lVFl 10

Six station manifrcld ass'y: sta. 1-4) NVF'I'10-5G-017 sta. 5-6) NVF1 10-3G-017 NW3F1 -30-061-017 No. ot Stgliorg I l 5 I F Mounting Brackets tPoding 01 ,d' NPIF DltrlENSlON D E F G H J x ll ta o P n s T u w x z AA BB 3.78 (96) 3.41 1.77 (,r5)0.39 (10) o.59 (15) 0.20 (5) 0.63 (16) 1.O2 (28t 3.50 (89) 1 . 1 8 (30) 0.59 (15) 2.76 (70) o.87 (21) o_20 {5) 1 . 1 8 {30} 0.67 ltTl 0.59 (ls) o.32

3M/SMseries

(Austin) 2324-D Ridgepoint Drive Austin, TX 78754 Tel: (512) 926-2646 FAX: (512) 926-7055 SMC Pneumatics Inc. (Nashville) 5000 Linbar Drive, Suite 297 Nashville, TN 37211 Tel: (615) 331-0020 FAX: (615) 331-9950 SMC Pneumatics Inc. (Dallas) 12801 N. Stemmons Frutry, Ste.815 Dallas, TX 75234 rel: (972\ 406-0082 FAX: (972) 406-9904 SMC Pneumatics lnc.

ZQ-OM01401

Q1 5 4 () 1) () Q2 1)+COM (4) 7) (2)1U (3)J1,J2, Q2 (11) (P ) L L 0.3m 0 (M5x0.8) LO L 2 4 3 6 (5) 5 4 2) B (12) (2):1U 2)(3)Q1 8) (3)Q2 Assy N C 3) ) (6) ( D [kPa] (2):3M EA NPN2 9) 8) (PD) EB PNP2 0 to -100 EC NPN1 + S EE PNP1 + C FA NPN2 D FB PNP2 -100 to 100 8)VQ100 Ass yP.41 FC NPN1 + FE PNP1 + (3)Q2 (4)LO 9)(3)J1,J2Q2 P.6 (3)C 4) F 3) ZFC 4

ZL3-OM00601

(mg/m3) 0.1 d 0.5 0.5 d 1.0 1.0 d 5.0 point() 1 20,000 400 10 1 -70 1 0.01 2 400,000 6,000 100 2 -40 2 0.1 3 Not specified 90,000 1,000 3 -20 3 1 4 Not specified Not specified 10,000 4 +3 4 5 5 Not specified Not specified 100,000 5 +7 6 +10 3.3.2 Air pressure 1) Operation with a pressure exceeding the maximum operating pressure leads to breakage of the product.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Series 10/11 -CQSX Series10/11 -CQ2X How to Order How to Order Clean room series 10 11 Clean room series 10 11 Relieving type Vacuum type Relieving type Vacuum type C(D)QSX B 20 10 30 A90 C(D)Q2XB 40 10 30 A73 D D With auto switch With auto switch (with built-in magnet) (with built-in magnet) Microspeed cylinder Microspeed cylinder Mounting Cylinder stroke (mm) Bore size Number of auto

3 Way, 3 Port NVF110 Series Direct Solenoid Operated

Six station manifrcld ass'y: sta. 1-4) NVF'I'10-5G-017 sta. 5-6) NVF1 10-3G-017 NW3F1 -30-061-017 No. ot Stgliorg I l 5 I F Mounting Brackets tPoding 01 ,d' NPIF DltrlENSlON D E F G H J x ll ta o P n s T u w x z AA BB 3.78 (96) 3.41 1.77 (,r5)0.39 (10) o.59 (15) 0.20 (5) 0.63 (16) 1.O2 (28t 3.50 (89) 1 . 1 8 (30) 0.59 (15) 2.76 (70) o.87 (21) o_20 {5) 1 . 1 8 {30} 0.67 ltTl 0.59 (ls) o.32

9.8

D-DN

AKH/AKB Series

Model D L M AKH04-00 AKH06-00 AKH08-00 AKH10-00 AKH12-00 3 5 10 17 25 4 6 8 10 12 2.8 6.5 14 24 34 9.3 11.6 15.2 18.5 21.7 33.5 37.1 53.3 63.6 70.2 12.7 13.5 18.5 21 22 2-Applicable tubing D Inch Size Weight g Effective area (mm) Applicable tube O.D.

