5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

1 to 12 stations 24 D side D-sub connector (25P) kit, with 3.0 m cable D side D-sub connector kit D-sub connector (25P) kit, with 5.0 m cable Flat ribbon cable (26P) kit, without cable P kit Flat ribbon cable (26P) kit, with 1.5 m cable 24 stations 1 to 12 stations 24 (1) Flat ribbon cable (26P) kit, with 3.0 m cable D side Flat ribbon cable (26P) kit, with 5.0 m cable 26P 20P ( ) Flat ribbon

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

-m-L3m-mmm : 0 x 00016F (367) PF2M701-m-L4m-mmm : 0 x 000170 (368) PF2M725-m-Lm-mmm : 0 x 00017D (381) PF2M725-m-L2m-mmm : 0 x 00017E (382) PF2M725-m-L3m-mmm : 0 x 00017F (383) PF2M725-m-L4m-mmm : 0 x 000180 (384) PF2M702-m-Lm-mmm : 0 x 000171 (369) PF2M702-m-L2m-mmm : 0 x 000172 (370) PF2M702-m-L3m-mmm : 0 x 000173 (371) PF2M702-m-L4m-mmm : 0 x 000174 (372) PF2M750-m-Lm-mmm : 0 x 000181

A

m 0 . 0 1 m m 0 . 0 1 m m 0 . 0 1 m m 0 . 0 1 m m 0 . 0 1 m m Fluid A i r A i r A i r A i r A i r A i r Operating Pressure 0.2~0.6MPa 0.15~0.6MPa 0.2~0.6MPa 0.15~0.6MPa (29~87PSI) 22~87PSI 29~87PSI 22~87PSI Ambient and Fluid Temperature 0 ~ 6 0 C ( 3 2 ~ 1 4 0 F ) 0 ~ 6 0 C ( 3 2 ~ 1 4 0 F ) Max Operating Frequency 1 8 0 c . p . m 1 8 0 c . p . m Lubrication N o n l u b e N o n l u b

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

P 1 3 R 1.5 A Rc 1/8 3(R) port Rc 1/4 1(P) port 2-3 die-cast hole For manifold gasket positioning DIN terminal (Y): VQZ32(R)-Y-C6/C8/C10/02 L plug connector (L): VQZ32(R)-L-C6/C8/C10/02 89 300 (Lead wire length) Indicator light 30.5 <35.5> 92.5 Max. 10 Pg.7 Applicable cable O.D. 3.5 to 7 Indicator light Cover diameter 1.5 Cross section 0.23 mm2 < >: AC 61 53.5 M plug connector (M): VQZ32(

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

Pg.7 Indicator light 3.5 to 7 : AC 61.5 54 M plug connector (M): VQZ2l2(R)-lMl-C4, C6, M5 36 (Lead wire) Cover dia 1.5 Cross section 0.23mm2 300 89 Indicator light 77 78 37.5 42.5 : AC 2.10-9 VQZ100/200/300 Body Ported Dimensions: VQZ300 Valve single unit C6, C8, C10, 02 Grommet (G): VQZ3l2(R)-lGl-C6, C8, C10, 02 C6: One-touch fittings for 6 C8: One-touch fittings for 8 300 (Lead wire) 75.5

2-Color Display Digital Flow Switch Series PFM

(2 m) Z Without lead wire with connector W With lead wire with connector (2 m) + Rubber cover for connector (silicon rubber) ZS-33-F S 1 2 ZS-33-D S 1 2 ZS-33-D IN IN Lead wire length 2 m Lead wire length 2 m Option 2 R Bracket (For without flow adjustment valve) S Bracket (For with flow adjustment valve) T Panel mount adapter (For without flow adjustment valve) Nil None ZS-33-J ZS-33-M

5 Port Air Operated Valve Series SYA3000/5000/7000 1

VVPA4 5 0 04 04 1 Thread type Nil Rc G NPT NPTF VP 5 port Air operated manifold F N T 5 Base size Rc A, B Port size Rc 3 4 6 1 VVPA450 Symbol 04 Port size VVPA460 1 2 3 4 Mixed 1 06 10 M (2) Piping Note 2) In the case of mixed specifications, indicate M and specify port location sparately on a manifold specification sheet.

VQC

Blanking plate VVQ2000-10A-1 Individual SUP spacer VVQ2000-P-1-C8 SUP shutoff position: Specify 2 positions. Individual EXH spacer VVQ2000-R-1-C8 EXH shutoff position: Specify 2 positions.

