5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 threads 41 P = 16 Broken lines and dimensions inside ( ) indicate type [-D] (with DIN rail mounting bracket) and horizontal connector entry [-JS].

Vacuum System Peripherals:

(When port sizes for A, B ports are mixed, indicate C4 or C6 in cell .)

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

Note 3) Refer to page 6 for DIN rail weight. 1 Cassette Type Manifold Series SY3000/5000/7000 How to Order Valves SY 3 1 60 5 L C6 Series 3 5 7 Symbol M5 C4 C6 01 C4 C6 C8 02 C8 C10 SY3000 SY5000 SY7000 A, B port size Port size M5 x 0.8 4 One-touch fitting 6 One-touch fitting Rc(PT)1/8 4 One-touch fitting 6 One-touch fitting 8 One-touch fitting Rc(PT)1/4 8 One-touch fitting 10 One-touch

PFxx-OMJ0005CN

8.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 8.3 C6 6 10.3 8.3 C8 8(5/16) 12 10 C8 8(5/16) 12 10 N7 1/4 10.3 8.3 N7 1/4 10.3 8.3 PFM7-01/02--X693 PFM7S-01/02--X693 A B C() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 NPT1/81/4 13 11 17 13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 A B A B C4 4(5/32) 10.1 36.1 C4 4(5/32) 10.1 8.1 C6 6 10.3

3 Port Solenoid Valve

Terminal no. 16 16 43 43 Length indication label Length indication label 10 11 19 10 9 2 1 2 1 20 SMC SMC 33.4 33.4 030 015 41 41 25 Approx. 10 Approx. 10 17 8 18 8 7 6 14 26 15 9 2 x M2.6 x 0.45 For N, 2 x No. 4-40 UNC For N, 2 x No. 4-40 UNC 2 x M2.6 x 0.45 Socket section Socket section D-sub Connector Cable Assembly D-sub Connector Cable Assembly Cable length L Assembly part no.

Secondary Batteries

C6 X121 90-VQ1000 Series compatible with secondary batteries For blanking manual specification 90 Material restriction OUT side port size One-touch fitting for 4 One-touch fitting for 6 C4 C6 IN side port size One-touch fitting for 4 One-touch fitting for 6 C4 C6 *Specifications and dimensions for the 90-series are the same as standard products. 90 X121 VQ2000 FPG 01 01 90-VQ2000 Series

Air Cylinder NCA1 Series

Composite tube only) S T Y L E Standard Cylinder W Double Rod (Please see Page 19 for Mounting Information) K Non-rotating Piston Rod (5 to 14) O P T I O N S A Special Rod Thread (See Page 22) B5 Oversized Rod (See Char t below) B6 High Temperature * C3 Por t and Cushion Location (see Page 23) C6 Stainless Steel Piston Rod (Std. on XTSS series) C8 Adjustable Stroke Extended Piston Rod *

NCA1

Composite tube only) S T Y L E Standard Cylinder W Double Rod (Please see Page 19 for Mounting Information) K Non-rotating Piston Rod (5 to 14) O P T I O N S A Special Rod Thread (See Page 22) B5 Oversized Rod (See Char t below) B6 High Temperature * C3 Por t and Cushion Location (see Page 23) C6 Stainless Steel Piston Rod (Std. on XTSS series) C8 Adjustable Stroke Extended Piston Rod *

Compact Manifold Regulator Series ARM5

Size 4 6 5/32 1/4 Size 6 8 1/4 5/16 Symbol C4 C6 N3 N7 Symbol C6 C8 N7 N9 Straight type Elbow type Straight type Elbow type V R W X S T Y U One-touch fittings for regulator block One-touch fittings for centralized supply block Fitting size Elbow W Elbow X Elbow Y Straight V Fitting size Elbow S Elbow T Elbow U Straight R 4, 5/32 2.5 6 11 35.5 4, 5/32 6 3 6.5 11 36 6 3 12.5 19 35.5 1/4 6.5

PSxx-OMM0006CN

-35-D (W1,WF1,M5,C4,C6) ZS-35-F +(01,N01) ZS-35-G +(W1,WF1,M5,C4,C6) -10No.PS-OMM0006CN-E M8(3 ) 01 N M L ISE40A 1/ 2 ISE40A -0.11.000 MPa Y ZSE40A 0.0-101.3 kPa K + T + 1 01 R1/8(M5) N01 NPT1/8(M5) A A D D N NPN1 M8 P PNP1 /M8 1 L M SI2 M8 P (psi)1 1 2kPaMPa 1 ZS-24-A A M35 L,M45 L, 2 ZS-24-D D M35 L,M45 L, 2 / V100-49-1-1 300 mm() V100-49-1-2 500 mm() V100-49-1-3 1000