VDW

Series Option VV2DW2-05011 set VDW23-5G-25 sets Manifold part no. Valve part no. (Stations 1 to 5) 1 2 3 10 20 30 None With bracket Nil F Note) Type 30 is available only with bracket. Enter together in order, counting from station 1 on the D side. is the symbol for assembly. Add an in front of the part numbers to have solenoid valves, etc. mounted on manifold.

VDW Series

Series Option Example VV2DW2-0501 ... 1 set Manifold part no. 1 2 3 10 20 30 None With bracket Nil F VDW23-5G-2 ... 5 sets Valve part no. (Stations 1 to 5) Note) Type 30 is available only with bracket. "" is the symbol for mounting. Add "" in front of the part numbers for solenoid valves, etc., to be mounted. Enter together in order, counting from station 1 on the D side.

ZL3-OM00801

0.5 0.5 d 1.0 1.0 d 5.0 () (mg/m 1 20,000 400 10 1 -70 1 0.01 2 400,000 6,000 100 2 -40 2 0.1 3 90,000 1,000 3 -20 3 1 4 10,000 4 +3 4 5 5 100,000 5 +7 6 +10 3.3.2 1 9 No.ZL3-OM00801-A 3.4 3.4.1 P5 (2/V) (3/E) G (1/P) 06 Rc3/4 Rc1 Rc1/8 04 Rc1/2 F06 G3/4 8() G1 G1/8 F04 G1/2 N06 NPT3/4 5/16(inch) N04 NPT1/2 NPT1 NPT1/8 3.4.2 1) 2), 3) 1 (2/V) 1 (G) 40

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

Series Option Example VV2DW2-0501 ... 1 set Manifold part no. 1 2 3 10 20 30 None With bracket Nil F VDW23-5G-2 ... 5 sets Valve part no. (Stations 1 to 5) Note) Type 30 is available only with bracket. "" is the symbol for mounting. Add "" in front of the part numbers for solenoid valves, etc., to be mounted. Enter together in order, counting from station 1 on the D side.

Air cylinder

D-M9NAM9PAM9BAM9NAM9PAVM9BAV (2) Make sure that auto switch mounting band is not slanted.

Air cylinder

D-M9NAM9PAM9BAM9NAM9PAVM9BAV (2) Make sure that auto switch mounting band is not slanted.

SMC Electronic Switch Series Variations

The signal has to be converted by a A/D converter for pressure display or switch output. Current Output signal is a current signal in the range of 4 to 20[mA]. The signal is transformed into a voltage signal before being converted by a A/D converter for pressure display or switch output.

AKH/AKB Series Check Valve with One-touch Fitting

Model D L M AKH04-00 AKH06-00 AKH08-00 AKH10-00 AKH12-00 3 5 10 17 25 4 6 8 10 12 2.8 6.5 14 24 34 9.3 11.6 15.2 18.5 21.7 33.5 37.1 53.3 63.6 70.2 12.7 13.5 18.5 21 22 2-Applicable tubing D Inch Size Weight g Effective area (mm) Applicable tube O.D.

ITV_P-E

( di spl ayed al t ernat el y) Press Skey f or 2 seconds or m ore, t hen go out f rom det ai l set t i ng m ode. ( Sel ect t he m enu w i t h or keys, t hen j um p t o anot her i t em . ) Lock keys ( ref er t o P9) Rel at i on bet w een set t i ng and sensi t i vi t y Sensi t i vi t y Sharp D ul l Set t i ng of sensi t i vi t y D ef aul t : 13 - Zero clear The display can be reset to

Microspeed Cylinder: Double Acting/Single Rod Series CQ2X ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Grease pack GR-L-005 (5g) GR-L-010 (10g) GR-L-150 (150g) 8

Microspeed Cylinder: Double Acting/Single Rod Series CUX ø 10, ø 16, ø 20, ø 25, ø 32 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Port thread type (for 32) Nil TN TF Rc NPT G Action D Double acting M5 for 15 to 25.

3 Port Solenoid Valve Series SYJ300/500/700

N.O. 1 (P) 3 (R) 1 (P) 3 (R) a c e d a c e d (A) (A) 2 2 g g 3 (R) 1 (P) 3 (R) 1 (P) b b f f Component parts Replacement parts Note Zinc die-casted No.