EA, EB Plug assembly (Option) Refer to page 1326.

0.4

P, J, L, S kit) D side end plate assembly SUP/EXH block assembly Valve and manifold block assembly U side end plate assembly y F kit P (J) kit L kit S kit !

SQ1000/2000

plate assembly u F kit L kit T kit S kit P (J) kit q !

Table of Contents

A F u Pilot solenoid valve SF4--23 (Refer to the table below.)

Modular Design with Uniform Body Style

A A J M N F S 2 x P1 (Port size) 2 x P1 (Port size) J M R R V2 V1 Q1 Q1 B C C B V2 V1 Q2 Q1 Q1 K K OUT OUT IN IN U U P2 G Clearance for maintenance (Pressure gauge port size) Drain P2 E G Clearance for maintenance (Pressure gauge port size) Drain AC40-D to AC40-06-D A N F S M J R V1 V2 Q2 Q1 Q1 B C OUT IN 2 x P1 (Port size) U P2 E G Clearance for maintenance (Pressure gauge port size) Drain

ZP

Note) ;in the table indicates the pad material "N, S, U, F, GN, GS." Note) ;in the table indicates the pad material "N, S, U, F, GN, GS." Note) ;in the table indicates the pad material "N, S, U, F, GN, GS."

42

U D U D Thread type Nil Rc F G N NPT T NPTF Refer to page 534 (Grommet type) for wiring specifications.

0.4

Linearity (77F) 0.15% F .S. Repeatability (77F) 0.6% F .S. 0.5% F .S.

VFS

VV5FS2 01F 1 U 1 06 01 Nil N Rc NPT NPTF G Symbol Plug-in type With D-sub connector Series VFS2000 Manifold Connector mounting direction T F Porting specifications A, B Passage EA, EB P U side Symbol Option 1 2 Side Bottom D side mounting U side mounting D U Port size Common Common A, B P, EA, EB Symbol 01 02 3 Side Bottom Individual Common 1 8 Rc Rc Rc M Mixed 4 Stations 1 4 1 4 Junction

5 Port Solenoid Valve Series SY3000/5000/7000/9000

D B U D SS5Y3-45F Stations .

ZP3

Form w 1 Material e Connection 0.82 thread N S U F GN GS ZP3 T 015 02 035 U Construction p. 160 A3 Adapter Assembly p. 162 1 N: NBR, S: Silicone rubber, U: Urethane rubber, F: FKM, GN: Conductive NBR, GS: Conductive silicone rubber 2 Indicates the minimum hole size of the adapter or vacuum pad ZP3 015 U T N B3 w q e Connection thread (Female thread) Width across flats 5 M3 x 0.5 3.5 B3

AC Servo Motor Driver (Pulse input type/Positioning type ）

1 A Q a q 0 0 1 0 2 STX DC2 2 B R b r 0 0 1 1 3 ETX DC3 # 3 C S c s 0 1 0 0 4 $ 4 D T d t 0 1 0 1 5 % 5 E U e u 0 1 1 0 6 & 6 F V f v 0 1 1 1 7 7 G W g w 1 0 0 0 8 ( 8 H X h x 1 0 0 1 9 ) 9 I Y i y 1 0 1 0 10 * : J Z j z 1 0 1 1 11 + ; K [ k { 1 1 0 0 12 , < L l | 1 1 0 1 13 = M ] m } 1 1 1 0 14 . > N ^ n 1 1 1 1 15 / ?