4/5 Port Air Operated Valve Series SYJA3000

0.51 0.50 0.38 0.46 2.3 2.0 2.1 2.3 2.1 2.1 2.5 2.2 2.2 2.2 0.26 0.25 0.25 0.26 0.24 0.20 0.23 0.30 0.23 0.26 0.55 0.49 0.51 0.54 0.50 0.50 0.59 0.55 0.52 0.53 1/8 1/8 1/8 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/8 C6 C8 1/8 C6 C8 1/8 1/8 C6 C8 SS5YJ7-20 Body ported SYJ72 for internal pilot SS5YJ7-21 SS5YJ7-40 SS5YJ7-41 SS5YJ7-42-C6 SS5YJ7-42-C8 Base mounted SYJ74 for internal pilot Note) Value at

7.5

Supply pressure from the U side cannot be reduced. 3 When mounted on the side of the pressure gauge 63 Series SJ2000/3000 M Dual flow fitting (Set for SJ3000 series) SJ3000 120 1A C8 M Intermediate connector block assembly This connector block can be used by inserting it into the middle of the manifold.

VZS

O.D.: 6 C6 02 2 stations Embedded type One-touch fitting Applicable tubing O.D.: 8 M plug connector C8 24 24 stations Max. 24 stations.

5 Port Solenoid Valve, Series VQC

SUP port EHX I/O Cylinder port 2, 4 (A, B) 1, 3 (P, R) Serial unit: EX240 25-pin 26-pin 20-pin Conforms to IP67 Conforms to IP67 C3 (for 3.2) C4 (for 4) C6 (for 6) M5 (M5 thread) C8 (for 8) N9 (5/16") N1 (1/8") N3 (5/32") N7 (1/4") C4 (for 4) C6 (for 6) C8 (for 8) C10 (for 10) N3 (5/32") N7 (1/4") N9 (5/16") N11 (3/8") C8 (for 8) C10 (for 10) C12 (for 12) ^{Rc 1/2 N7 (1/4") N9 (5}

New

Reduced apparent power 10 VA m 7 VA (Size 1) Normally Closed (N.C.)

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

VQC SQ VQ0 VQ4 VQ5 VQZ VQD Plug lead type Plug-in type 2n-Rc 1/4, 3/8, C8, C10, C12 4(A), 2(B) port Rc 1/4: Rc 1/4 thread Rc 3/8: Rc 3/8 thread C8: One-touch fitting for 8 C10: One-touch fitting for 10 C12: One-touch fitting for 12 Lead wire length L0: 600 mm L1: 1500 mm L2: 3000 mm 2n-Rc 1/4, 3/8, C8, C10, C12 4(A), 2(B) port Rc 1/4: Rc 1/4 thread Rc 3/8: Rc 3/8 thread C8: One-touch fitting

MGG

Locking type While pushing the M/O knob, turn it 90 counterclockwise. The lock is released (and remains in a released state) by aligning the mark on the cap with the OFF mark on the M/O knob. To operate the lock, turn the M/O knob 90 clockwise while pushing it all the way down, and align the mark on the cap with the ON mark on the M/O knob.

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

side D side 3 m D-sub connector cable AXT100-DS25-030 Cylinder port fitting C8: 8 One-touch fittings Manifold base (8 stations) 10-SS5Q23-08FD2-D F kit (D-sub connector kit) 10-SS5Q23-08FD2-D 1 set (F kit 8-station manifold base) 10-SQ2131-51-C8 3 sets (2 position single) 10-SQ2231D-51-C8 3 sets (2 position double) 10-SQ2331-51-C8 1 set (3 position closed center) SSQ2000-10A-3 1

VZ5000

-01 G H Manual override (Non-locking) (Mounting hole for manifold) (Lead wire length) G: 300 mm H: 600 mm (Mounting hole) (PE port) (Piping port) L plug connector (L) VZ5220-L-01 M plug connector (M) VZ5220-M-01 (Lead wire length) 300 (Lead wire length) 300 : With light/surge voltage suppressor DIN terminal (D) VZ5220-D-01 Built-in One-touch fittings VZ5220--C6 C8 C6: MAX. 6 C8: MAX. 6.5

Intrinsically Safe Valve

0.50 0.32 [0.44] 0.41 0.56 [0.44] 1.8 C8 8 Onetouch fitting Single 4position dual 3 port 53-SY9 20-C8 1.5 N.C.

RSQ

MI W S 100 200 50 CEP1 130 50 100 50 40 40 CE1 40 Weight of transferred object m (kg) Weight of transferred object m (kg) 32 30 40 50 CE2 20 30 32 20 ML2B 20 16 10 C J G5-S 10 12 5 4 CV 3 4 5 3 MVGQ 2 2 CC 1 1 RB 1 5 10 20 10 5 1 20 30 Transfer speed (m/min) Transfer speed (m/min) J Lateral Load and Operating Pressure DThe larger the lateral load, the higher the operating pressure required

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Manual release, Lock type While pushing the M/O knob, turn it 90 counterclockwise. The lock is released (and remains in a released state) by aligning the mark on the cap with the OFF mark on the M/O knob. When locking is desired, turn M/O button clockwise 90 while pushing fully, correspond on cap and ON mark on M/O button. The correct position is confirmed by a click sound click.