5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

If 12VDC specifications are required, enter "12" at the end of the assembly part number. 1 2 1 2 P N D side SZ3000-40-6A-D For flat cable 20 pins SZ3000-40-5A-D 1 2 1 2 P N D side SZ3000-40-8A-D For flat cable 10 pins SZ3000-40-7A-D A connector block assembly can be shipped as an assembly only in the case of double wiring.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

(The standard valve has an individual exhaust for the pilot valve.) 4-14-40 41 Series VQZ Replacement Parts Base Mounted One-touch Fitting Assembly (For cylinder port) C3 C4 C6 C8 C10 Fitting size M5 (VQZ100 only) Model VQZ100 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 V100 VQZ200 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 VQZ300 VVQ2000-51A-C6 VVQ2000-51A-C8 VVQ2000-51A-C10

SYA3000/5000/7000

Closed center Exhaust center Pressure center 48 SYA320-C4 M5 x 0.8 M5 x 0.8 One-touch 0.35 0.16 0.42 [0.41] 0.34 [0.37] 0.63 0.11 [0.11] 3 position fitting for 4 0.76 [0.46] 0.42 [0.34] 0.21 [0.12] 0.59 0.29 0.15 40 42 Single Double 2 position 0.30 0.19 0.65 0.39 0.76 0.17 0.55 0.24 0.60 0.33 0.76 0.16 C6 Closed center Exhaust center Pressure center 44 SYA320-C6 One-touch 0.32 0.16 0.64

SZ3000

Type of actuation Plug Plug (A) 4 (B) (2) (A) (4) (B) 2 Single Number of solenoids Common connector assembly SX100-40-4S 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) Common connector assembly (With common lead wire) SX100-40-4S Plug Plug (A) (4) (B) 2 (A) 4 (B) (2) Double SS5Z3-60-04D1 set SZ3160-5MO2 sets SZ3260-5MO2 sets SX100-40-4S1 set (with common Lead wire for single solenoid) SX100-42-4S1

SZ3000

Type of actuation Plug Plug (A) 4 (B) (2) (A) (4) (B) 2 Single Number of solenoids Common connector assembly SX100-40-4S 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) Common connector assembly (With common lead wire) SX100-40-4S Plug Plug (A) (4) (B) 2 (A) 4 (B) (2) Double SS5Z3-60-04D1 set SZ3160-5MO2 sets SZ3260-5MO2 sets SX100-40-4S1 set (with common Lead wire for single solenoid) SX100-42-4S1

5 Port Air Operated Valve SYA3000/5000/7000 Series

48 SYA320-C4 One-touch M5 x 0.8 M5 x 0.8 0.63 0.16 0.42 [0.41] 0.34 [0.37] 0.35 0.11 [0.11] 3 position fitting for 4 0.76 [0.46] 0.21 [0.12] 0.59 0.29 0.42 [0.34] 0.15 40 42 Single Double 2 position 0.76 0.19 0.65 0.39 0.30 0.17 0.76 0.24 0.60 0.33 0.55 0.16 Closed center Exhaust center Pressure center C6 44 SYA320-C6 One-touch 0.65 0.16 0.64 [0.42] 0.31 [0.36] 0.32 0.17 [0.11] 3 position

VZ100/300/500

0.8 1/8 F G 20 20 stations A port M5 x 0.8, 1/8 N NPT Z NPTE Note) For more than 9 stations, supply air to both sides of P port and exhaust air from both sides of R port. 40-1 How to Order Applicable solenoid valve VZ314VZ314MVZ324VZ324MApplicable blanking plate assembly DXT200-8-3A VV3Z3 40 05 1 C6 R port P/R port Thread type Stations A port side P port M5 01 C4 C6 B3 B7 2 stations 02 M5

PFxx-OMJ0005CN

) 10.1 8.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 8.3 C6 6 10.3 8.3 C8 8(5/16) 12 10 C8 8(5/16) 12 10 N7 1/4 10.3 8.3 N7 1/4 10.3 8.3 PFM7-01/02--X693 PFM7S-01/02--X693 A B C() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 NPT1/81/4 13 11 17 13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 A B A B C4 4(5/32) 10.1 36.1 C4 4(5/32) 10.1 8.1

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

-M5 Type SS3YJ5-40-01 C4 1/8 1/8 M5 x 0.8 Base mounted for internal pilot Type SS3YJ5-41-M5 SYJ54 1/8 Type SS3YJ5-41-01 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5 x 0.8 1/8 SYJ54R Type SS3YJ5-41R

smcmaintenancepartslist

Material Applicable model Note) Qty. 3 5 3 5 3 5 FGF3A-40 FGF5A-60 FGF3B-40 FGF5B-60 FGF3-40 FGF5-60 FGFS3-40 FGFC3-40 FGFS5-60 FGFC5-60 FGFL3-40 FGFR3-40 FGFL5-60 FGFR5-60 FGFS3-40 FGFC3-40 FGFS5-60 FGFC5-60 FGFL3-40 FGFR3-40 FGFL5-60 FGFR5-60 Stainless steel 304 BT-3S Replacement Parts 3 Basket Stainless steel 304 Part No. Qty. 1 1 1 1 1 No.