Digital Pressure Switch

-I With bracket Bracket A 01/N01 type W1/WF1 type -66No.PS-OMM0007-I Bracket B W1/WF1 type -67No.PS-OMM0007-I Bracket D 01/N01 type W1/WF1 type -68No.PS-OMM0007-I Panel mount adapter 01/N01 type W1/WF1/M5/C4/C6 type -69No.PS-OMM0007-I Panel mount adapter + Front protective cover 01/N01 type W1/WF1/M5/C4/C6 type -70No.PS-OMM0007-I Panel cut-out dimensions -71No.PS-OMM0007-I 01/N01 type (products

Digital Flow Switch (Integrated display type)

PFM7-C4/C6/C8/N7--X693 PFM7S-C4/C6/C8/N7--X693 PFM7-01/02--X693 PFM7S-01/02--X693 -73No.PF-OMJ0006-J PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 PFM7-01/02--X694 PFM7S-01/02--X694 -74No.PF-OMJ0006-J For a mixture of Argon (Ar) and carbon dioxide (CO2) The mixture ratio can be selected from Ar : CO2 = 92 : 8, 90 : 10, 80 : 20, 70 : 30 or 60 : 40.

VK300

(S) 42 Manifold base Manifold base Caution Mounting Screw Tightening Torques M3: 0.6 Nm Body ported VK300-41-1A Base mounted VK300-41-2A Manifold gasket and screw assembly Note 1) Mounting direction is fixed, do not mount on opposite side.

VK300

(-Q) (S) 42 (-Q) VV3K3-20 (-Q) 21 (-Q) VV5K3-20 (-Q) 21 (-Q) Manifold base Manifold base Caution Mounting Screw Tightening Torques M3: 0.6 Nm Body ported VK300-41-1A Base mounted VK300-41-2A Manifold gasket and screw assembly Note1) Mounting direction is fixed, do not mount on opposite side.

4/5 Port Air Operated Valve Series SYJA3000 1

(A) 4 (A) 4 (B) 2 (B) 2 (Example) SS5YJA7-41-03-01 1 pc. SYJA7140 1 pc. SYJA7240 1 pc. SYJ7000-21-1A 1 pc. 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 position exhaust center 3 position closed center (A) 4 (A) 4 (B) 2 (B) 2 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) The asterisk denotes the symbol for assembly.

Proposals for Energy Saving

H2 H1 Polyurethane tubing Needle sensing head (mm) Model Nozzle size D Connection size L1 L2 Cassette size A L2 A L3 H1 D KNP-2 0.7 4 5 41 12.7 1000 23 A 1m polyurethane tube is included. Cassette size L3 L1 Polyurethane tubing Use to measure work piece collision pressure.

Series: 3 (JSY3000), Type: 10 (Side-Ported), Connector Type: T (Terminal Block Box), Valve Stations: 3 Stations, P,E Port Location: D (D Side, 2 to 10 Stations), SUP/EXH Block: Internal Pilot, A,B Port Size: C6 (ø6 One-touch Fitting)

Series: 3 (JSY3000), Type: 10S (Side-Ported, Serial Interface, EX260), SI Unit: DB (EtherCAT - 16 Outputs - Connector M12), SI Unit Output Polarity: NPN, Positive Common, Valve Stations: 3 Stations, P,E Port Location: D (D Side, 2 to 10 Stations), SUP/EXH Block: Internal Pilot, A,B Port Size: C6 (ø6 One-touch Fitting)

Series: 3 (JSY3000), Type: 40 (Side Ported), Valve Stations: 3 Stations, P,E Port Entry: D (D Side), A,B Port Size: C6 (ø6 One-touch Fitting; Fixed)

Series: JSY3000, Type: Side-Ported, Connector Type: Terminal Block Box, Valve Stations: 3 Stations, P,E Port Location: D Side, 2 to 10 Stations, SUP/EXH Block: Internal Pilot, A,B Port Size: ø6 One-touch Fitting, Mounting: -, DIN Rail Option: -