Table of Contents

60 40 40 40 40 27 27 27 40 27 Suction flow rate Suction flow rate Suction flow rate Suction flow rate 20 13 13 13 13 20 0 60 40 20 0.6 0.3 0.5 0.4 0.2 0 0.1 0 60 40 20 0 0.6 0.5 0.4 0.3 0.2 0.1 Supply pressure (MPa) Flow rate (l/min (ANR)) Supply pressure (MPa) Flow rate (l/min (ANR)) 13-4-26 7 Series ZM Vacuum Ejector: With Solid State Timer Exhaust Characteristics/Flow Characteristics,

2-Color Display High Precision

ZSE40A(F)/ISE40A-C4-E ZSE40A(F)/ISE40A-C6-E Panel mounting 41.2 40 29.2 4 43.6 40 Panel thickness 1 to 5 38.6 ZSE40A(F)/ISE40A-C4-F ZSE40A(F)/ISE40A-C6-F Panel mounting + Front protective cover 44.7 40 7.5 29.2 51.2 Panel thickness 1 to 5 38.6 12 Series ZSE40A(F)/ISE40A 2-Color Display High Precision Digital Pressure Switch Dimensions Panel fitting dimensions 36 0.3 36 x n pcs. + 4 x (n

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

Note) Maximum mountable valve number: 40 pcs.

VZ3000

plug connector (M) VZ3220-M-M5 300 (Lead wire length) 300 (Lead wire length) : With light/surge voltage suppressor DIN terminal (D) VZ3220-D-M5 C4 C6 Built-in One-touch fittings VZ3220-MAX. 10 C4: MAX. 7 C6: MAX. 7.5 Applicable cable O.D. 3.5 to 7 2-One-touch fitting (A, B port) Applicable tubing model C4: T0425 C6: T0604 3-3-22 5 Port Solenoid Valve Body Ported Series VZ3000 3 Position Closed

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

, M5 60.3 C3: One-touch fittings for 3.2 Manual override C4: One-touch fittings for 4 C6: One-touch fittings for 6 M5: M5 thread (C3,C4,C6) 47.5 9.5 (M5) 26.5 25.5 5.4 18.5 5 23.2 Mounting holes 10 (47.5) 3-M5 X 0.8 P, R port 9.9 9.9 5 1 3 2-PE port 22.2 Die cast hole For manifold gasket positioning L plug connector (L): VQZ122 wLwC3, C4, C6, M5 0 1 M plug connector (M): VQZ122 wMwC3, C4

modular-press-e

Replacement Procedure is P.437 Construction AWG20 AWG30/40 Actuators Modular F.R.L.

Modular F.R.L. Pressure Control Equipment

Replacement Procedure is P.437 Construction AWG20 AWG30/40 Actuators Modular F.R.L.

Large Size Vacuum Module: Series ZR

(l/min (ANR)) Air consumption 80 80 80 80 Vacuum pressure Vacuum pressure Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure (kPa) Air consumption 70 70 70 70 60 60 60 60 50 50 50 50 40 40 40 40 Suction flow 30 30 30 30 Suction flow 20 20 20 20 10 10 10 10 Supply pressure (MPa) Suction flow (l /min (ANR)) Supply pressure (MPa) Suction flow (l/min (ANR)) ZR1

5 Port Air Operated Valve Series SYA3000/5000/7000 1

VA 48 SYA320-C4 One-touch M5 x 0.8 M5 x 0.8 0.35 0.16 0.42 (0.41) 0.34 (0.37) 0.63 0.11 (0.11) 3 position fitting for 4 VM Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0.76 (0.46) 0.42 (0.34) 0.21 (0.12) 0.59 0.29 0.15 40 42 Single Double 2 position VR 0.30 0.19

VZS

Passage Porting specifications Symbol 4(A), 2(B) Side 5(R1), 3(R2) 1(P) Common Common 1 Non Plug-in Type: Stacking Type Manifold Base Wiring for every valve VV5ZS2 C4 06 51 1 Thread type Series VZS2000 Manifold Standard Nil NPT Rc N T F Non plug-in type Stacking type manifold base NPTF G Option Port size Rc 1 8 01 Embedded type One-touch fitting Applicable tubing O.D.: 4 Stations C4 02 2